
A-78075E
Edit
Apprv.
Desig.
Sheet
Title
Draw
No.
Date
Design
Descri
tion
Date
FANUC Series 16i/160i –L
Laser maintenance screen function
Specifications
2000.03.06
15/21
Sheet Sheet
M.Sato K.Suzuki
05 2001.08.23 M.Sato Change all page. K.Suzuki
06 2001.10.11 M.Sato Change page 10. K.Suzuki
07 2003.12.04 M.Sato Change all pages. K.Suzuki
08 2003.12.19 M.Sato Change page 4,17. K.Suzuki
09 2004.06.04 M.Sato Change page 14. K.Suzuki
10 2004.06.09 M.Sato Change page 13. K.Suzuki
11 2005.02.23 M.Sato Change all pages.
Page Data name Message Type No. Notice
1 Command power for running beam internally
Pulse Frequency for running beam internally
Pulse duty for running beam internally
Power calibration coefficient
Actual laser power
Laser gas pressure
Laser sequence status
RF voltage
RF current
DC voltage
DC current
DC wattage
PC:
FR:
DU:
COE:
PA:
TP:
SEQ.
RFV (PSU1-PSU8)
RFI (PSU1-PSU8)
DCV (PSU1-PSU8)
DCI (PSU1-PSU8)
DCW (PSU1-PSU8)
WRK
WRK
WRK
PRM
DGN
DGN
DGN
DGN
DGN
DGN
DGN
DGN
15204
906
905
908
909-
910-
925-
926-
941-
(1)
2 Assist gas enable
Beam on enable with shutter closed
Power calibration enable
Evacuation enable at RUN-OFF
DCV,DCI,DCW display enable
Power calibration command at all tubes use
Power calibration coefficient
Upper limit of power command
Laser power feedback gain
Maximum power command
AGA
BMO
CLB
GVW
(DCW)
POWER CALIB. 4
PWR-CALIB. COE
PWR-COMAND LIMIT
FEEDBACK GAIN
MAXIMUM POWER
PRM
PRM
PRM
PRM
PRM
PRM
PRM
PRM
PRM
PRM
15000#2
15000#3
15000#4
15003#2
15008#5
15201
15204
15207
15208
15210
3 Minimum power command
Upper limit of power command for duty
unclamped
Power input calibration coefficient
Wait time for starting discharge
Bias command
Laser gas pressure at oscillating(50Hz)
Laser gas pressure at oscillating(60Hz)
Permission range for power down
Power table data for all tubes use 6
Power table data for all tubes use 7
MINIMUM POWER
UNCLMP PC CMD-LMT
PWR-INPUT CALIB.
WAIT DISCHARGE
BIAS COMMAND
INT. PRES. OSCIL
INT. PRES. OSCIL
POWER DEC. LIMIT
(POWER TBL ALL 6)
(POWER TBL ALL 7)
PRM
PRM
PRM
PRM
PRM
PRM
PRM
PRM
PRM
PRM
15211
15212
15215
15222
15223
15242
15243
15271
15306
15307
(1) It is not possible to set by this screen.
Type) WRK:Special parameter(Writable), PRM:parameter(Writable), DGN:Diagnose(Only display)
Remark ) Please set 1 to parameter No.15160#1(MDS) in case of writing special parameter and parameter.