
5. DESCRIPTION OF PARAMETERS
(YP SERIES)
B–63200EN/03
80
15100 Assist gas selection
[Data type] Word
[Unit of data]
[Valid data range] 0 to 7
Specify an assist gas type.
15101 Flow pattern selection
[Data type] Word
[Unit of data]
[Valid data range] 1 to 3
Specify an assist gas flow pattern.
15102 Pre–flow time 1
15103 Pre–flow time 2
15104 Pre–flow time 3
[Data type] Word
[Unit of data] 10 msec
[Valid data range] 0 to 32767
Specify the pre–flow time of the assist gas.
15108 After–flow time 1
15109 After–flow time 2
15110 After–flow time 3
[Data type] Word
[Unit of data] 10 msec
[Valid data range] 0 to 32767
Specify the after–flow time of the assist gas.
15114 Pre–flow pressure 1
15115 Pre–flow pressure 2
15116 Pre–flow pressure 3
[Data type] Word
[Unit of data] 0.1 kg/cm
2
or 0.01 MPa
[Valid data range] 0 to 255
Specify the pre–flow pressure of the assist gas.
5.2
SETTINGS RELATED
TO ASSIST GAS
PRESSURE
AND TIME