
5.ALARMS B-70264EN/02
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ALM No.4076
LASER POWER DOWN
This alarm is issued if the monitored laser output is lower than
the specified laser output by at least the allowable value.
Alarm output condition
This alarm is issued when the actual laser output level is lower than the
average command power (power x duty) by more than the value set in
parameter No. 15271. Monitoring, however, is not performed for three
seconds after the beam is turned or after the output is changed.
Related parameters
PRM.15271 Allowable output drop value
Related data
DGN.906 Actual output
ALM No.4077
ABSORBER TEMP.
This alarm is issued if the temperature absorber exceeds the
allowable value. In the usual operation, this beam absorber is
irradiated by the rated output only during the laser output
compensation conducted after the start of the oscillator.
Alarm output condition
This alarm is issued if the absorber temperature signal becomes "0"
after the start of the oscillator and immediately before the completion of
purging.
Related data
DGN.961#7 *ABT Absorber temperature
ALM No.4078
LASER TUBE PRES.
The gas pressure is monitored after the discharge start ready
condition (LRDY) is established. This alarm is issued, if the
monitored gas pressure deviates by
±100 (1330Pa) from the set
gas pressure.
Alarm output condition
This alarm is issued if the actual gas pressure falls out of the set gas
pressure ±100 after LRDY is established. The pressure is not monitored
from the time the HV ON signal is turned off until LRDY is established.
Related data
DGN.905 Actual gas pressure