
B–70114EN/04
6. TROUBLESHOOTING
154
Assist gas not output
(Refer to bits 0 to 2 of DGN F222 [bits 0 to 2 of 173].)
This alarm is issued, if an attempt is made to radiate a laser beam, when
no assist gas is selected, or an assist gas condition is not set up.
Laser beam not generated (Refer to bit 6 of DGN F221 [bit 6 of 172].)
This alarm is issued, if an attempt is made to radiate a laser beam, when
the laser oscillator is not in the LSTR state (discharging state).
Vacuum pump operation abnormal (Refer to bit 3 of DGN.)
The thermal magnetic contactor for the exhaust pump has tripped.
No. Cause of trouble Solution
1 Anomaly of exhaust pump
Call the FANUC service center.
2 Anomaly of IF PCB
3 Signal cable broken
Gas pressure not reached (Refer to DGN 905 [860].)
This alarm is issued, if the discharge tube gas pressure does not reach
[specified discharge tube gas pressure during oscillation – tolerance] after
HV is set to ON.
No. Cause of trouble Solution
1 Invalid parameter setting Check whether bit 3 of parameter No.
15001 [bit 6 of 3981], and parameter
Nos. 15247 [4398], 15248 [4399] are set
as specified in the attached data sheet.
2 Gas leakage from internal
piping
Call the FANUC service center.
3 Pressure sensor abnormal
Turbo blower invertor abnormal
(Refer to bit 0 of DGN 962 [bit 1 of 841].)
This alarm is issued, if an invertor used to run the blower becomes
abnormal. When this alarm is issued, an LED on the invertor is turned
on.
If the invertor power is turned off, the message is reset.
No. Cause of trouble Solution
1 Turbo blower abnormal
Call the FANUC service center.
2 Invertor abnormal
3 Blower cable broken
Alarm No. 4089 [689]
Alarm No. 4090 [690]
Alarm No. 4094 [–––]
Alarm No. 4099 [695]
Alarm No.
4100, 4110 [––]