
B–70114EN/04
C. ERROR CODE LISTAPPENDIX
171
C
ERROR CODE LIST
Number
FS–16L,
16iL
FS–0L
Contents Alarm level
4061 661 Anomaly in AD converter 1 ALARM 1
4062 662 Anomaly in AD converter 2 ALARM 1
4063 663 Anomaly in laser power supply unit ALARM 2
4065 665 Anomaly in shutter action ALARM 2
4066 666 There exist discharge tube without discharge ALARM 2
4067 667 Overheat in laser oscillator ALARM 1
4068 668 Too much laser beam reflected to the inside of the oscillator Shutter : close
Beam : off in LSTR
4069 669 Anomaly in power unit voltage of IF PCB ALARM 1
4070 670 Anomaly in chiller unit ALARM 1
4071 671 Anomaly in assist gas unit Shutter : close
Beam : off in LSTR
4072 672 Shortage of cooling water ALARM 1
4073 673 Decrease of laser gas supply pressure ALARM 1
4074 674 Overheat in Roots blower ALARM 1
4075 675 Condensation ALARM 1
4076 676 Decrease of laser output ALARM 1
4077 677 Overheat in beam absorber ALARM 1
4078 678 Anomaly in discharge tube gas pressure control unit ALARM 1
4079 679 Emergency button pressed ALARM 1
4080 680 The vacuum pump is abnormal, or gas leaks from the gas
circulating system.
ALARM 1
4081 681 Anomaly in gas pressure control ALARM 1
4082 682 Anomaly in pressure sensor ALARM 1
4083 683 The shutter is not open when the beam output command is
issued.
Shutter : close
Beam : off in LSTR
— 684 An incorrect power supply was selected. ALARM 2
(1/2)