
B–70114EN/04
5. MAINTENANCE
135
If the machine has not been unused for an extended period of time (three
days or longer) or if the laser gas circulatory system is exposed to the
atmosphere (after, for example, turbo blower oil replacement), aging is
required. Aging refers to heating the discharge tube and the circulating
gas by performing internal discharge, so that any adsorptive impurities
and any air or water in the oil turn to gas and are released. If the laser gas
circulatory system is exposed to the atmosphere, perform a leak check
before aging.
(1)Change the setting of the following parameter.
(Be sure to record the setting. The setting may differ from that in the
data sheet.)
To change the settings of parameters, enter MDI mode and
change Parameter enable from 0 to 1 on the Setting Screen.
This causes a warning message to appear. After changing the
settings of parameters, return Parameter enable from 1 to 0
and press the RESET KEY.
PRM No. 15240 (for the 16–L and the 16i–L) or 235 (0–L)
Setting → 0
(2)Turn on the RUN ON key to start up the oscillator.
(3)In about ten minutes, ALM. 4080 [680] Abnormal exhaust air is
issued. Within one minute after it is issued, turn off the MAIN
BREAKER of the oscillator and then back on.
(4)Turn off the oscillator startup key (RUN ON key). Then, turn off the
power to the NC (machine operator’s panel) and then back on.
(5)Open the diagnosis screen DGN. 905 [860] and record the numeric
value. If the value increase does not exceed 10 in 15 minutes, it is
acceptable. Otherwise, check again the portions that were loosened.
(6)Turn on the oscillator startup key (RUN ON KEY). In a few seconds,
turn it off. When the machine enters the Purge status, return the
parameter to the previous setting.
(7)A leak check is now completed.
The oscillator control software provides an automatic aging function. If
aging is required after consecutive holidays, this function eliminates the
need to perform the following operation (for the 16i–L only).
Enabling of the automatic aging function
PRM.15008.6 bit = 1
5.4
AGING
5.4.1
Leak Check Method
5.4.2
Aging Method