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Servo Amplifier Unit Alpha Series Maintenance manual Page 35

Maintenance manual
5. AXIS LEFT UNUSED IN A
MULTI-AXIS AMPLIFIER
B–65195EN/01
START-UP PROCEDURE
30
5
AXIS LEFT UNUSED IN A MULTIĆAXIS AMPLIFIER
If an axis is left unused, for example, in a two-axis amplifier, remove the
cable between the NC and servo amplifier unit, and insert a dummy
connector,with pins 8 and 10 strapped, into the JV*B (for type A
interface) or JS*B (for type B interface) connector of that axis.
If a dummy connector is inserted, it prevents the motor of the
corresponding axis from being energized. In this state, the dynamic brake
is not applied to the motor, leaving it in a free state. Be careful especially
about vertical- axis motors in this situation.
Servo
Amplifier
JV*B
or JS*B
² Dummy Connector with pins 8 and 10 strapped
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Contents Summary of Servo Amplifier Unit Alpha Series Maintenance manual

  • Page 1GE Fanuc Automation Computer Numerical Control Products Alpha Series Servo Amplifier Unit Maintenance Manual B- 65195EN/01 March 1998
  • Page 2Warnings and notices for GFLE-003 this publication Warning In this manual we have tried as much as possible to describe all the various matters. However, we cannot describe all the matters which must not be done, or which cannot be done, because there are so many possibilities. Therefore, matters wh
  • Page 3PREFACE This manual provides information necessary for maintenance of the FANUC Control Motor Amplifier α series (servo amplifier units SVU and SVUC). There are two servo amplifier unit types, as listed below. Name Designation Remark SVU A06B-6089-H*** · The specification of this type is partly diff
  • Page 4IMPORTANT When maintaining or inspecting the servo amplifiers, keep the power supply switched off. Also make sure that the “CHARGING” LED (red) beside the circuit breaker on the front panel of the servo amplifier is off. (See Appendix A.)
  • Page 5B–65195EN/01 Table of contents I. START-UP PROCEDURE 1. OVERVIEW . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3 2. CONFIGURATION . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
  • Page 6Table of contents B–65195EN/01 3.3.1 Servo Adjustment Screen . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 49 3.3.2 Overload Alarm . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
  • Page 7I. START-UP PROCEDUR
  • Page 8B–65195EN/01 START-UP PROCEDURE 1. OVERVIEW 1 OVERVIEW This part provides information necessary to confirm the system configuration and start up the servo amplifier units : – Configuration – Start- up procedure – Operation confirmation procedure 3
  • Page 92. CONFIGURATION START-UP PROCEDURE B–65195EN/01 2 CONFIGURATION 4
  • Page 10B–65195EN/01 START-UP PROCEDURE 2. CONFIGURATION 2.1 The basic configuration is shown below. BASIC Refer to “FANUC CONTROL MOTOR AMPLIFIER α Series (SERVO AMPLIFIER UNIT) Descriptions” (B-65192EN) for detail. CONFIGURATION Ex. Tow SVU2s Servo Servo Power Supply For Amplifier Amplifier Control Circui
  • Page 112. CONFIGURATION START-UP PROCEDURE B–65195EN/01 2.2 MAJOR COMPONENTS 2.2.1 SVU (1) SVU 1 Model Oder Wiring board P. C. B. Remark specification specification specification SVU1-12 A06B-6089-H101 A16B-2202-0950 A20B-2002-0030 SVU1-20 A06B-6089-H102 A16B-2202-0951 SVU1-40 A06B-6089-H104 A20B-2002-0040
  • Page 12B–65195EN/01 START-UP PROCEDURE 2. CONFIGURATION 2.2.2 SVUC (1) SVUC 1 Model Oder Wiring board P. C. B. Remark specification specification specification SVUC1-4 A06B-6090-H002 A16B-2202-0955 A20B-2002-0030 /03B or later SVUC1-12 A06B-6090-H003 A16B-2202-0956 SVUC1-40 A06B-6090-H004 A20B-2002-0045 A2
  • Page 133. START-UP PROCEDURE START-UP PROCEDURE B–65195EN/01 3     8
  • Page 14B–65195EN/01 START-UP PROCEDURE 3. START-UP PROCEDURE 3.1 Start-up procedure OVERVIEW OF THE START-UP 1. Confirm the CNC model, nd the specifications of the control PROCEDURE motors, detectors, and servo amplifier units. 2. Check for damage to the appernce. 3. Confirm the line voltage and power requ
  • Page 153. START-UP PROCEDURE START-UP PROCEDURE B–65195EN/01 3.2 CONNECTING THE POWER SUPPLY 3.2.1 Confirming the Line (1) Line voltge Voltage and Power Before connecting the power source to the mchine, check the voltge of the power source. Requirements Item Specifiction Three-phase input for Voltage 200/2
  • Page 16B–65195EN/01 START-UP PROCEDURE 3. START-UP PROCEDURE (1) Leakage current from the motor Determine the leakage current from each motor according to the table below. Motor model Leakage current of commercial power frequency component α0.5 to α6 1.8 mA α12 to α22 2.0 mA α30 to α40 2.5 mA 11
  • Page 173. START-UP PROCEDURE START-UP PROCEDURE B–65195EN/01 3.3 There are four channel switches above the 7-segment LED behind the terminal board cover on the front of the servo amplifier. These switches SWITCH SETTING should be set as described below before use of the servo amplifier. (1) Positions The s
  • Page 18B–65195EN/01 START-UP PROCEDURE 3. START-UP PROCEDURE  If the setting is incorrect, the regenerative discharge control circuit failure alarm (DCSW) cannot be detected correctly. D SVU1- (12, 20) 3 4 Regenerative Discharge Resistor ON ON Built-in ON OFF Separate A06B-6089-H510 OFF OFF Separate A06B-
  • Page 193. START-UP PROCEDURE START-UP PROCEDURE B–65195EN/01 3.4 Use of an absolute pulse coder requires a battery. The way the battery is connected varies with the type (A or B) of the interface used between the CONNECTING THE NC and the servo amplifier unit. BATTERY FOR AN (1) Type A ABSOLUTE PULSE The b
  • Page 20B–65195EN/01 START-UP PROCEDURE 3. START-UP PROCEDURE 3.5 CONNECTING THE (1) Type SEPARATE D For SVU A06B-6089-H101 to H102 A06B-6089-H510 REGENERATIVE (16Ω/100W, with natural cooling) DISCHARGE UNIT A06B-6089-H101 to H105, H201 to H210 A06B-6089-H500 (16Ω/200W, with natural cooling) (A06B-6066-H500
  • Page 213. START-UP PROCEDURE START-UP PROCEDURE B–65195EN/01 (2) Connecting 1. A06B-6089-H500, H510 SVU, SVUC Separate Regenerative Discharge Unit T1 T3 RC 1 ÃÃ ÃÃ Note 1) ÃÃ Resistor RI 16Ω RE 2 TH1 3 Note 1) Thermostat Normally Short TH2 4 Notes To connect a separate regenerative discharge unit, remove j
  • Page 22B–65195EN/01 START-UP PROCEDURE 3. START-UP PROCEDURE 2. A06B-6089-H711, H712, H713, H714 SVU1-130, SVUC1-130 Separate Regenerative Discharge Unit T1 T3 RC 1 Note 1) ÃÃ ÃÃ Resistor ÃÃ RI H711, H712 8Ω H713, H714 16Ω RE 2 TH1 3 Note 1) Thermostat Normally Short TH2 4 FAN1 5 ÃÃ ÃÃ Fan FAN2 6 Notes To
  • Page 233. START-UP PROCEDURE START-UP PROCEDURE B–65195EN/01 3.6 INITIALIZING SERVO (1) Before servo parameter initialization PARAMETERS Before starting servo parameter initialization, confirm the following: 1. NC model (Example: Series 15–B) 2. Servo motor model (Example: α 6/2000) 3. Pulse coder built in
  • Page 24B–65195EN/01 START-UP PROCEDURE 3. START-UP PROCEDURE Servo set 01000 N0000 X axis Z axis INITIAL SET BITS 00001010 00001011 Motor ID No. 16 16 AMR 00000000 00000000 CMR 2 2 Feed gear N 1 1 (N/M) M 100 1 Direction Set 111 –111 Velocity Pulse No. 8192 819 Position Palse No. 12500 1250 Ref. counter 10
  • Page 253. START-UP PROCEDURE START-UP PROCEDURE B–65195EN/01 4. Specify the motor ID No. Select the motor ID No. according to the model and specification (four digits in the middle segment of A06B–XXXX–BXXX) of your motor. Motor model α12HV α22HV α30HV αC3/2000 αC6/2000 αC12/2000 αC22/1500 Motor specificat
  • Page 26B–65195EN/01 START-UP PROCEDURE 3. START-UP PROCEDURE (Example of setting) For detection in 1 µm units, specify as follows: Number of necessary Ball screw lead F&FG position pulses 10 (mm/rev) 10000 (pulses/rev) 1/100 20 20000 2/100 or 1/50 30 30000 3/100 (Example of setting) If the machine is set t
  • Page 273. START-UP PROCEDURE START-UP PROCEDURE B–65195EN/01 9. Specify the number of velocity pulses and the number of position pulses. Semi–closed Full–closed Command unit (µm) 1 0.1 1 0.1 Initialization bit b0=0 b0=1 b0=0 b0=1 Number of velocity pulses 8192 819 8192 819 Number of position pulses 12500 1
  • Page 28B–65195EN/01 START-UP PROCEDURE 3. START-UP PROCEDURE motor to make one turn, or a value obtained by dividing the number by an integer. (Example of setting) α pulse coder, semi–closed (detection in 1 µm units) Number of nec- Reference Ball screw lead essary position Grid width counter pulses 10mm/re
  • Page 293. START-UP PROCEDURE START-UP PROCEDURE B–65195EN/01 3. Absolute position communication is performed, and a request to return to the ⇐ These steps reference position is displayed. were added. 4. More motor more than one revolution by JOG Feed. 5. Turm off and on the CNC. 6. Absolute position commun
  • Page 304. OPERATION CONFIRMATION B–65195EN/01 START-UP PROCEDURE METHOD 4        25
  • Page 314. OPERATION CONFIRMATION METHOD START-UP PROCEDURE B–65195EN/01 4.1 CONFIRMATION PROCEDURE 1. Supply power. The STATUS indicator does not indicate “–”. See Section 4.3. 2. The STATUS indicator indicates “–”. 3. After confirming the NC parameters,release the emergency stop condition. The STATUS indi
  • Page 324. OPERATION CONFIRMATION B–65195EN/01 START-UP PROCEDURE METHOD 4.2 The check pins in the servo amplifier unit enable checking the control power supply voltage and motor current. There are six check pins in the SERVO AMPLIFIER servo amplifier unit. Open the terminal cover on the servo amplifier uni
  • Page 334. OPERATION CONFIRMATION METHOD START-UP PROCEDURE B–65195EN/01 Then the motor instantaneous current can be obtained by multipling this coefficient to the voltage observed on the check-pin. For example SVU1-40 40A Coefficient to calculate = = 10 [A/V] the motor current 4V The servo amplifier name S
  • Page 344. OPERATION CONFIRMATION B–65195EN/01 START-UP PROCEDURE METHOD 4.3 The STATUS indicator is a 7-segment LED indicator above the check pins. STATUS INDICATOR Indication Description The 7-segment indicator is off. – The control power is not supplied. – The power supply circuit in the servo amplifier
  • Page 355. AXIS LEFT UNUSED IN A MULTI-AXIS AMPLIFIER START-UP PROCEDURE B–65195EN/01 5 AXIS LEFT UNUSED IN A MULTIĆAXIS AMPLIFIER If an axis is left unused, for example, in a two-axis amplifier, remove the cable between the NC and servo amplifier unit, and insert a dummy connector,with pins 8 and 10 strapp
  • Page 36B–65195EN/01 START-UP PROCEDURE 6. SERVO CHECK BOARD 6 SERVO CHECK BOARD (1) General The servo check board receives the digital value used for control inside the digital servo as numerical data and converts it to an analog form. (2) Servo check board specifications Specification Name Servo check boa
  • Page 376. SERVO CHECK BOARD START-UP PROCEDURE B–65195EN/01 S Series 15–B, 16, 18, 20, 21, Power Mate MODEL D, Power Mate MODEL F NC Servo check Servo check board first and board third and second axes fourth axes MAIN CPU Preventing reverse insertion cable Adaptor TEST1 TEST2 Connector cable JA8A CN0 CN1 T
  • Page 38B–65195EN/01 START-UP PROCEDURE 6. SERVO CHECK BOARD b7 b6 b5 b4 b3 b2 b1 b0 1956 VCM2 VCM1 2012 8X12 VCM2 VCM1 Specified speed / 5V 0 0 0.9155 rpm 0 1 14 rpm 1 0 234 rpm 1 1 3750 rpm To check small vibrations, monitor the entire vibration on the DC mode of the ascilloscope then enlarge monitor the
  • Page 396. SERVO CHECK BOARD START-UP PROCEDURE B–65195EN/01 Signal output Maximum Applicable for maximum Ap/V current servo moter current 12Ap 4.44V 2.7 α0.5, α1/3000 α/2000, α2/3000 20Ap 4.44V 4.5 αC3/2000, αC6/2000, αC12/2000 40Ap 4.44V 9 α12HV, α22HV, α30HV αC22/1500, αC30/1200 αM3/3000 α3/3000, α6/2000
  • Page 40II. TROUBLESHOOTING AND RECOVERY
  • Page 41B–65195EN/01 TROUBLESHOOTING AND RECOVERY 1. OVERVIEW 1  This part describes troubleshooting and recovery procedures.Each item should be carefully followed to find the cause of trouble and take necessary actions. First, check the alarm No. (displayed on the CNC) and the STATUS indicator in t
  • Page 422. ALARM NUMBER AND BRIEF DESCRIPTIONS TROUBLESHOOTING AND RECOVERY B–65195EN/01 2 ALARM NUMBER AND BRIEF DESCRIPTIONS 38
  • Page 432. ALARM NUMBER AND B–65195EN/01 TROUBLESHOOTING AND RECOVERY BRIEF DESCRIPTIONS 2.1 ALARM NUMBER IN Series 15 (SERVO ALARMS) Alarm No. SVU, SVUC Description Remark SV001 Overload alarm (OVC) 3.3.2 SV003 8 L axis over-current alarm (HCL) 3.1.2 8. L axis IPM alarm (IPML) 3.1.2 9 M axis over- current
  • Page 442. ALARM NUMBER AND BRIEF DESCRIPTIONS TROUBLESHOOTING AND RECOVERY B–65195EN/01 2.2 ALARM NUMBER IN Series 0-C (SERVO ALARMS) Alarm No. SVU, SVUC Description Remark 309 Alarm 3 α pulse coder error alarm (OVC) 3.3.6 309 Alarm 4 Pulse coder communication error alarm 3.3.8 400 Alarm1 Bit7 Overheat ala
  • Page 452. ALARM NUMBER AND B–65195EN/01 TROUBLESHOOTING AND RECOVERY BRIEF DESCRIPTIONS 2.3 ALARM NUMBER IN Series 16, 18, 20 (SERVO ALARMS) Alarm No. SVU, SVUC Description Remark 350 Alarm3 α pulse coder error alarm 3.3.6 350 Alarm4 bit6 Rotation speed data error alarm 3.3.7 351 Alarm4 Pulse coder communi
  • Page 463. TROUBLESHOOTING AND RECOVERY PROCEDURES TROUBLESHOOTING AND RECOVERY B–65195EN/01 3 TROUBLESHOOTING AND RECOVERY PROCEDURES 42
  • Page 473. TROUBLESHOOTING AND B–65195EN/01 TROUBLESHOOTING AND RECOVERY RECOVERY PROCEDURES 3.1 SERVO AMPLIFIER UNIT 3.1.1 If an alarm condition related to the servo amplifier unit occurs, the LED Indications and 7-segment LED indicator on the amplifier front panel behaves as listed below. Meanings Type LE
  • Page 483. TROUBLESHOOTING AND RECOVERY PROCEDURES TROUBLESHOOTING AND RECOVERY B–65195EN/01 Notes 1 The IPM can detect the following alarms. – Over-current – Over-heat – Drop in IPM control power voltage 2 When the control power is separated from the main power, if the circuit breaker of the servo amplifie
  • Page 493. TROUBLESHOOTING AND B–65195EN/01 TROUBLESHOOTING AND RECOVERY RECOVERY PROCEDURES Type LED Action Over-regenerative (1) The average regenerative discharge energy is probably too high. Reduce the discharge alarm frequency of acceleration/deceleration. (DCOH) (2) The connection of the thermostat li
  • Page 503. TROUBLESHOOTING AND RECOVERY PROCEDURES TROUBLESHOOTING AND RECOVERY B–65195EN/01 Type LED Type LED Type LED L-axis over- M-axis over- L-and M-axes current alarm current alarm over-current (HCL) (HCM) alarm (HCL) Action (1) Check that following parameters are set to standard values. If they are n
  • Page 513. TROUBLESHOOTING AND B–65195EN/01 TROUBLESHOOTING AND RECOVERY RECOVERY PROCEDURES Type LED Type LED Type LED Remarks L-axis IPM alarm M-axis IPM alarm L-and M-axes IPM Both figure and (IPML) (IPMM) alarm (IPMLM) period appear simultaneously. Action (1) Only the SVU1- 20(A06B- 6089- H102)has a bui
  • Page 523. TROUBLESHOOTING AND RECOVERY PROCEDURES TROUBLESHOOTING AND RECOVERY B–65195EN/01 3.2 CURRENT (1) Exchange the command cables as shown in the example below. Turn on CNC in an emergency stage. CONVERSION – If the alarm is issued on the same axis, go to (2). FAILURE ALARM – If the alarm is issued n
  • Page 533. TROUBLESHOOTING AND B–65195EN/01 TROUBLESHOOTING AND RECOVERY RECOVERY PROCEDURES 3.3 SERVO SOFTWARE 3.3.1 Cause the servo adjustment screen to appear, and check the position error, Servo Adjustment actual current, and actual speed on it. Screen Using the keys on the CNC, enter the required value
  • Page 543. TROUBLESHOOTING AND RECOVERY PROCEDURES TROUBLESHOOTING AND RECOVERY B–65195EN/01 3.3.2 (1) Make sure that the motor is not vibrating. Overload Alarm ⇒ If a motor vibrates, the current flowing in it becomes more than necessary, resulting in an alarm. (2) Make sure that the power line to the motor
  • Page 553. TROUBLESHOOTING AND B–65195EN/01 TROUBLESHOOTING AND RECOVERY RECOVERY PROCEDURES b7 b6 b5 b4 b3 b2 b1 b0 1808 TGAL 2003 8X03 TGAL (b1)=1 (the software disconnected alarm level is changed.) 1892 Software disconnected alarm level 2064 8X64 Standard value: 4 ⇒ The setting is increased by 4. (3) If
  • Page 563. TROUBLESHOOTING AND RECOVERY PROCEDURES TROUBLESHOOTING AND RECOVERY B–65195EN/01 NOTE The parameter numbers in the table are in the following order: No. (Series 0–C)–(Series 15)–(Series 16, 18, 20, 21) Survey If the adjustments described below cannot eliminate overflow, let us work out the setti
  • Page 573. TROUBLESHOOTING AND B–65195EN/01 TROUBLESHOOTING AND RECOVERY RECOVERY PROCEDURES Adjustment 3: Feed forward coefficient (No. 8X68–1961–2068, No. 8X92–1985–2092 (advance)) [9060, 9070, Series] Specify the position gain setting range expansion function. Function bit: No. 1804–2000–1000, B4=1 (Seri
  • Page 583. TROUBLESHOOTING AND RECOVERY PROCEDURES TROUBLESHOOTING AND RECOVERY B–65195EN/01 Current setting value/E Current setting value/E Series Series Series 15 Series 16 Series 15 Series 16 0–C 0–C No. 8X23 No. 1876 No. 2023 No. 8X53 No. 1865 No. 2053 8X24 1891 2024 8X74 1967 2074 8X43 1855 2043 8X76 1
  • Page 593. TROUBLESHOOTING AND B–65195EN/01 TROUBLESHOOTING AND RECOVERY RECOVERY PROCEDURES Position gain overflow check 9060, 9070 seris When is servo softwore series ? l 9046 seris Position gain parameter setting value Number of velocity pulses 4 655 X X X ... 2000 Number of position pulses DMR Is 32767
  • Page 603. TROUBLESHOOTING AND RECOVERY PROCEDURES TROUBLESHOOTING AND RECOVERY B–65195EN/01 l (9060, 9070 series) Position gain parameter setting value ... No Number of velocity pulses 655 X X ... 2000 Number of position pulses Is 32767 exceeded? Is 32767 exceeded? No Is the feed gear in use? Yes No Is
  • Page 613. TROUBLESHOOTING AND B–65195EN/01 TROUBLESHOOTING AND RECOVERY RECOVERY PROCEDURES 3.3.6 b7 b6 b5 b4 b3 b2 b1 b0 Pulse Coder Error Alarm 3 CSAL BLAL PHAL BZAL CKAL SPH Alarm (⇒ See Section 3.3.1.) Whether the alarm occurs in each pulse coder α pulse Serial coder A SPH (b0) Probably, pulse coder or
  • Page 623. TROUBLESHOOTING AND RECOVERY PROCEDURES TROUBLESHOOTING AND RECOVERY B–65195EN/01 D α pulse coder b7 b6 b5 b4 b3 b2 b1 b0 Alarm 1 FBAL b7 b6 b5 b4 b3 b2 b1 b0 Alarm 2 ALDF b7 b6 b5 b4 b3 b2 b1 b0 Alarm 3 CMAL (⇒ See Section 3.3.1.) CMAL (b3) A pulse count error occurred. If the CNC software does
  • Page 63B–65195EN/01 TROUBLESHOOTING AND RECOVERY 4. REPLACING THE FUSE 4 REPLACING THE FUSE When replacing the fuse,keep the power supply switched off. Also make sure that the “CHARGING” LED (red) beside the circuit breaker on the servo amplifier front panel is off. IMPORTANT When replacing the fuse,keep t
  • Page 64III. COMPATIBILITY OF THE SVU AND SVUC WITH THE C SERIES AMPLIFIER
  • Page 65COMPATIBILITY OF THE SVU AND SVUC WITH THE B–65195EN/01 C SERIES AMPLIFIER 1. OVERVIEW 1  This part describes the cautions to be observed when replacing the C series amplifier with SVU or SVUC. 63
  • Page 662. COMPATIBILITY OF THE SVU COMPATIBILITY OF THE SVU AND SVUC WITH THE AND SVUC WITH THE C SERIES AMPLIFIER C SERIES AMPLIFIER B–65195EN/01 COMPATIBILITY OF THE SVU AND SVUC WITH THE C 2 SERIES AMPLIFIER Table 1 lists the differences of the SVU and SVUC from the C series amplifier. When replacing th
  • Page 67COMPATIBILITY OF THE SVU 2. COMPATIBILITY OF THE SVU AND SVUC WITH THE AND SVUC WITH THE B–65195EN/01 C SERIES AMPLIFIER C SERIES AMPLIFIER Note 3 : Specification of the MCC (RELAY) confirmation contact The C series amplifier makes the auxiliary contact (b-contact) of the MCC, installed on the three
  • Page 68COMPATIBILITY OF THE SVU AND SVUC WITH THE 3. SVUC SPECIFICATION CODE C SERIES AMPLIFIER B–65195EN/01 3        “H” in the specification code is common to both C series amplifier and SVUC. (It is not common to the SVU.) · C series amplifier · SVUC A06B-6066-H A06B-6090-H   ÃÃ
  • Page 69APPENDI
  • Page 70A. SERVO AMPLIFIER UNIT B–65195EN/01 APPENDIX FRONT PANEL A SERVO AMPLIFIER UNIT FRONT PANEL 69
  • Page 71B.        APPENDIX B–65195EN/01 B MOTOR GROUNDING CONNECTION 70
  • Page 72B–65195EN/01 Index [A] Actions to be Taken on Each Alarm, 44 Alarm Number and Brief Descriptions, 38 [M] Alarm Number in Series 0-C (Servo Alarms), 40 Major Components, 6 Alarm Number in Series 15 (Servo Alarms), 39 Motor Grounding Connection, 70 Alarm Number in Series 16, 18, 20 (Servo Alarms), Mot
  • Page 73Revision Record FANUCĄCONTROL MOTOR AMPLIFIER α series SERVO AMPLIFIER UNIT MAINTENANCE MANUAL (B–65195EN) 01 Aug., ’95 Edition Date Contents Edition Date Contents