
APPENDIX
B–70114EN/04
C. ERROR CODE LIST
172
Number
FS–16L,
16iL
Alarm levelContents
FS–0L
4085 685 Decrease of laser output A warning has occurred. It can
be reset.
4087 687 Overheat in shutter mirror ALARM 2
4088 688 The discharge tube voltage is low. ALARM 1
4089 689 Selection signal of assist gas not commanded
(in beam on state)
Shutter : close
Beam : off in LSTR
4090 690 The oscillator is not in the LSTR state when the beam output
command is issued.
4094 — Anomaly in exhaust pump ALARM 1
4095 695 The specified gas pressure has not been reached. ALARM 1
4100 691 Anomaly of inverter ALARM 1
4101 691 An inverter frequency reached signal is abnormal. ALARM 1
4102 691 The turbo blower vibrates abnormally. ALARM 1
4103 691 The turbo blower is not at stop. ALARM 1
4104 691 Turbo blower overcurrent ALARM 1
4105 691 Turbo blower temperature abnormal ALARM 1
4106 620 There is no sufficient oil in the turbo blower. ALARM 1
4107 621 External folding mirror not mounted ALARM 2
4132 622 Parameter is changed ALARM 2
D Alarm processing levels
ALARM1: Discharge is stopped, purge is carried out, and a purge
complete state is entered.
ALARM2: Discharge is stopped, and a discharge start ready state
(LRDY) state is entered.
(2/2)