B-70315EN/02 7.UNITS
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7.9.3.4 Adjusting the exhaust unit (adjusting the laser gas
consumption)
(1) Detach the tube from the filter of the gas controller, and attach a
gas flowmeter with laser gas specifications.
(2) Set 30 in parameter No. 15260, and start the oscillator. Air
entered when the oscillator is open to the atmosphere in 1) above
is released. After 30 seconds, turn off the oscillator start switch
(RUN).
(3) Restart the laser oscillator, and place the oscillator in the
oscillation ready state (LSTR).
(4) Perform internal discharge with a low output level specified first.
Increase the output command level gradually to the rated output.
If the discharge voltage is high, perform purging, then, increase
the output command level again.
(5) While observing the flow rate on the gas flowmeter when
internal discharge is performed with the rated output, turn the
exhaust flow rate adjustment valve to adjust the flow rate to the
setting.
(6) Purge the oscillator.
(7) Detach the gas flow meter, and attach the tube again. Perform the
operation described in (2) to replace gas in the tube.
(8) Reset the modified parameter to its original value.
• Predetermined flow rate
Oscillator model Flow rate
C1000-E 10 liters/hour (0.166 liters/minute)
C5000-E, C6000-E 20 liters/hour (0.333 liters/minute)