
3.INTERNAL STRUCTURE B-70264EN/02
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(12) Turbo PCB
This PCB relays overheating and frequency reached signals of
the turbo blower. In addition, it monitors the oil level of the
turbo blower.
(13) Gas dust collection unit
This unit is a cyclone dust collector that removes dust that gets
in the gas circulating system.
(14) Heat exchanger (inlet)
Water-cooled heat exchanger used to cool the laser gas that has
been heated by discharge, before it is drawn into the turbo
blower.
(15) Heat exchanger (outlet)
Water-cooled heat exchanger used to cool the laser gas that has
been heated by compression in the turbo blower, before being
forced into the discharge tubes.
(16) Gas control unit (C1000-E, C5000-E, C6000-E)
This gas control unit constantly monitors the gas pressure in
each discharge tube and supplies fresh laser gas to the circulating
system to keep the pressure constant while exhausting degraded
laser gas. It also monitors the supply status of the laser gas,
purge check for the circulating system, and other items and has a
function of adjusting the amount of flow of the gas to be
exhausted. It provides the functions of both the C2000-E or
C4000-E pressure control unit and the exhaust control unit.
(17) Pressure control unit (C2000-E, C4000-E)
This gas control unit constantly monitors the gas pressure in
each discharge tube and supplies fresh laser gas to the circulating
system to keep the pressure constant while exhausting degraded
laser gas. It also monitors the supply status of the laser gas,
purge check for the circulating system, and other items.
(18) Exhaust control unit (C2000-E, C4000-E)
The exhaust control unit is capable of controlling the flow rate of
the gas to be exhausted.
(19) Exhaust pump
This pump is used to vacuum-exhaust laser gas from the gas
circulating system such that its pressure falls to that used for
laser oscillation. In addition, it exhausts part of the degraded gas
in the gas circulating system.
(20) Hour meter
The hour meter records the total number of hours that the laser
oscillator has operated (how many hours the exhaust pump has
operated) to indicate whether maintenance or inspection is
necessary.