
C.PARAMTER LIST B-70254EN/01
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C.11 PARAMETERS FOR GAS CONTROL (1)
15240 Negative pressure in exhaust completion
Data type: Word
Unit of data: (1=13Pa)
Range This pressure is used for evacuating the discharge tubes in
laser start-up sequence.
15241 Intra-tube pressure in discharge start
Data type: Word
Unit of data: (1=13Pa)
Range of data: 0 to 32767
Internal gas pressure of the discharge tubes at the start of discharge
15242 Tube pressure for oscillation (50Hz)
Data type: Word
Unit of data: (1=13Pa)
Range of data: 0 to 32767
Internal gas pressure of the discharge tubes during laser oscillation.
(at 50 Hz)
15243 Tube pressure for oscillation (60Hz)
Data type: Word
Unit of data: (1=13Pa)
Range of data: 0 to 32767
Internal gas pressure of the discharge tubes during laser oscillation.
(at 60 Hz)
15244 Gas pressure control gain
Data type: Word
Unit of data:
Range of data: 0 to 32767
This is the gain to feedback control the intra-tube laser gas pressure.
15245 Intratube pressure control gain 2
Data type: Word
Unit of data:
Range of data: 0 to 32767
Set the gas pressure control gain during base discharge.
When bit 1 of parameter No.15000 is 1, this parameter is valid.