B-70315EN/02 5.TROUBLESHOOTING
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No. Cause of trouble Solution
7 Loosened terminal of
connecting cable
Fix it tightly.
8 Vane damaged Replace the exhaust pump.
5.3.8 Main Breaker Trips
Possible causes are listed below. Take appropriate action.
No. Cause of trouble Solution
1 Damaged circuit breaker Check for loose terminals. If the circuit
breaker is burned black, replace it.
2 Beyond rated current Check whether the power magnetics
cabinet in the oscillator is abnormal. Turn
off the circuit breakers connected to the
power supply and inverter sequentially to
determine the unit that caused excessive
current.
3 Electric leakage When the circuit breaker has an electric
leakage breaker function, there is an
electric leakage in the oscillator. Locate the
leakage, such as the power supply, turbo
blower, or fan, and replace the faulty
component.
5.3.9 Excessive Laser Gas Consumption
Possible causes are listed below. Take appropriate action.
No. Cause of trouble Solution
1 Gas leakage between gas
cylinder and oscillator
Ascertain the following.
1) Anomalous mounting of regulator.
2) Anomalous connection between tube
and regulator.
3) Anomalous connection of gas inlet fitting
of oscillator.
2 Anomalous adjustment of
gas controller or exhaust
controller
Make adjustments according to the
adjustment method described in Chapter 7.