
FANUC LASER C series
Improved Mirror Stage
FANUC LASER C series
Improved Mirror Stage
1. Outline
In laser C1000-E, C2000-E, C4000-E, the improvement design of the mirror stage was
done for the improvement of reliability and maintainability. Because the distortion
when the mirror is mounted by this improvement design decreases, the reproducibility
of the beam mode when you exchanges the mirror, and the mirror is cleaned improves
and shortening the mirror adjustment time can be expected.
2. The change content is detailed.
The mirror stage processed to the output coupler mount and the rear mirror mount in
high accuracy was adopted, and a mirror base was deleted.
Before
(With "Mirror Base")
After
(Surface high accuracy
processed)
The mirror hits to a personally precise mirror stage without the mirror base and is
mounted. Therefore, the distortion of the mirror when the mirror is mounted is greatly
decreased.
Before
The distortion occurs in the mirro
because of the difference of the
accuracy of surface of mirror touched.
(Mirror geometry observation with ZYGO
interferometer)
fte
The distortion of the mirror decreases
by improving surface of mirro
touched accuracy.
(Mirror geometry observation with ZYGO
interferometer)
1/4
FANUC LTD
A-81053E-037
Description Design Date Edit.
01 021007 MURAKAMI
title
Sheet
Draw. No.
MURAKAMI
03 030303 MURAKAMI Add C1000-E, C2000-E at P1∼P4 M. Maed
Changed P2, P3
M. Maed
02 030127
M. Maed