
5. DESCRIPTION OF PARAMETERS
(YP SERIES)
B–63200EN/03
78
#7
15000
#6 #5 #4
CLBON
#3
BMON
#2
AGOUT
#1 #0
[Data type] Bit
AGOUT The assist gas is:
0 : Disabled. (Maintenance)
1 : Enabled. (Normal operation)
BMON When the shutter is closed, the function to turn the beam on is:
0 : Disabled. (Normal operation)
1 : Enabled. (Manual operation only, maintenance)
CLBON Power calibration is:
0 : Disabled.
1 : Enabled. (Normal operation)
#7
15001
#6
LHCHG
#5 #4 #3 #2 #1
G0B
#0
EXAG
[Data type] Bit
EXAG An assist gas can be selected from:
0 : Three types.
1 : Seven types.
G0B Beam output by G00 is:
0 : Disabled.
1 : Enabled.
LHCHG The oscillator is:
0 : Not controlled by an external signal.
1 : Controlled by an external signal
#7
15002
#6 #5 #4 #3 #2 #1 #0
BMA
[Data type] Bit
BMA When the shutter is closed in automatic operation, beam output is:
0 : Disabled. (Normal operation)
1 : Enabled. (Maintenance)
#7
15003
#6 #5 #4 #3 #2 #1 #0
TIV
[Data type] Bit
TIV The sign (+/–) of the tracing displacement amount is:
0 : Not inverted.
1 : Inverted.
5.1
SETTINGS FOR
ENABLING/
DISABLING
FUNCTIONS