
B-70264EN/02 3.INTERNAL STRUCTURE
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(3) Folding mirror
A mirror with an Si (silicon) substrate coated with dielectric to
reflect the laser beam.
It linearly polarizes the laser beam. A system equipped with an
optional antireflective mirror (ATFR) is available.
The antireflective mirror consists of a copper substrate with
coating.
(4) Discharge tube
A pair of Ag (silver) electrodes are metallized on the surface of a
hollow quartz glass pipe. A high-frequency discharge between
these electrodes injects electrical energy into the laser gas. Each
electrode is coated with ceramic, preventing it from degrading
and thus improving system reliability.
(5) Trigger electrode
This electrode is capable of predischarging outside the laser
oscillation area so that the laser output becomes completely zero
when the beam is off.
(6) Power sensor
An optical sensor which detects the intensity of the laser beam,
transmitted through the rear mirror, thus enabling monitoring of
the laser output level.
(7) Oil mist decomposing element
This element is capable of decomposing the organic matter that
gets into the laser gas circulating system, with photocatalytic
effect, using the ultraviolet rays generated from the discharge
tubes.
(8) Laser power supply
This power supply outputs high-frequency power (2 MHz)
according to a specified output with commands from the CNC
and supplies it to the discharge tubes via the matching box.
(9) Matching box
The matching box contains a matching circuit, which ensures
that power is effectively input to the discharge tubes.
(10) Turbo blower
This fan circulates the laser gas in the gas circulating system at
high speed. It rotates at a high speed of 60,000 revolutions per
minute (min
-1
).
(11) Inverter
This inverter drives the turbo blower. It is responsible for
acceleration/deceleration control and issuing alarms during start
and stop of the blower.