
4. DESCRIPTION OF PARAMETERS
B–63670EN/01
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15200 Power specified for power calibration when half of the discharge tubes are used
[Data type] Word
[Unit of data] W
[Valid data range] 0 to 32767
Specify the power to be specified to obtain a power calibration coefficient
when half of the discharge tubes are used.
15201 Power specified for power calibration when all the discharge tubes are used
[Data type] Word
[Unit of data] W
[Valid data range] 0 to 32767
Specify the power to be specified to obtain a power calibration coefficient
when all the discharge tubes are used.
15203 Power calibration limit
[Data type] Word
[Unit of data]
[Valid data range] 0 to 32767
When the power calibration coefficient exceeds this setting, the output
drop alarm signal (F220#6 MWRN) is output to indicate that the mirror
should be cleaned or replaced.
15204 Power calibration coefficient
[Data type] Word
[Unit of data]
[Valid data range] 0 to 32767
The coefficient is used to calibrate the specified power according to the
actual power. This parameter is automatically specified during power
calibration after the oscillator start signal (G222#6, RUN) is turned on.
15205 Power calibration time
[Data type] Word
[Unit of data] Second
[Valid data range] 0 to 32767
Specify a power calibration time.
4.9
PARAMETERS
RELATED TO
OSCILLATOR
CONTROL