
B–63200EN/03
4. DESCRIPTION OF PARAMETERS
35
15250 Gas pressure rise time 2
[Data type] Word
[Unit of data] Second
[Valid data range] 0 to 45
Set the time required to change from the negative pressure for completing
evacuation (parameter No. 15240) to the in–tube pressure at the start of
discharge (parameter No. 15241) in sequence 18.
15255 Evacuation time at RUN start
[Data type] Word
[Unit of data] Second
[Valid data range] 0 to 32767
Specify an evacuation time at RUN start.
15256 RUN–OFF evacuation time
[Data type] Word
[Unit of data] Second
[Valid data range] 600 to 32767
When bit 2 (GVW) of parameter No. 15003 is set to 1 and when the
oscillator start signal (bit 6 (RUN) of G222) goes to 0, evacuation of the
specified time is executed.
15257 Abnormal vibration detection count
[Data type] Word
[Unit of data]
[Valid data range] 0 to 32767
When the abnormal vibration count, detected over ten minutes, is not
smaller than this setting, an alarm is raised.
15258 Time constant of filter for reducing the laser gas pressure variation
[Data type] Word
[Unit of data] Millisecond
[Valid data range] 17 to 32767 (When the setting is 16 or lower, the filter is disabled.)