
C.PARAMTER LIST B-70254EN/01
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C.13 PARAMETERS FOR LASER POWER/VOLTAGE DROP
15270 Discharge tube voltage in normal operation
Data type: Word
Unit of data: V
Range of data: 0 to 32767
Set the discharge tube voltage during normal base discharge.
This parameter is automatically rewritten after the discharge start
signal (G222#7 HVON) is turned on.
15271 Power decrease limit
Data type: Word
Unit of data: W
Range of data: 0 to 32767
If the difference between the specified output and actual output is
greater than this setting, low output alarm 4076 is issued.
15272 Discharge tube voltage decrease limit
Data type: Word
Unit of data: V
Range of data: 0 to 32767
If the difference between the discharge tube voltage during use of the
laser and that at the start-up of the laser is greater than this setting,
low voltage alarm 4088 is issued.
15276 Laser gas replacement time
Data type: Word
Unit of data: sec
Range of data: 0 to 32767
Time during which a new laser gas is filled in the internal piping
system after RUN is turned on