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FANUC Series 16/160-L Automatic Leak Check Function, Specifications Additional Manual Page 3

Additional Manual
Edit
Reco
g
nition
3／9
Date
Desi
g
n
FANUC Series 16i/160i –L
Automatic leak check function
Specifications
A-78037E
00.03.17
K.Suzuki
Contents
Date
Design
M.Sato
Title
of
Drawing
Drawing
No
Page
iii) CNC measures Laser gas pressure at regular intervals after all valves closed and logs the data
from DGN954 to DGN957 as diagnose information.
The first data is logged when 30 seconds has passed after all valves closed.
After that the pressure data are logged 3 times at 1/3 Leak judgement time (PRM.15154) intervals.
Logged data from DGN954 to DGN957 are cleared when Leak check mode starts.
iv) All valves closed state signal (F224#3:AVCL) is turned off and purge operation is started after
count –up the time set in PRM.15154.
Leak check mode signal (F224#2:LCKMD) is turned off when purge operation is completed.
The alarm monitor is enabled in the leak check mode as well as normal mode.
The operation when laser alarm occurred is also same operation as normal mode except that GVW is
disabled.
When Leak check ends or Vacuum pump abnormal alarm (No.4094) occurs, evacuating operation does
not work.
When gas pressure control start signal (G222#6:RUN) is turned on in the leak check mode, the normal
laser start-up sequence is executed.
Leak check mode signal (F224#2:LCKMD) and All valves closed state signal (F224#3:AVCL) are turned
off.
LCK=0, LCKON= OFF
RUN=ON
LCKMD=OFF
AVCL=0
(Normal sequence)
LCK=1, LCKON=ON
RUN=OFF
LCKMD=ON
A
VCL=1
(CASE1)
PRM15240
(PRM235)
CASE1：
Leak check mode is enable
d
if RUN-OFF is commanded
in normal sequence
CASE2：
Normal laser start-up
sequence is started i
f
RUN-ON is commanded in
Leak check mode
LCK=1, LCKON=ON
RUN=ON
LCKMD=OFF
AVCL=0
(CASE2)
Command voltage o
f
normal sequence
Gas pressure
V
oltage of power command
RUN ON
(Normal Seq.)
RUN OFF
(CASE1)
RUN ON
(CASE2)
t
t
HV OFF RUN OFF
(Normal Seq.)
Fig. 1 Laser control sequence
V
oltage in
CASE1
HV ON
(Normal Seq.)
V
oltage in
CASE2
HV ON
(CASE2)
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Contents Summary of FANUC Series 16/160-L Automatic Leak Check Function, Specifications Additional Manual

  • Page 1FANUC Series16/160-L Automatic leak check function Specifications Title FANUC Series 16i/160i –L of Automatic leak check function Drawing Specifications Drawing No A-78037E 07 05.02.21 M.Sato Page 8 is changed. 06 03.10.14 M.Sato Page 5,6 are added. Page 7,8 are changed. K.Suzuki Design Contents 1／9
  • Page 21. Outline The following actions work to check gas leak of laser resonator. i) All valves of laser oscillator are automatically shut. ii) Gas pressure in discharge tubes is measured and logged at regular intervals. iii) The data can be referred on diagnose screen or leak check screen. iv) This funct
  • Page 3iii) CNC measures Laser gas pressure at regular intervals after all valves closed and logs the data from DGN954 to DGN957 as diagnose information. The first data is logged when 30 seconds has passed after all valves closed. After that the pressure data are logged 3 times at 1/3 Leak judgement time (
  • Page 4Leak check mode Gas pressure Leak judgement time PRM.15154 TLJ=3Ts(sec) PRM15256 30(sec) Ts(sec) Ts(sec) Ts(sec) +75(sec) PRM15240 t RUN ON RUN OFF AVCL=1 AP=1 Pchk1 Pchk2 Pchk3 Pchk4 (DGN954) (DGN955) (DGN956) (DGN957) Fig. 2 Sampling of gas pressure Purge completion (AP=1) Leak check mode (LCKMD=1
  • Page 52.2. Leak check screen By using this screen, necessary parameters to use the Automatic leak check function can be set. Moreover, the result of leak check can be confirmed. Switching off Run signal (G222 #6:RUN) after setting the parameters on this screen can start Automatic leak check function. 2.2.
  • Page 62.2.2. How to display Leak check screen This screen is displayed according to the following order. (1) Set parameter MNT (PRM No.15160#0) to "1". (2) Push the MDI key "OFFSET" several times, and the laser screen is displayed. (3) Push the right edge soft key (continuance menu key), and the page is c
  • Page 73. Parameters #7 #6 #5 #4 #3 #2 #1 #0 15153 LCK Data type : Bit type LCK 0 : Automatic leak check function is disabled. 1 : Automatic leak check function is enabled 15154 Leak judgement time Data type : Word type Data unit : Second Data range : 3 - 65535 The time for keeping laser gas pressure with
  • Page 85. Diagnoses 954 Gas pressure in leak check mode 1st (Pchk1) 955 Gas pressure in leak check mode 2nd (Pchk2) 956 Gas pressure in leak check mode 3rd (Pchk3) 957 Gas pressure in leak check mode 4th (Pchk4) Laser gas pressure is logged in DGN954 at 30 seconds passed since all valves shut. And from DGN
  • Page 9Supplement ) Flow chart Sequence 11 ENTRY Leak check ENTRY Turbo-blower OFF Gas pressure control OFF DGN954 - DGN957 clear YES All valves OFF Alarm 4094 Vacuum pump abnormal？ AVCL=ON NO Vacuum pump stop Laser seq. num.(DGN908)=51 75sec WAIT 30sec WAIT NO LCKON=ON or LCK=1 ? Gas pressure logging 1st