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FANUC Series 16/160-L Automatic Leak Check Function, Specifications Additional Manual Page 5

Additional Manual
Edit
Reco
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nition
5／9
Date
Desi
g
n
FANUC Series 16i/160i –L
Automatic leak check function
Specifications
A-78037E
00.03.17
K.Suzuki
Contents
Date
Design
M.Sato
Title
of
Drawing
Drawing
No
Page
2.2. Leak check screen
By using this screen, necessary parameters to use the Automatic leak check function can be set.
Moreover, the result of leak check can be confirmed.
Switching off Run signal (G222 #6:RUN) after setting the parameters on this screen can start
Automatic leak check function.
2.2.1. Displayed data
Following data are displayed on Leak check screen.
ON/OFF of leak check.
Leak judgement time.
Status.
The time required of leak check. (remainder time)
Result of Leak check.
(1) ON/OFF of leak check
The state of PRM No.15153#0 is displayed.
The setting is also possible.
0 : Automatic leak check function is disabled.
1 : Automatic leak check function is enabled
(2) Leak judgement time
Leak check judgment time (PRM.No15154) is displayed.
The setting is also possible.
(3) Status
The state while the Automatic leak check function operates is displayed.
The following states are displayed.
Evacuating
First gas pressure check
Second gas pressure check
Third gas pressure check
Fourth gas pressure check
(4) The time required of leak check.
The estimation time to complete the leak check is set at completion of evacuating and closing all
the valves.
This is a value that is subtracted the elapsed time from leak judgement time.
This display time is estimation, and the end schedule time is not guaranteed.
(5) Result of Leak check
Gas pressures1-4 (DGN954-957) during the Leak check are displayed.
These data are displayed only and can not be reset.
The data are displayed by 2 pressure units, Torr and kilo-Pascal (kPa).
06 03.10.14
M.Sato This
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e is added.
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Contents Summary of FANUC Series 16/160-L Automatic Leak Check Function, Specifications Additional Manual

  • Page 1FANUC Series16/160-L Automatic leak check function Specifications Title FANUC Series 16i/160i –L of Automatic leak check function Drawing Specifications Drawing No A-78037E 07 05.02.21 M.Sato Page 8 is changed. 06 03.10.14 M.Sato Page 5,6 are added. Page 7,8 are changed. K.Suzuki Design Contents 1／9
  • Page 21. Outline The following actions work to check gas leak of laser resonator. i) All valves of laser oscillator are automatically shut. ii) Gas pressure in discharge tubes is measured and logged at regular intervals. iii) The data can be referred on diagnose screen or leak check screen. iv) This funct
  • Page 3iii) CNC measures Laser gas pressure at regular intervals after all valves closed and logs the data from DGN954 to DGN957 as diagnose information. The first data is logged when 30 seconds has passed after all valves closed. After that the pressure data are logged 3 times at 1/3 Leak judgement time (
  • Page 4Leak check mode Gas pressure Leak judgement time PRM.15154 TLJ=3Ts(sec) PRM15256 30(sec) Ts(sec) Ts(sec) Ts(sec) +75(sec) PRM15240 t RUN ON RUN OFF AVCL=1 AP=1 Pchk1 Pchk2 Pchk3 Pchk4 (DGN954) (DGN955) (DGN956) (DGN957) Fig. 2 Sampling of gas pressure Purge completion (AP=1) Leak check mode (LCKMD=1
  • Page 52.2. Leak check screen By using this screen, necessary parameters to use the Automatic leak check function can be set. Moreover, the result of leak check can be confirmed. Switching off Run signal (G222 #6:RUN) after setting the parameters on this screen can start Automatic leak check function. 2.2.
  • Page 62.2.2. How to display Leak check screen This screen is displayed according to the following order. (1) Set parameter MNT (PRM No.15160#0) to "1". (2) Push the MDI key "OFFSET" several times, and the laser screen is displayed. (3) Push the right edge soft key (continuance menu key), and the page is c
  • Page 73. Parameters #7 #6 #5 #4 #3 #2 #1 #0 15153 LCK Data type : Bit type LCK 0 : Automatic leak check function is disabled. 1 : Automatic leak check function is enabled 15154 Leak judgement time Data type : Word type Data unit : Second Data range : 3 - 65535 The time for keeping laser gas pressure with
  • Page 85. Diagnoses 954 Gas pressure in leak check mode 1st (Pchk1) 955 Gas pressure in leak check mode 2nd (Pchk2) 956 Gas pressure in leak check mode 3rd (Pchk3) 957 Gas pressure in leak check mode 4th (Pchk4) Laser gas pressure is logged in DGN954 at 30 seconds passed since all valves shut. And from DGN
  • Page 9Supplement ) Flow chart Sequence 11 ENTRY Leak check ENTRY Turbo-blower OFF Gas pressure control OFF DGN954 - DGN957 clear YES All valves OFF Alarm 4094 Vacuum pump abnormal？ AVCL=ON NO Vacuum pump stop Laser seq. num.(DGN908)=51 75sec WAIT 30sec WAIT NO LCKON=ON or LCK=1 ? Gas pressure logging 1st