
3.INTERNAL STRUCTURE B-70254EN/01
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(3) Rear mirror
A reflecting mirror consisting of a Ge (germanium) substrate,
coated with dielectric.
Having a high reflectance of 99.5%, the rear mirror is used to
reflect the laser beam within the resonator while transmitting
0.5% of the laser light so that the beam can be monitored
externally.
(4) Folding mirror
A mirror unit which reflects the laser beam at a 90-degree angle.
The folding mirror consists of a block with a surface tilting to a
45-degree angle and an Si (silicon) substrate, coated with
multilayer dielectric film.
(5) Discharge tube
A pair of Ag (silver) electrodes are metallized on the surface of a
hollow quartz glass pipe. A high-frequency discharge between
these electrodes injects electrical energy into the laser gas.
Each electrode is coated with ceramic, preventing it from
degrading and thus improving system reliability.
(6) Trigger electrode
A predischarge placed outside the laser oscillation area can
facilitate the start of the main discharge. With it, the laser output
is completely zero when the beam is off.
(7) Power sensor
An optical sensor which detects the intensity of the laser beam,
transmitted through the rear mirror, thus enabling monitoring of
the laser output level.
(8) Gas circulating system
A gas circulating path including a turbo blower, heat exchangers,
and circulating pipes, which circulates laser gas in the discharge
tubes at high speed.
(9) Turbo blower
During laser oscillation, the laser gas pressure is 1330 – 9310 Pa.
The turbo blower circulates this rough-vacuum gas at high speed
without contaminating the gas.
(10) Heat exchanger (inlet)
Water-cooled heat exchanger used to cool the laser gas that has
been heated by discharge, before it is drawn into the turbo
blower.
(11) Heat exchanger (outlet)
Water-cooled heat exchanger used to cool the laser gas that has
been heated by compression in the turbo blower, before being
forced into the discharge tubes.