
B–63200EN/03
4. DESCRIPTION OF PARAMETERS
69
#7
815700
#6
7
#5
6
#4
5
#3
4
#2
z
#1
y
#0
x
[Data type] Bit
X to 8 When a move command for the axis of mirror movement is calculated, the
corresponding axis is:
0 : Not used.
1 : Used.
NOTE
Specify 0 for the bit corresponding to an axis that is not
present.
#7
815701
#6
7
#5
6
#4
5
#3
4
#2
z
#1
y
#0
x
[Data type] Bit
X to 8 When a move command for the axis of mirror movement is calculated, the
polarity of the move command of each axis to be used for the calculation is:
0 : Negative.
1 : Positive.
NOTE
Specify 0 for the bit corresponding to an axis that is not
present.
#7
MRO15702
#6 #5 #4 #3 #2
MCO
#1
FMS
#0
TXC
[Data type] Bit
TXC During tracing control, the amount of travel along the tracing axis is:
0 : Included in the calculation of the mirror axis move command.
1 : Not included in the calculation of the mirror axis move command.
FMS Constant optical path control is:
0 : Enabled.
1 : Disabled.
MCO The sign of the compensation amount for the reference position of the axis
of mirror movement is:
0 : Plus.
1 : Minus.
MRO The constant optical path control stop request signal is set to 1 when:
0 : An overtravel occurs on the mirror block axis.
1 : An overtravel occurs on the mirror block axis and the axis specified in
parameter No. 15700.
4.29
CONSTANT OPTICAL
PATH CONTROL