
B–70115EN/03
9. SETTING AND ADJUSTMENT
271
If the laser oscillator is not used for a long time (one week or more) or if
the laser gas circulation system is opened to the atmosphere (when a
mirror is cleaned or when a component of the gas system is replaced, for
example), aging must be performed before the start of operation.
Specifically, the discharge tube and circulating gas should be warmed by
internal discharge, and adsorbent impurities should be expelled by
evaporating them. When the laser gas circulating system has been opened
to the atmosphere, perform a leak check before starting aging. The aging
procedure is described below:
(1)Change the following parameter settings:
(Be sure to record the settings. The settings may be different from the
data sheet values.)
Parameter 15000, bit 3 (16–L, 16i–L) or parameter 200, bit 3 (0–L):
0 ³ 1 (Enable internal discharge in manual mode)
Parameter 15000, bit 4 (16–L, 16i–L) or parameter 200, bit 4 (0–L):
1 ³ 0 (Disable three–minute compensation)
Parameter 15002, bit 0 (16–L, 16i–L) or parameter 3979, bit 5 (0–L):
0 ³ 1
(Enable internal discharge during automatic operation)
Parameter 15003, bit 2 (16–L, 16i–L) or parameter 3979, bit 2 (0–L):
1 ³ 0 (A vacuum is not created after run off)
Parameter 15201 (16–L, 16i–L) or parameter 232 (0–L):
Predetermined value ³ 0
Parameter 15208 (16–L, 16i–L) or parameter 233 (0–L):
Predetermined value ³ 0 (Stop output feedback)
Parameter 15209 (16–L, 16i–L) or parameter 234 (0–L):
Predetermined value ³ 0 (Stop output feedback)
Parameters 15242 and 15243 (16–L, 16i–L) or parameter 236 (0–L):
Predetermined value ³ (Predetermined value) – 100
(2)Turn on the RUN ON key to start the oscillator.
(3)Turn on the HV ON switch to start discharge.
(4)Ensure the discharge has not stopped, then execute internal discharge
under the following conditions. The internal discharge can be started
by a program (automatic operation) or by pressing a switch (manual
operation).
1000 W Duty 30% (C1500B: 15 minutes)
1500 W Duty 50% (C2000B, C2000C: 15 minutes)
2000 W Duty 50% (C3000C, C3000D: 15 minutes)
2500 W Duty 50% (C4000A)
4000 W Duty 30% (C6000B: 15 to 30 minutes)
The frequency is 100 Hz for all of the above.
D Automatic operation
1) Create this program (when C1500B):
G32 P1 Q1 ;
G24 S1000 Q100 R900. ; S specifies an output (W), Q
G32 P0 ; specifies a duty cycle (%),
and R specifies a time
(seconds).
2) Lock the shutter. Then, run the program.
9.8
DISCHARGE AGING