
B–70114EN/04
4. FUNCTION
116
After power is turned on, laser comes into PURGE=1 state. This signal
is on when atmospheric pressure sensor monitors that the intra–tube
pressure equals atmospheric pressure. Usually when this signal is on,
purge completion lamp on operational board is lit.
[SEQ20] READY OF DISCHARGING state
When oscillator start switch is turned on, evacuation is carried on and
then gas pressure control begins. When gas pressure reaches the set
value, laser comes into discharge preparation completion (LRDY)
state and it becomes possible to turn on HV.
[SEQ30] READY OF BEAM ON OPERATION state
When HV (high voltage command) is turned on, high voltage is
applied to discharge tube. Then with the command from CNC, base
discharge is established. Further intra–tube pressure control is
performed. When this is completed normally, laser comes into
oscillation preparation complete state.
(2)Display of laser sequence
For the FS 16–L and 16i–L, a number indicating a sequence status is
displayed on diagnosis screen DGN. 908.
RUN ON Sequence
No. Status of laser sequence
10 Purge complete (Oscillator stop)
16 Rough evacuating from turbo blower (Exhaust pump ON)
17 Arrival wait of PRM.15240[235]
18 Arrival wait of turbo blower rated rotation (Turbo blower ON)
20 LRDY
HV ON (High voltage ON)
26 HVON (Discharge at low pressure)
27 Discharge pressure increase
28 Calibrating of laser power
30 LSTR
RUN OFF Sequence
No. Status of laser sequence
30 LSTR
23 Switch over to gas pressure of LRDY from gas pressure of LSTR
20 LRDY
14 75 sec wait
49 Exhaust after turning off the RUN KEY
12 Purge wait
10 Purge complete