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Automatic Aging Function Additional Manual Page 1

Additional Manual
fuji
04 03.05.13
TSUGESHITA
CORRESPONDENCE TO CALENDAR
03 03.05.13
TSUGESHITA
ADD MIN.OFFTIME, PMC PRAMETER
06 04.09.08
TOKITO
ADD. FOR ALM.4073
05 03.12.24
SUZUKI
ADD.APPLIED SOFTWARE AND EDIT.
EDIT. DATE DESIG. DESCRIPTION APPRO.
ＦＡＮＵＣ ＬＴＤ 001/10
AUTOMATIC AGING FUNCTION
1. Outline
This function executes aging automatically according to OFF time (period) of oscillator or
the laser gas condition of inner oscillator(vacuum system).
Applied software is as follows.
FS16i-LA B8F1-18
B8F3-06
FS16i-LB B8H1-02 (Add on 05
th
Ed.)
Power command and gas pressure command during aging is shown in the figure below.
POWER COMMAND
½PRM15320
Base Discharge
P
CE
, f
E
, D
E
Ｔ
NES = 1
NES = 0
NES = n - 1
NES = n (2
～
7)
LSTR
CLB
Start
HV OFF HV ON HV OFF HV ON HV OFF HV ONHV ON
½PRM
15326
PRM15331
PRM15325
COR
LTP
GAS PRESSURE
COMMAND
P
CE
, f
E
, D
E
P
CE
, f
E
, D
E
P
CC
, f
C
, D
C
CLB
Start
CLB
Start
CLB
Start
NES: Number of aging (PRM15334: This parameter is automatically set)
P
CE
: Power command during aging (PRM15326)
f
E
: Pulse frequency command during aging (PRM15327)
D
E
: Pulse duty command during aging (PRM15328)
P
CC
: Power command during power calibration (PRM15320)
f
C
: Pulse frequency command during power calibration (PRM15321)
D
C
: Pulse duty command during power calibration (PRM15322)
2. Method of executing aging
Some times of aging according to OFF time is automatically executed. If it is necessary to
execute aging in maintenance, execute it referring to “(2) Manual Aging”.
[Preparation]
Set the parameter so that aging function is effective (PRM15008#6=1).
Set PRM15320-PRM15333 in the parameter table
.
Refer to "5. Number of aging"
TITLE
Note) Set values of PRM15242, 15243 into PRM15324, 15325, because gas pressure
is sometimes changed in the field. And set (values of PRM15324, 15325)-100
into PRM15330
,
15331.
A-81053E-053
SHEET
AUTOMATIC AGING FUNCTION
DRAW. No.
(Rev. on 03rd Ed)
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Contents Summary of Automatic Aging Function Additional Manual

  • Page 1AUTOMATIC AGING fuji FUNCTION 1. Outline This function executes aging automatically according to OFF time (period) of oscillator or the laser gas condition of inner oscillator(vacuum system). Applied software is as follows. FS16i-LA B8F1-18 B8F3-06 FS16i-LB B8H1-02 (Add on 05th Ed.) Power command an
  • Page 2fuji (1) Automatic Aging After setting of parameters, aging below is automatically executed. - Number of aging is automatically set based on terminated time of oscillator at the last HV OFF. - If OFF time is less than Minimum OFF time(PRM15339), automatic aging is not executed - Automatic aging is s
  • Page 3fuji Note) When laser alarm No.4073, which means that a laser gas bottle becomes empty, occurs during purge operation, two times aging function is executed automatically at next time of laser start-up. This function is available with the software as follows. FS16i-LA B8F1-17, B8F3-05 FS16i-LB B8H1-0
  • Page 45. Number of aging (Rev. on 03rd Ed) Number of aging is automatically set according to OFF time. But according to setting value of minimum OFF time PRM15339, that number is different below. ① Minimum OFF time is between 30H and 83H OFF TIME NUMBER OF AGING 0H≦ OFF TIME < MINIMUM OFF TIME 0 MINIMUM O
  • Page 56. Parameter (Add Model on 03rd Ed) #7 #6 #5 #4 #3 #2 #1 #0 15008 EGE EGE This bit sets “enable” and “disable” of Automatic Aging function 1: enable 0: disable 15320 Power command for power calibration( This is enable at EGE=1) Power command to get power calibration efficiency When automatic aging f
  • Page 615323 Calibration time for power calibration (This is enable at EGE=1) Time of power command to get power calibration efficiency Unit : Sec Setting range : 0 - 32767 Standard setting : 180: C1000-E, C1500B, C2000B, C2000C, C2000-E 300: C3000C, C3000D, C4000A, C4000-E, C6000A,C6000B 15324 Tube pressu
  • Page 715326 Power command for aging (This is enable at EGE=1) Power command in executing aging with automatic aging Unit : W Setting range : 0 - 7000 Standard setting : 700: C1000-E 1000: C1500B 1500: C2000B,C2000C,C2000-E 2000: C3000C,C3000D,C6000A 2500: C4000A, C4000-E 4000: C6000B 15327 Pulse frequency
  • Page 815330 Tube pressure for power calibration(50Hz)(This is enable at EGE=1) Setting value of gas pressure for power calibration This is the same as PRM15331 for oscillator installed inverter. (This is setting value for oscillator not installed inverter in the area of 50Hz.) Unit : 0.1Torr Setting range
  • Page 915333 Pulse duty for power calibration and aging Pulse duty command for power calibration Unit : % Setting range : 0 - 100 Standard setting : 100 15334 Number of aging(This is enable at EGE=1) Times to execute aging sequence. This parameter (0,2 – 7) is automatically set according to OFF time when a
  • Page 10(Add on 03rd Ed) 15339 Minimum OFF time (This parameter is enable at EGE=1) OFF time for executing of automatic aging. Unit : HOUR Setting range : 30 - 120 Standard setting : 60 When setting value is less than 30, it is considered that 60 is set. When setting value is larger than 120 or equals 120,
  • Page 11