
B-70254EN/01 C.PARAMTER LIST
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C.8 PARAMETERS FOR LASER MAINTENANCE TIMING
INDICATION FUNCTIONS
15150 Laser RUN ON time
Data type: Two-word
Unit of data: 0.1hour
Range of data: 0 to 99999999
A cumulative RUN ON time is automatically set.
15151 Vacuum pump operation time
Data type: Two-word
Unit of data: 0.1hour
Range of data: 0 to 99999999
A cumulative vacuum pump operation time is automatically set.
15152 Shutter alarm mask time
Data type: Word
Unit of data: msec
Range of data: 0 to 32767
Set a time from when shutter operation is directed until shutter alarm
monitoring starts.
#7 #6 #5 #4 #3 #2 #1 #0
15153 LCK
Data type: Bit
LCK
0: Disables the leakage check function.
1: Enables the leakage check function.
15154 Leakage judgment time
Data type: Word
Unit of data: sec
Range of data: 3 to 65535
Set the time during which the valve is closed and the internal pressure
of a discharge tube is kept for leakage check. The internal pressure of
a discharge tube is measured four times within the specified time. If a
value of 0 to 2 is set, the leakage check function does not operate.