
B–70114EN/04
5. MAINTENANCE
136
(1)Change the settings of the following parameters.
(Be sure to record the settings. The settings may differ from those in
the data sheet.)
To change the settings of parameters, enter MDI mode and
change Parameter enable from 0 to 1 on the Setting Screen.
This causes a warning message to appear. After changing the
settings of parameters, return Parameter enable from 1 to 0
and press the RESET KEY.
PRM No.15000.3 bit (16–L, 16i–L), 200.3 bit (0–L)
0 → 1 Enable internal discharge during manual operation.
PRM No.15000.4 bit (16–L, 16i–L), 200.4 bit (0–L)
1 → 0 Do not perform 3–minute compensation.
PRM No.15002.0 bit (16–L, 16i–L), 3979.5 bit (0–L)
0 → 1 Enable internal discharge during automatic operation
PRM No.15003.2 bit (16–L, 16i–L), 3979.2 bit (0–L)
1 → 0 Do not vacuum after RUN OFF.
PRM No.15201 (16–L, 16i–L), 232 (0–L)
Setting → 0
PRM No.15208 (16–L, 16i–L), 233 (0–L)
Setting → 0 Turn off output feedback.
PRM No.15209 (16–L), 234 (0–L)
Setting → 0 Turn off output feedback.
PRM No.15242, 15243 (16–L), 236 (0–L)
Setting → 0 Setting–100
(2)Turn on the RUN ON key to start up the oscillator.
(3)Turn on the HV ON switch to start discharge. Check that discharge
is not turned off.
(4)Perform internal discharge with the following settings. Internal
discharge can be performed either automatically using the appropriate
program or manually using the appropriate operation switch.
1000W Duty 50% (C1500B, 15 minutes)
1500W Duty 50% (C2000B, C2000C, 15 minutes)
2000W Duty 50% (C3000B, C3000C, C3000D, 15 minutes)
2500W Duty 50% (C4000A, 15 minutes)
4000W Duty 30% (C6000A, 1 hour)
4000W Duty 30% (C6000B, 15 minutes)
The frequency is 100 Hz throughout internal discharge.
D Automatic method
1) Create the following program (for the 1500B).
C32 P1 Q1;
G24 S1000 Q50 R900.;
G32 P0;
Set the output (W) for S, Duty (%) for Q, and time (seconds) for
R.
2) Set the shutter lock and start the program.