
B-70254EN/01 C.PARAMTER LIST
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C.10 PARAMETERS FOR DISCHARGE
15220 Maximum bias command at discharge start
Data type: Word
Unit of data: mV
Range of data: 0 to 32767
Set the maximum bias setting at the start of discharge.
15221 Voltage for conforming discharge
Data type: Word
Unit of data: V
Range of data: 0 to 32767
Set the discharge starting voltage.
15222 Discharge waiting time
Data type: Word
Unit of data: 10msec
Range of data: 0 to 32767
Specifies the waiting time until the discharge is checked after the
maximum bias setting is specified at the start of discharge.
15223 Bias command
Data type: Word
Unit of data: mV
Range of data: 0 to 32767
Specify the bias setting.
15224 Modulation voltage
Data type: Word
Unit of data: mV
Range of data: 0 to 3000
Set the voltage to which the normal bias value is lowered during
modulation by the base modulation function.
15225 Modulation time
Data type: Word
Unit of data: 10msec
Range of data: 0 to 32767
Set the time during which the bias setting is lowered.