
6.TROUBLESHOOTING B-70314EN/02
- 140 -
No. Cause of
trouble
Solution
4 Insufficient turbo
blower cooling
When the temperature of the turbo blower motor
section is high, check whether the cooling water path
is clogged. This alarm is issued also when the cooling
water in the turbo blower becomes insufficient. If the
temperature of the bottom plate of the turbo blower is
high, check whether the cooling water path is clogged.
If the cooling water path is clogged, clean the turbo
blower.
5 Abnormal
temperature
increase in turbo
blower
The turbo blower heated up abnormally in the
following situations:
1) The turbo blower was turned when the atmospheric
pressure was observed inside the gas circulating
system.
2) A significant internal leakage occurred, increasing
the gas pressure.
3) The set pressure for the inside of the discharge
tubes is too high.
4) The oil has been degraded.
Investigate the cause of the above, and take
appropriate action.
ALM No.4107
MIRROR NOT INSTALLED
In an oscillator in which a beam reflection unit is installed, this
alarm is issued if this unit is not attached with a mirror holder.
Alarm output condition
This alarm is issued if the beam reflection unit signal becomes "0" after
the discharge start ready (LRDY) state is established in the sequence.
Related data
DGN.962#3 *M-R Beam reflection unit
No. Cause of trouble Solution
1 Invalid pin setting If the optical path length unit is not provided,
set jumper pin SP2 on the PCB
(A16B-1600-0670) to x.
2 Faulty turbo PCB Replace the turbo PCB.
3 Faulty micro switch Replace the micro switch
4 Anomaly of connection
cable
Check the cable connections.