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Laser C1000/C2000/C4000/C5000/C6000-Model E Maintenance manual Page 165

Maintenance manual
B-70265EN/02 7.UNITS
- 145 -
Name Description
Operation key Key for stopping the motor.
This key, however, is enabled only when the
operation command destination is set to the
operator. (Check that the operation command
indication lamp is on.)
STOP/RESET key Used to stop the motor or reset an alarm.
FUNC (function) key Used to enter the monitor mode, basic setting
mode, extended function mode, and function
mode.
STR (store) key Used to store set values. (Be sure to press this
key when changing set values.)
Up/down key Used to change the extended function mode,
function mode, or set values.
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Contents Summary of Laser C1000/C2000/C4000/C5000/C6000-Model E Maintenance manual

  • Page 1MAINTENANCE MANUAL B-70265EN/02
  • Page 2Ȧ No part of this manual may be reproduced in any form. Ȧ All specifications and designs are subject to change without notice. In this manual we have tried as much as possible to describe all the various matters. However, we cannot describe all the matters which must not be done, or which cannot be
  • Page 3B-70265EN/02 SAFETY PRECAUTIONS SAFETY PRECAUTIONS This manual contains precautions which must be observed during operation and maintenance of the laser oscillator to ensure the safety of the operator and maintenance personnel and prevent damage to the oscillator. Maintenance involves a variety of r
  • Page 4SAFETY PRECAUTIONS B-70265EN/02 1.1 DEFINITION OF WARNING, CAUTION, AND NOTE To ensure the safety of maintenance personnel (referred to as users) and prevent damage to the machine, this manual indicates each precaution on safety with "Warning" or "Caution" according to its severity. Supplementary in
  • Page 5B-70265EN/02 SAFETY PRECAUTIONS 1.2 WARNINGS AND CAUTIONS ON EXPOSURE WARNING 1 It is extremely dangerous to expose your eyes to direct, scattered, or reflected CO2 laser light. Always wear protective glasses while the laser is operating. Exposure to laser light can cause blindness. If your eyes are
  • Page 6SAFETY PRECAUTIONS B-70265EN/02 WARNING 6 If there is a possibility of being exposed to CO2 laser radiation exceeding the maximum permissible exposure (MPE) level for skin, wear protective clothing. Otherwise, there is a danger of being burnt. 7 The oscillator is fitted with a red semiconductor lase
  • Page 7B-70265EN/02 SAFETY PRECAUTIONS 1.3 WARNINGS AND CAUTIONS ON MAINTENANCE WARNING 1 A high voltage of 3 to 4 kV0-p is applied to some places in the laser oscillator cabinet. Therefore, do not turn the power to the oscillator on or operate the oscillator when an oscillator panel is open. Operating the
  • Page 8SAFETY PRECAUTIONS B-70265EN/02 1.4 WARNINGS AND CAUTIONS ON HANDLING WARNING 1 The oscillator output mirror and focusing lens on the machining head both have a substrate made of ZnSe (zinc selenide), a toxic substance. Therefore, do not touch the mirror or lens with your bare hands if it is damaged
  • Page 9B-70265EN/02 SAFETY PRECAUTIONS CAUTION 1 The oscillator is controlled according to the CNC internal parameter settings. If a numeric value different from a setting is entered and the oscillator is operated, the oscillator may malfunction. In the worst case, the oscillator may be damaged. 2 Use lase
  • Page 10SAFETY PRECAUTIONS B-70265EN/02 1.5 WARNINGS AND CAUTIONS ON MACHINING WARNING 1 Do not look at the machining point without eye protection. Otherwise, your eyes may be exposed to reflected laser light, resulting in blindness. If your eyes are accidentally exposed to laser light, seek medical advice
  • Page 11B-70265EN/02 PREFACE PREFACE Contents of the manual This manual consists of the following chapters and appendixes: Chapter 1 : Handling the Laser Beam Chapter 1 covers the warning labels affixed to the optical paths in the oscillator and the oscillator itself. Chapter 2 : Internal Structure Chapter
  • Page 12PREFACE B-70265EN/02 Applicable models This manual covers the following models. The following abbreviations may be used in the text of this manual. Model Abbreviation FANUC LASER C1000-MODEL E C1000-E FANUC LASER C2000-MODEL E C2000-E FANUC LASER C4000-MODEL E C4000-E FANUC LASER C5000-MODEL E C5000
  • Page 13B-70265EN/02 TABLE OF CONTENTS TABLE OF CONTENTS SAFETY PRECAUTIONS...........................................................................s-1 PREFACE ..................................................................................................p-1 1 HANDLING THE LASER BEAM ..................
  • Page 14TABLE OF CONTENTS B-70265EN/02 3.3.4 Check for Leakage within the Oscillator ...............................................................47 3.3.5 Locating Internal Leakage......................................................................................47 3.3.6 Discharge Aging................
  • Page 15B-70265EN/02 TABLE OF CONTENTS 5.3.10 Inverter Alarm Display...........................................................................................99 6 OSCILLATOR CONNECTIONS ......................................................... 102 6.1 ELECTRICAL CONNECTIONS ................................
  • Page 16TABLE OF CONTENTS B-70265EN/02 7.8.1 Replacement Method............................................................................................156 7.9 GAS CONTROL UNIT (C1000-E, C5000-E, C6000-E) ............................. 157 7.9.1 Configuration ..............................................
  • Page 17B-70265EN/02 TABLE OF CONTENTS 7.17 POWER SENSOR UNIT ........................................................................... 184 7.17.1 Replacement Method............................................................................................184 7.17.2 Adjustment Method.....................
  • Page 18TABLE OF CONTENTS B-70265EN/02 8.6 ALIGNMENT OF THE BEAM FOLDING UNIT (C2000-E, C4000-E SHORT OPTICAL PATH LENGTH TYPE)................ 219 8.7 ALIGNMENT OF THE GUIDE LASER ...................................................... 221 9 LASER SOFTWARE FUNCTION...........................................
  • Page 19B-70265EN/02 TABLE OF CONTENTS D.1 INFORMATION DISPLAYED ON THE DIAGNOSIS SCREEN ................. 249 D.2 LASER OSCILLATOR STATUS DISPLAY................................................ 251 E PARAMTER LIST .............................................................................. 259 E.1 PARAME
  • Page 20TABLE OF CONTENTS B-70265EN/02 G.3 FITTINGS AND TUBE ORDERING INFORMATION................................. 316 H EXTERNAL GAS LEAKAGE RECORDING TABLE .......................... 318 I GLOSSARY ....................................................................................... 321 c-8
  • Page 21B-70265EN/02 1.HANDLING THE LASER BEAM 1 HANDLING THE LASER BEAM -1-
  • Page 221.HANDLING THE LASER BEAM B-70265EN/02 1.1 WARNING LABELS The oscillator uses high voltages and laser beam radiation. Such hazards are indicated with warning labels attached to the positions shown in Fig. 1.1(a) to (j). This section describes the warning labels and their positions. Fig.1.1(a) Warnin
  • Page 23B-70265EN/02 1.HANDLING THE LASER BEAM Fig.1.1(c) Warning label positions (C2000-E : front view) Fig.1.1(d) Warning label positions (C2000-E : rear view) -3-
  • Page 241.HANDLING THE LASER BEAM B-70265EN/02 Fig.1.1(e) Warning label positions (C4000-E : front view) Fig.1.1(f) Warning label positions (C4000-E : rear view) -4-
  • Page 25B-70265EN/02 1.HANDLING THE LASER BEAM Fig.1.1(g) Warning label positions (C5000-E : front view) Fig.1.1(h) Warning label positions (C5000-E : rear view) -5-
  • Page 261.HANDLING THE LASER BEAM B-70265EN/02 Fig.1.1(i) Warning label positions (C6000-E : front view) Fig.1.1(j) Warning label positions (C6000-E : rear view) -6-
  • Page 27B-70265EN/02 1.HANDLING THE LASER BEAM <1> Class indication label (JPN) Model Maximum output Medium C1000-E 2000W CO2/N2/He = 5/55/40% C2000-E 5000W CO2/N2/He = 5/55/40% C4000-E 8000W CO2/N2/He = 5/55/40% C5000-E 10000W CO2/N2/He = 5/35/60% C6000-E 12000W CO2/N2/He = 5/55/40% <1> Class indication la
  • Page 281.HANDLING THE LASER BEAM B-70265EN/02 <2> Warning label <3> Aperture label <4> Suspension method label <5> Access panel <6> Label inside the access panel -8-
  • Page 29B-70265EN/02 1.HANDLING THE LASER BEAM <7> Discharge section label <8> Certification label <9> Equipment nameplate <10> Manufacturer's address label <11> Label for regulating the atmospheric gases in the oscillator housing -9-
  • Page 301.HANDLING THE LASER BEAM B-70265EN/02 <12> Cooling water and gas maintenance label - 10 -
  • Page 31B-70265EN/02 1.HANDLING THE LASER BEAM 1.2 OPTICAL PATHS IN THE OSCILLATOR The figures below show the laser optical paths inside the oscillator. Fig.1.2(a) Optical paths in the C1000-E - 11 -
  • Page 321.HANDLING THE LASER BEAM B-70265EN/02 Fig.1.2(b) Optical paths in the C2000-E Fig.1.2(c) Optical paths in the C4000-E - 12 -
  • Page 33B-70265EN/02 1.HANDLING THE LASER BEAM Fig.1.2(d) Optical paths in the C5000-E Fig.1.2(e) Optical paths in the C6000-E - 13 -
  • Page 342.INTERNAL STRUCTURE B-70265EN/02 2 INTERNAL STRUCTURE - 14 -
  • Page 35B-70265EN/02 2.INTERNAL STRUCTURE 2.1 OUTLINE Fig. 2.1 shows an outline of the structure of the oscillator. Fig.2.1 Outline of structure (1) Laser resonator The resonator consists of an output coupler, a rear mirror, folding mirrors, discharge tubes, a power sensor unit, etc. Several discharge tubes
  • Page 362.INTERNAL STRUCTURE B-70265EN/02 (3) Laser gas circulating system A gas circulating system is configured by connecting the resonator and the fan (turbo blower) with a circulating pipe. Laser gas runs through the discharge tubes at a speed of 200 m/s or higher. In this circulating system, a water-co
  • Page 37B-70265EN/02 2.INTERNAL STRUCTURE 2.2 INTERNAL STRUCTURE This section describes the internal structure of the oscillator more specifically. Fig.2.2(a) to (j) are internal structural drawing. Fig.2.2(a) Internal structural drawing (C1000-E : front view) Fig.2.2(b) Internal structural drawing (C1000-E
  • Page 382.INTERNAL STRUCTURE B-70265EN/02 Fig.2.2(c) Internal structural drawing (C2000-E : front view) Fig.2.2(d) Internal structural drawing (C2000-E : rear view) - 18 -
  • Page 39B-70265EN/02 2.INTERNAL STRUCTURE Fig.2.2(e) Internal structural drawing (C4000-E : front view) Fig.2.2(f) Internal structural drawing (C4000-E : rear view) - 19 -
  • Page 402.INTERNAL STRUCTURE B-70265EN/02 Fig.2.2(g) Internal structural drawing (C5000-E : front view) Fig.2.2(h) Internal structural drawing (C5000-E : rear view) - 20 -
  • Page 41B-70265EN/02 2.INTERNAL STRUCTURE Fig.2.2(i) Internal structural drawing (C6000-E : front view) Fig.2.2(j) Internal structural drawing (C6000-E : rear view) (1) Output coupler A transmitting/reflecting mirror which outputs the laser beam after it has been amplified inside the resonator. The output c
  • Page 422.INTERNAL STRUCTURE B-70265EN/02 (3) Folding mirror A mirror with an Si (silicon) substrate coated with dielectric to reflect the laser beam. It linearly polarizes the laser beam. A system equipped with an optional antireflective mirror (ATFR) is available. The antireflective mirror consists of a c
  • Page 43B-70265EN/02 2.INTERNAL STRUCTURE (12) Turbo PCB This PCB relays overheating and frequency reached signals of the turbo blower. In addition, it monitors the oil level of the turbo blower. (13) Gas dust collection unit This unit is a cyclone dust collector that removes dust that gets in the gas circu
  • Page 442.INTERNAL STRUCTURE B-70265EN/02 (21) Shutter The shutter is normally closed to keep the laser beam inside, and can be opened and closed with CNC commands. It is equipped with a position sensor and a temperature sensor and constantly monitors the open/close status and the shutter mirror temperature
  • Page 45B-70265EN/02 2.INTERNAL STRUCTURE (30) Guide laser (red semiconductor laser) A diode laser is overlaid on the same optical axis as a guide beam for checking the optical axis because the CO2 laser beam is invisible to the unaided eye. The guide beam is emitted in synchronization with the mechanical s
  • Page 463.INSTALLATION B-70265EN/02 3 INSTALLATION - 26 -
  • Page 47B-70265EN/02 3.INSTALLATION 3.1 INSTALLATION PROCEDURE Use the following procedure to make adjustments and checks during installation. As soon as the oscillator is delivered, loosen the clamps of the resonator described in (2) below. CAUTION If the clamps of the resonator are left fastened for a lon
  • Page 483.INSTALLATION B-70265EN/02 Fig.3.1(b) Clamp locations (C2000-E) Fig.3.1(c) Clamp locations (C4000-E) - 28 -
  • Page 49B-70265EN/02 3.INSTALLATION Fig.3.1(d) Clamp locations (C5000-E) Fig.3.1(e) Clamp locations (C6000-E) - 29 -
  • Page 503.INSTALLATION B-70265EN/02 (3) Check the outsides of units installed in the oscillator as follows: Check items 1 Check whether any printed circuit boards are loose or removed. Check whether any cables are damaged (such as damaged 2 sheathing). 3 Check whether any connectors are loose or detached. 4
  • Page 51B-70265EN/02 3.INSTALLATION (8) Check the supply gas pressure. Check that the secondary pressure of the gas regulator is 0.175±0.025 MPa. (9) Turn on the power, then check the operation of the fan motors in the housing. The fan motors installed in the oscillator start turning as soon as the power to
  • Page 523.INSTALLATION B-70265EN/02 (12) Conduct an oscillator vacuum leakage test. Check the oscillator for any internal leakage. When performing the leakage check, use the automatic leakage check function described in Subsection 3.3.4. If there is internal leakage, locate the leakage according to the leak
  • Page 53B-70265EN/02 3.INSTALLATION 3.2 OSCILLATOR CONNECTIONS The oscillator has connections for laser gas piping, cooling water piping, and power and signal cables. For details of the electrical connections for the CNC and machine, refer to the corresponding connection manual. 3.2.1 Laser Gas 3.2.1.1 Lase
  • Page 543.INSTALLATION B-70265EN/02 3.2.1.3 Leakage in external piping After installing the piping, see Subsection 3.3.2, and be sure to conduct a clamp test to check for gas leakage. If the rate of change in primary pressure over eight hours exceeds 5%, or if the rate of change in secondary pressure over e
  • Page 55B-70265EN/02 3.INSTALLATION 3.2.2 Cooling Water 3.2.2.1 Specification of the cooling water The quality of cooling water is specified in the table below. Use pure water or tap water passed through an ion exchanger. pH (25°C) 6.0 to 8.0 Conductivity (25°C) 200µs/cm or less - Standard Chlorine ion Cl 2
  • Page 563.INSTALLATION B-70265EN/02 3.2.2.3 Anticorrosive Add the following anticorrosive to cooling water immediately after installation to prevent problems due to corroding cooling water and to decrease the frequency of replacement of cooling water. Consult the chiller manufacturer for use of the anticorr
  • Page 57B-70265EN/02 3.INSTALLATION 3.2.2.5 Antifreezing solution If the chiller is used in a cold district, it should be provided with an antifreezing function. When the air temperature falls, the water supply pump should be kept running. In a very cold district, incorporate a heater into the chiller to pr
  • Page 583.INSTALLATION B-70265EN/02 3.2.3 Electrical Connections Connect the cables to the laser oscillator as described below. (1) Power cable U (R), V (S), W (T) Recommended power cables (a) If placing the cable in the duct If laying the power cable by placing it in the duct between the power board and th
  • Page 59B-70265EN/02 3.INSTALLATION (b) If not placing the cable in the duct If not placing the power cable in the duct between the power board and the laser oscillator, you can use a heavy- duty power cord cable. OSC Recommendation Cross Section Diameter Max Type Layout C1000-E C t 4 Core Hitachi Cable : 6
  • Page 603.INSTALLATION B-70265EN/02 3.2.4 Inter-unit Connections The C1000-E has an oscillator section and exhaust pump section. Inter-unit connections include 1. vacuum tube connection and 2. power cable connection. Before making connections, check the following: (a) Check for any foreign particles in comp
  • Page 61B-70265EN/02 3.INSTALLATION (1) Connection on the oscillator side Apply a sealing agent (Shin-Etsu silicone Chemical Co. LTD (KE3497W) recommended) to the threaded portion of the elbow fittings (Pt screw), then connect the fittings to the "GAS PUMP" port on the beam output side. (2) Connection on th
  • Page 623.INSTALLATION B-70265EN/02 3.3 DETAILS OF CHECKING 3.3.1 Power Supply Checking 3.3.1.1 Checking the power supply Check whether the power supply satisfies the following specifications: 200VAC +10%, -15%, 50/60Hz ±1Hz, 3φ or 220VAC +10%, -15%, 60Hz±1Hz, 3φ 3.3.1.2 Phase rotation Connect input termina
  • Page 63B-70265EN/02 3.INSTALLATION Fig.3.3.1(a) IF PC board (2) Stabilized power supply unit : See Fig.3.3.1(b). This unit supplies +24 V to the IF PC board. Specification : A20B-1005-0124 Fuse : FU :A60L-0001-0175#3.2 3.2A (2 pieces are used.) Fuse Fig.3.3.1(b) Stabilized power supply - 43 -
  • Page 643.INSTALLATION B-70265EN/02 3.3.1.5 Checking the jumper pins Jumper pin Setting Enables communication with the CNC via a JD1 metal cable (When connector JD1B is used for connection) LINK1 Enables communication with the CNC via an COP optical fiber cable (When connector COP1B is used for connection)
  • Page 65B-70265EN/02 3.INSTALLATION 3.3.2 External Laser Gas Piping Leakage Check (Clamp Test) When you have installed or modified laser gas piping, conduct a clamp test that checks for any leakage by sealing laser gas inside the piping and observing the pressure change after a specified period of time. (1)
  • Page 663.INSTALLATION B-70265EN/02 3.3.3 Checking Cooling Water (1) Turn off the main circuit breaker of the oscillator and the power supply. (2) Check that the water piping is connected to the water inlet (IN) and outlet (OUT) of the oscillator in the correct direction. (3) Completely open the water pipin
  • Page 67B-70265EN/02 3.INSTALLATION 3.3.4 Check for Leakage within the Oscillator (1) Using the automatic leakage check function Usually, use this method to check for leakage. For how to conduct this check, see Section 9.3. (2) Manual check method To investigate the leakage status in detail, follow the proc
  • Page 683.INSTALLATION B-70265EN/02 (4) Turn on the oscillator start switch, wait for 2 to 3 seconds, then turn off the switch, and wait till purging. (5) Apply the helium leakage detector to a possibly faulty position. If there is a leakage, the checker indicates it by display or sound. When using the liqu
  • Page 69B-70265EN/02 3.INSTALLATION 3.3.6 Discharge Aging If the oscillator is left unused for a long time (three days or more), or if the laser gas circulating system has been opened to the atmosphere (for example, to clean the mirrors or replace gas system components), aging is required. This involves war
  • Page 703.INSTALLATION B-70265EN/02 (c) The automatic aging function operates to perform aging. (d) After aging is performed as many times as required, the oscillation ready state (LSTR) is entered, and automatic aging ends. (For details, see Section 9.2.) 3.3.7 Oscillation Characteristics (1) Modify the pa
  • Page 71B-70265EN/02 3.INSTALLATION 3.3.9 Power Supply Margin Check (Pulse Check) (1) Modify the parameters listed below. PRM No.15000.2bit 1 (Use of assist gas is disabled at beam- on.) PRM No.15000.3bit 1 (Internal discharge is enabled in manual mode.) PRM.No.15008.6bit 0 (Automatic aging is disabled.) PR
  • Page 723.INSTALLATION B-70265EN/02 CAUTION 1 First, check the beam position. Laser light, if allowed to penetrate the acrylic material because of incorrect operation, is very dangerous. The paint of the machine is also likely to be damaged. So, attach as feel plate, then an acrylic plate, about 30cm × 30cm
  • Page 73B-70265EN/02 3.INSTALLATION Hot mode: A pattern is obtained immediately after internal discharge with the rated output is performed for two to three minutes. (7) Record the directions (X direction, Y direction), output conditions, and drier blowing direction for the burn pattern. From the hot mode p
  • Page 743.INSTALLATION B-70265EN/02 3.4 PREPARATION PRIOR TO SHIPMENT For shipment and transportation, follow the steps explained below. (1) Disconnect all CNC connecting cables. (2) Disconnect the power cable and ground cable. Cover the cable inlet holes with tape or the like. (3) Remove the laser gas pipe
  • Page 75B-70265EN/02 3.INSTALLATION (4) Notes on transportation When lifting the oscillator for transportation, pass wires through the four eyebolts, and hook up the oscillator by crane. Example of lifting 3.4.2 Removing Cooling Water Remove cooling water according to the procedure below. (1) Open the cooli
  • Page 763.INSTALLATION B-70265EN/02 Valve for removing Flowmeter sensor pressure control Valve for removing water LED Fig.3.4.2 External view of the water distributor unit - 56 -
  • Page 77B-70265EN/02 4.MAINTENANCE 4 MAINTENANCE In laser oscillator, periodic inspection items have been reduced, and adjustments have been made easy. To keep the oscillator in a satisfactory operating condition over a long period, however, it is necessary to carry out periodic maintenance (including daily
  • Page 784.MAINTENANCE B-70265EN/02 4.1 DAILY INSPECTION Table 4.1 lists daily inspection items. Inspect the laser oscillator according to this table. When parts (including oil) have been used for a prescribed period, replace them quickly. Table 4.1 Daily inspection items Item Period Content and instruction
  • Page 79B-70265EN/02 4.MAINTENANCE 4.2 PERIODIC MAINTENANCE The laser oscillator contain consumables that must be replaced periodically. Table 4.2(a) or (b) lists such consumables and the related periodic maintenance work. Perform periodic maintenance as well as daily inspection described in Section 4.1 by
  • Page 804.MAINTENANCE B-70265EN/02 4.3 DETAILS OF MAINTENANCE When opening the panels and doors during maintenance, keep the power turned off. Before replacing oil, be sure to check that purging is completed. 4.3.1 Turbo Blower Oil 4.3.1.1 Check method With the laser oscillator at a rest, check to see if th
  • Page 81B-70265EN/02 4.MAINTENANCE (3) If there is oil left over, put the inner lid back on the bottle, and keep the bottle in a dark, cool place. (4) Remove the nozzle from the oil bottle, take off the inner lid, then put the nozzle back on the bottle. Put the supplied tube into the nozzle, insert the tube
  • Page 824.MAINTENANCE B-70265EN/02 4.3.2 Exhaust Pump Oil 4.3.2.1 Check method Watch the oil gauge, and check that the oil level is between graduations Low and High. Also check whether the oil is dark. If the oil level is below L, add oil to the turbo blower or replace the oil in it. If the oil level is abo
  • Page 83B-70265EN/02 4.MAINTENANCE 4.3.3 Exhaust Pump Filter 4.3.3.1 Replacement method When the operation time reaches 3000 hours or the exhaust capacity gets lowered, replace the filter. A clogged filter may cause a whitish smoke of oil mist to come out of the pump or lower the exhaust capacity. (1) Stop
  • Page 844.MAINTENANCE B-70265EN/02 4.4 MAINTENANCE PARTS The following lists the maintenance parts with maintenance units and part specification information. Maintenance parts [Nonrepairable parts] Q'ty Name Specification C1000-E C2000-E C4000-E C5000-E C6000-E 1 A98L-0003-0045 1 0 0 0 0 2 A98L-0001-0960 0
  • Page 85B-70265EN/02 4.MAINTENANCE Maintenance parts [Nonrepairable parts] Q'ty Name Specification C1000-E C2000-E C4000-E C5000-E C6000-E 39 A290-4514-V170 2 0 0 0 0 40 Oil mist resolution A290-4523-V170 0 2 0 0 0 41 element A290-4540-V170 0 0 2 2 0 42 A290-4562-V170 0 0 0 0 2 43 Exhaust pump A90L-0001-042
  • Page 864.MAINTENANCE B-70265EN/02 Maintenance parts [Nonrepairable parts] Q'ty Name Specification C1000-E C2000-E C4000-E C5000-E C6000-E A60L-0001- 1 76 0 0 0 0 QF1 0425#B080JH2L A60L-0001- 1 77 0 0 0 0 QF1 Circuit breaker 0425#F150JH2L (for U.S.) A60L-0001- 1 78 Tripping 24VDC 0 0 0 0 QF1 0425#F200JH2L 1
  • Page 87B-70265EN/02 4.MAINTENANCE Maintenance parts [Nonrepairable parts] Q'ty Name Specification C1000-E C2000-E C4000-E C5000-E C6000-E 101 A70L-0001-0064#10 0 0 0 1 1 102 A97L-0201-0771#H-0.5-B 1 0 0 1 1 103 Gas filter A97L-0200-0649#2-2-S 0 1 1 0 0 104 A97L-0200-0649#2-0.5-S 0 1 1 0 0 105 Nylon ferrule
  • Page 884.MAINTENANCE B-70265EN/02 Maintenance parts [Repairable parts] Q’ty Name Specification C1000-E C2000-E C4000-E C5000-E C6000-E Laser power supply 1 A14B-0082-B211 1 2 4 4 6 unit 2 A14B-0082-B316 1 0 0 0 0 3 A14B-0082-B311 0 2 0 0 0 4 A14B-0082-B315 0 0 4 0 0 Matching box 5 A14B-0082-B320 0 0 0 4 0
  • Page 89B-70265EN/02 4.MAINTENANCE Maintenance parts [Repairable parts] Q’ty Name Specification C1000-E C2000-E C4000-E C5000-E C6000-E 44 A04B-0813-C420 0 1 0 0 0 Water distributor unit 45 A04B-0815-C420 0 0 1 0 0 Water distributor unit 46 A290-4541-V801 0 0 0 1 0 assembly Water distributor unit 47 A04B-08
  • Page 905.TROUBLESHOOTING B-70265EN/02 5 TROUBLESHOOTING - 70 -
  • Page 91B-70265EN/02 5.TROUBLESHOOTING 5.1 TROUBLESHOOTING PROCEDURE The troubleshooting procedure to be applied depends on the failure occurrence status as indicated below. Perform checking according to the items listed below. (1) Action in response to alarm screen display (See Section 5.2.) (2) Major faul
  • Page 925.TROUBLESHOOTING B-70265EN/02 5.2 RESPONDING TO ALARM MESSAGES ON THE SCREEN Alarm numbers, as well as DGN and PRM Nos., are those of the FS16i-L. See the conceptual diagram of alarm processing and a list of alarms in an appendix of this manual. ALM No.4061 A/D CONVERTER–1 Alarm output condition Th
  • Page 93B-70265EN/02 5.TROUBLESHOOTING ALM No.4063 RF POWER SUPPLY / LASER GAS This message appears when the laser power supply unit becomes abnormal or performs protective operation. The power supply unit performs protective operation even if an error occurs in other than the power supply unit itself. This
  • Page 945.TROUBLESHOOTING B-70265EN/02 No. Check item Cause of trouble, Solution 6 Checking the 1) Check whether the laser gas composition is laser gas correct, and replace the laser gas with the one that satisfies the specifications. 2) Check for gas leakage in the external laser gas piping, investigate th
  • Page 95B-70265EN/02 5.TROUBLESHOOTING No. Phenomenon Presumption cause 6 The RF voltage of all the units is high and Internal leakage of the laser power is low. The discharge is oscillator tends to disappear. (DCI alarm) Internal leakage of Even though the purge is repeatedly water of the oscillator perfor
  • Page 965.TROUBLESHOOTING B-70265EN/02 See the following table, and check the operation status. [Open] command [Close] command DGN No.973 #0=1 DGN No.973 #0=0 Shutter open state signal 1 1 0 0 1 1 0 0 DGN No.961 #4 Shutter close state signal 0 1 0 1 0 1 0 1 DGN No.961 #5 Normal/Abnormal O X X X X X X O No.
  • Page 97B-70265EN/02 5.TROUBLESHOOTING No. Cause of trouble Solution 4 Leakage in vacuum Locate the leakage, and replace the system or water defective part. leakage 5 The gas flow control Adjust the gas flow control valve to obtain valve is closed the specified gas flow rate. 6 Matching box Replace the matc
  • Page 985.TROUBLESHOOTING B-70265EN/02 Alarm output condition This alarm is issued when the actual laser output is in one of the following conditions at the time of beam output: (1) The actual laser output is higher than the average command power (power × duty) by more than the value set in parameter No. 15
  • Page 99B-70265EN/02 5.TROUBLESHOOTING No. Cause of trouble Solution 3 Anomaly of power unit of IF See Subsection 3.3.1.4 for details of the PCB (A16B-2100-0142) normal supply voltage. If the allowable voltage range is exceeded, replace the IF PCB. 4 Laser oscillator main circuit Check whether the main circ
  • Page 1005.TROUBLESHOOTING B-70265EN/02 No. Cause of trouble Solution 2 Poor connection Check the connection between the assist gas supply unit and CNC. ALM No.4072 CHILL FLOW This alarm appears when the water shortage takes place. Alarm output condition This alarm is issued if the cooling water amount signa
  • Page 101B-70265EN/02 5.TROUBLESHOOTING No. Cause of trouble Solution 1 Tool low supply Adjust the secondary pressure at the regulator on pressure of laser the gas cylinder so that the pressure of laser gas gas supplied to the laser oscillator is 0.175MPa±0.025MPa (rating) as measured at the entry of the osc
  • Page 1025.TROUBLESHOOTING B-70265EN/02 ALM No.4076 LASER POWER DOWN This alarm is issued if the monitored laser output is lower than the specified laser output by at least the allowable value. Alarm output condition This alarm is issued when the actual laser output level is lower than the average command po
  • Page 103B-70265EN/02 5.TROUBLESHOOTING ALM No.4077 ABSORBER TEMP. This alarm is issued if the temperature absorber exceeds the allowable value. In the usual operation, this beam absorber is irradiated by the rated output only during the laser output compensation conducted after the start of the oscillator.
  • Page 1045.TROUBLESHOOTING B-70265EN/02 No. Cause of trouble Solution 1 Anomaly of parameter Check whether the values of PRM NO. setting of gas pressure 15000/bit1,15244,15245,15246 are set as control indicated in the attached parameter table. If a different value is set, set the value specified in the data
  • Page 105B-70265EN/02 5.TROUBLESHOOTING Alarm output condition Turning the oscillator start switch on causes exhaust to start. This alarm is issued if the laser gas pressure does not reach the setting of parameter No. 15240 when the time set in parameter No.15259 has elapsed. Related parameters PRM.15240 Eva
  • Page 1065.TROUBLESHOOTING B-70265EN/02 No. Cause of trouble Solution 5 Anomaly of exhaust pump If the above checks do not reveal any abnormality, the performance of the exhaust pump has deteriorated. Check the following items. 1) Check whether specified oil is provided at an appropriate level. Supply specif
  • Page 107B-70265EN/02 5.TROUBLESHOOTING No. Cause of trouble Solution 3 Anomaly of supply laser Adjust the secondary pressure at the gas pressure regulator on the gas cylinder so that the pressure of laser gas supplied to the laser oscillator is 0.175MPa±0.025MPa (rating) as measured at the entry of the osci
  • Page 1085.TROUBLESHOOTING B-70265EN/02 Alarm output condition This alarm is issued when the power compensation coefficient exceeds the power compensation limit during execution of power compensation. Power compensation coefficient = (Pc/Pa) × 1024 Pc : Parameter No. 15200 or 15201 Pa : Actual laser output R
  • Page 109B-70265EN/02 5.TROUBLESHOOTING Alarm output condition 1) Immediately before the oscillation ready state (LSTR) is established, the RF voltage of the power supply with the smallest number in the selected discharge tubes is compared with the discharge tube voltage in normal condition (parameter No. 15
  • Page 1105.TROUBLESHOOTING B-70265EN/02 ALM No.4090 LASER NOT GENERATE This alarm is issued if an attempt is made to radiate a laser beam when the laser is not in the oscillation ready (LSTR) state. Alarm output condition This alarm is issued if the oscillation ready (LSTR) state is not established during be
  • Page 111B-70265EN/02 5.TROUBLESHOOTING Alarm output condition When the integral value of gas pressure control is preset and the pressure is increased from the from the gas pressure at the start of discharge to the gas pressure during oscillation, this alarm is issued if the actual gas pressure has not incre
  • Page 1125.TROUBLESHOOTING B-70265EN/02 No. Cause of trouble Solution 1 Invalid parameter Check whether the values of PRM Nos. 1240, setting 15241, and 15242 are set as indicated in the attached parameter table. If a different value is set, set the value specified in the data sheets. 2 Anomaly of turbo Repla
  • Page 113B-70265EN/02 5.TROUBLESHOOTING ALM No.4105 TURBO TEMP. 1 This alarm is issued, if the temperature of the turbo blower motor winding becomes higher than the permissible level. Alarm output condition This alarm is issued if the turbo temperature signal becomes "0" after the start of the oscillator and
  • Page 1145.TROUBLESHOOTING B-70265EN/02 No. Cause of Solution trouble 4 Insufficient turbo When the temperature of the turbo blower motor blower cooling section is high, check whether the cooling water path is clogged. This alarm is issued also when the cooling water in the turbo blower becomes insufficient.
  • Page 115B-70265EN/02 5.TROUBLESHOOTING 5.3 MAJOR FAULTS 5.3.1 Laser Power Supply Alarm Display (1) If an alarm is issued to indicate the occurrence of a power supply fault, check the diagnosis screen to determine which power supply unit issued that alarm signal. The bit corresponding to the power supply uni
  • Page 1165.TROUBLESHOOTING B-70265EN/02 Type of Upper Condition Causes alarm limit RFI This alarm is issued if a high RF 5.45A Abnormal current flows through the discharge feedback circuit tube when the oscillator is operating in CW/pulse mode. If the power supply unit fails just because the high-speed diode
  • Page 117B-70265EN/02 5.TROUBLESHOOTING 5.3.5 Display of Fluctuating Laser Output on CRT First check if PRM No. 15216 is taking the value of 60, which is a standard. In case the fluctuation continues with this value used, read the laser output monitor value indicated in DGN=906. Its range of fluctuation is s
  • Page 1185.TROUBLESHOOTING B-70265EN/02 No. Cause of trouble Solution 7 Loosened terminal of Fix it tightly. connecting cable 8 Vane damaged Replace the exhaust pump. 5.3.8 Main Breaker Trips Possible causes are listed below. Take appropriate action. No. Cause of trouble Solution 1 Damaged circuit breaker Ch
  • Page 119B-70265EN/02 5.TROUBLESHOOTING 5.3.10 Inverter Alarm Display (1) Cause of alarm When an inverter alarm is issued, a message as shown below appears on the digital panel of the inverter. The causes of the inverter alarms are listed below. Display : Exx.z Exx : Cause of alarm (Message) z : Status of in
  • Page 1205.TROUBLESHOOTING B-70265EN/02 Status of inverter when the alarm was issued Indication Status Indication Status Operation command is 0 Reset 5 input with frequency 0. 1 Stopped 6 Being started. 2 Being decelerated. 7 DC current damping state 3 Constant speed 8 Under overload control 4 Being accelera
  • Page 121B-70265EN/02 5.TROUBLESHOOTING Display method d081 (Function/FUNC keys) (1) E01.3 (Up/Down keys) (2) 1000 (Up/Down keys) (3) 28.0 (Up/Down keys) (4) 280 (Up/Down keys) (5) 15 (Up/Down keys) (6) 18 (Up/Down keys) - 101 -
  • Page 1226.OSCILLATOR CONNECTIONS B-70265EN/02 6 OSCILLATOR CONNECTIONS - 102 -
  • Page 123B-70265EN/02 6.OSCILLATOR CONNECTIONS 6.1 ELECTRICAL CONNECTIONS The following show electrical connection diagrams of the individual models. Fig.6.1(a) Electrical connection diagram for C1000-E (1/2) - 103 -
  • Page 1246.OSCILLATOR CONNECTIONS B-70265EN/02 Fig.6.1(b) Electrical connection diagram for C1000-E (2/2) - 104 -
  • Page 125B-70265EN/02 6.OSCILLATOR CONNECTIONS Fig.6.1(c) Electrical connection diagram for C2000-E (1/2) - 105 -
  • Page 1266.OSCILLATOR CONNECTIONS B-70265EN/02 Fig.6.1(d) Electrical connection diagram for C2000-E (2/2) - 106 -
  • Page 127B-70265EN/02 6.OSCILLATOR CONNECTIONS Fig.6.1(e) Electrical connection diagram for C4000-E (1/2) - 107 -
  • Page 1286.OSCILLATOR CONNECTIONS B-70265EN/02 Fig.6.1(f) Electrical connection diagram for C4000-E (2/2) - 108 -
  • Page 129B-70265EN/02 6.OSCILLATOR CONNECTIONS Fig.6.1(g) Electrical connection diagram for C5000-E (1/2) - 109 -
  • Page 1306.OSCILLATOR CONNECTIONS B-70265EN/02 Fig.6.1(h) Electrical connection diagram for C5000-E (2/2) - 110 -
  • Page 131B-70265EN/02 6.OSCILLATOR CONNECTIONS Fig.6.1(i) Electrical connection diagram for C6000-E (1/2) - 111 -
  • Page 1326.OSCILLATOR CONNECTIONS B-70265EN/02 Fig.6.1(j) Electrical connection diagram for C6000-E (2/2) - 112 -
  • Page 133B-70265EN/02 6.OSCILLATOR CONNECTIONS 6.2 COOLING WATER PIPING The following show cooling water flow diagrams for the individual models. Fig.6.2(a) Water flow diagram for C1000-E Fig.6.2(b) Water flow diagram for C2000-E - 113 -
  • Page 1346.OSCILLATOR CONNECTIONS B-70265EN/02 Fig.6.2(c) Water flow diagram for C4000-E - 114 -
  • Page 135B-70265EN/02 6.OSCILLATOR CONNECTIONS Fig.6.2(d) Water flow diagram for C5000-E - 115 -
  • Page 1366.OSCILLATOR CONNECTIONS B-70265EN/02 Fig.6.2(e) Water flow diagram for C6000-E - 116 -
  • Page 137B-70265EN/02 6.OSCILLATOR CONNECTIONS 6.3 VACUUM GAS CONNECTION The following show vacuum system diagrams for the individual models. Fig.6.3(a) Vacuum system diagram for C1000-E Fig.6.3(b) Vacuum system diagram for C2000-E - 117 -
  • Page 1386.OSCILLATOR CONNECTIONS B-70265EN/02 Fig.6.3(c) Vacuum system diagram for C4000-E Fig.6.3(d) Vacuum system diagram for C5000-E - 118 -
  • Page 139B-70265EN/02 6.OSCILLATOR CONNECTIONS Fig.6.3(e) Vacuum system diagram for C6000-E - 119 -
  • Page 1407.UNITS B-70265EN/02 7 UNITS This chapter explains the units inside the oscillator. The following provides information that you should bear in mind when performing replacement work. WARNING 1 Before replacing a unit, be sure to turn off the main power supply to the control unit. In addition, perform
  • Page 141B-70265EN/02 7.UNITS 7.1 UNIT CONFIGURATION The input unit consists of a power magnetics cabinet, interface PCB, and stabilized power supply. 7.1.1 C1000-E Power Magnetics Cabinet QF1 QF2 KM1 To laser power supply QF3 KM2 To inverter QF4 KM3 To exhaust pump QF5 XT45 To surge absorber Z110, Z111 QF6
  • Page 1427.UNITS B-70265EN/02 Fig.7.1.1(c) External view of power magnetics cabinet 2 (C1000-E) - 122 -
  • Page 143B-70265EN/02 7.UNITS 7.1.2 C2000-E Power Magnetics Cabinet QF1 QF2 KM1 To laser power supply No.1 QF3 KM2 To laser power supply No.2 QF4 KM3 To inverter QF5 KM4 To fan unit QF6 KM5 To exhaust pump and IF PCB QF7 XT45 To surge absorber Z110, Z111 Fig.7.1.2(a) Power magnetics cabinet composition (C200
  • Page 1447.UNITS B-70265EN/02 7.1.3 C4000-E Power Magnetics Cabinet Fig.7.1.3(a) Power magnetics cabinet composition (C4000-E) Fig.7.1.3(b) External view of power magnetics cabinet (C4000-E) - 124 -
  • Page 145B-70265EN/02 7.UNITS 7.1.4 C5000-E Power Magnetics Cabinet Fig.7.1.4(a) Power magnetics cabinet composition (C5000-E) Fig.7.1.4(b) External view of power magnetics cabinet 1 (C5000-E) - 125 -
  • Page 1467.UNITS B-70265EN/02 Fig.7.1.4(c) External view of power magnetics cabinet 2 (C5000-E) - 126 -
  • Page 147B-70265EN/02 7.UNITS 7.1.5 C6000-E Power Magnetics Cabinet Fig.7.1.5(a) Power magnetics cabinet composition (C6000-E) Fig.7.1.5(b) External view of power magnetics cabinet 1 (C6000-E) - 127 -
  • Page 1487.UNITS B-70265EN/02 Fig.7.1.5(c) External view of power magnetics cabinet 2 (C6000-E) - 128 -
  • Page 149B-70265EN/02 7.UNITS 7.2 LASER POWER SUPPLY UNIT 7.2.1 Replacement Method 7.2.1.1 Replacing the power supply unit (1) Turn off the power to the CNC, and turn off the main circuit breaker of the oscillator. Turn off the power to the chiller unit. (2) Remove the water fittings, and power and signal ca
  • Page 1507.UNITS B-70265EN/02 (4) After replacing the power supply unit with a new one, tighten the mounting bolts, and attach the water fittings and the power and signal cables. When attaching the water fittings, loosen portion A shown in the figure, determine the orientation of the fittings, tighten portio
  • Page 151B-70265EN/02 7.UNITS Fig. 7.2.1 Layout of diodes and FET module PCBs 7.2.1.3 Replacing an FET module PCB (1) Turn off the power to the CNC, and turn off the main circuit breaker of the oscillator. (2) Remove the water fittings, and power and signal cables. (3) Remove the mounting screws on the top p
  • Page 1527.UNITS B-70265EN/02 7.2.2 Adjustment Method The power supply is adjusted by adjusting the base discharge with trimmer VR11 and adjusting the maximum power supply output with trimmer VR13. For the base discharge adjustment, it is important to have main discharge of a discharge tube disappear and imp
  • Page 153B-70265EN/02 7.UNITS (b) Then, check that all discharge tubes are continuously discharging. If a discharge tube stops discharge, turn VR11 of the power supply corresponding to the discharge tube clockwise until the discharge tube discharges. (c) Adjust VR11 of the power supply unit so that only one
  • Page 1547.UNITS B-70265EN/02 (i) When the base discharge state is entered, record the RFI value.----------------------------------------------------------------(A) (3) Base discharge adjustment (C4000-E) (a) Start the oscillator, and wait until the gas pressure is stabilized in the base discharge state. (b)
  • Page 155B-70265EN/02 7.UNITS (g) Turn off the discharge start signal (HV ON), then reset the bias command value in PRM 15223 to the original value. (h) When the base discharge state is entered, record the RFI value.----------------------------------------------------------------(A) 7.2.2.3 Maximum output ad
  • Page 1567.UNITS B-70265EN/02 NOTE 1 RFI value recording and adjustment If the CNC monitor is located in a place distant from the oscillator, and you have no assistant, record and adjust the RFI monitor voltage value on the CN18 connector for RFV and RFI monitoring on the power supply unit instead of the RFI
  • Page 157B-70265EN/02 7.UNITS 7.3 MATCHING BOX 7.3.1 Replacement Method (1) Turn off the power to the CNC, then turn off the power to the laser oscillator. In addition, open the main circuit breaker for the laser oscillator. (2) Disconnect the power, signal, fan cables from the matching box. (3) Remove the r
  • Page 1587.UNITS B-70265EN/02 7.4 DISCHARGE TUBE 7.4.1 Placement Numbers The identification numbers of the discharge tubes when viewed from the maintenance side of the oscillator are indicated below. Fig.7.4.1(a) Identification numbers (C1000-E) Fig.7.4.1(b) Identification numbers (C2000-E) Fig.7.4.1(c) Iden
  • Page 159B-70265EN/02 7.UNITS Fig.7.4.1(e) Identification numbers (C6000-E) 7.4.2 Replacement Method (1) Turn off the power to the CNC, then turn off the power to the laser oscillator. (2) Remove the top cover of the oscillator. (3) Detach the cable and feeder connecting the discharge tube with the matching
  • Page 1607.UNITS B-70265EN/02 7.5 TRIGGER ELECTRODE 7.5.1 Replacement Method (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Remove the cable connected to the trigger electrode. (3) The mounting screw of the trigger electrode is made of
  • Page 161B-70265EN/02 7.UNITS 7.6 TURBO BLOWER When the turbo blower is replaced, the gas circulating system is open to the atmosphere for a long time. Pay particular attention to the immediate surroundings to ensure that dust and other contaminants do not enter the gas circulating system. Clean the flanges
  • Page 1627.UNITS B-70265EN/02 If the sleeve or ferrule of the cooling water tube or gas tube is deformed, replace it with the attached sleeve or ferrule. (13) Supply turbo blower oil. Water tube Gas tube Power cable Connection of TB Inlet pipe Dust collector Dust collector PSU output cables Maintenance Side
  • Page 163B-70265EN/02 7.UNITS 7.6.2 Leakage Check and Discharge Aging (1) See the oil window of the turbo blower to check whether the oil level is in the 3/4 position between Hi and Low. (2) Check for leakage. (3) Perform discharge aging. 7.6.3 Adjusting the Oil Level Detection Signal Follow the procedure be
  • Page 1647.UNITS B-70265EN/02 7.7 INVERTER 7.7.1 Checking the Parameters With the digital operator's panel attached to the inverter, all parameters can be set and checked. Operate the digital operator's panel with the power to the oscillator turned on. The parameters of an inverter purchased by FANUC are set
  • Page 165B-70265EN/02 7.UNITS Name Description Operation key Key for stopping the motor. This key, however, is enabled only when the operation command destination is set to the operator. (Check that the operation command indication lamp is on.) STOP/RESET key Used to stop the motor or reset an alarm. FUNC (f
  • Page 1667.UNITS B-70265EN/02 (2) Method of operation (a) Method of displaying the monitor mode, basic setting mode, and extended function mode Monitor (4-digit LED display) <1> Display of set monitor state <5> The code No. of the monitor mode is (In the initial state, 0.00 is displayed.) displayed. (d001 is
  • Page 167B-70265EN/02 7.UNITS (b) Function setting method Change the operation command destination (operator → control terminal). <1> The extended function mode is displayed. <5> The extended function mode is displayed. (A--- is (A--- is displayed.) displayed.) Display "A---" according to the display method
  • Page 1687.UNITS B-70265EN/02 (c) Function code setting method The code No. of the monitor mode, basic setting mode, or extended function monitor can be directly entered instead of using the scroll method. An example of changing from monitor mode code No. d001 to function code No. A029 is indicated below. <1
  • Page 169B-70265EN/02 7.UNITS (d) Parameter settings Initial Setting Code Name of function Remarks value value d001 Output frequency monitor - - Hz d002 Output current monitor - - A d003 Rotation direction monitor - - F (forward rotation)/o (stop)/r (reverse rotation) d004 PID feedback monitor - - d005 Intel
  • Page 1707.UNITS B-70265EN/02 Initial Setting Code Name of function Remarks value value 00: Free run at JG stop time (disabled during operation), 01: Gradual stop at JG stop time (disabled during operation), 02: Multistage Direct current damping at JG stop time (disabled during speed A039 Jogging selection 0
  • Page 171B-70265EN/02 7.UNITS Initial Setting Code Name of function Remarks value value A101 01 start 0.00Hz 0.00Hz 0.00 to 1500 A102 01 end 0.00Hz 0.00Hz A103 01 start ratio 20% 20% 0 to 100 External A104 01 end ratio 100% 100% frequency A105 01 start selection 01 01 00: External start frequency, 01: 0 Hz a
  • Page 1727.UNITS B-70265EN/02 Initial Setting Code Name of function Remarks value value C001 Intelligent input terminal 1 selection 18 18 01: RV (reverse rotation), 02: CF1 (multistage speed 1), 03: CF2 (multistage speed 2), 04: CF3 (multistage 3), 05: CF4 C002 Intelligent input terminal 2 selection 16 15 (m
  • Page 173B-70265EN/02 7.UNITS Initial Setting Code Name of function Remarks value value b034 Run time/power ON time level 0hr 0hr 0. to 9999.(0 to 99990hr)/1000 to 6553(100000 to 655300)hr 00: Forward and reverse rotation enabled, 01: Forward rotation b035 Operation direction limitation selection 00 02 only
  • Page 1747.UNITS B-70265EN/02 7.7.2 Replacement Method (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Detach the cable connected to the connector (CN138) located under the inverter. (3) Remove the front cover (by removing the set screw
  • Page 175B-70265EN/02 7.UNITS Fig.7.7 Inverter replacement procedure - 155 -
  • Page 1767.UNITS B-70265EN/02 7.8 EXHAUST PUMP 7.8.1 Replacement Method (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. Turn off the power to the chiller unit. (2) Drain the cooling water from the oscillator, then disconnect the two water t
  • Page 177B-70265EN/02 7.UNITS 7.9 GAS CONTROL UNIT (C1000-E, C5000-E, C6000-E) 7.9.1 Configuration The gas control unit consists of an charge unit, exhaust unit, pressure sensors, and so on. Fig. 7.9 shows an installation photo of the gas control unit. The following outlines the functions of components shown
  • Page 1787.UNITS B-70265EN/02 (12) Bypass valve This valve connects the motor chamber of the turbo blower to the exhaust pump. When the oscillator starts, this valve opens to release laser gas from the motor section. During normal operation, this valve is closed, and a constant amount of gas is released thro
  • Page 179B-70265EN/02 7.UNITS 7.9.2 Replacement Method 7.9.2.1 Replacing the charge unit (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Close the valve of the external laser gas supply (for example, a gas cylinder). (3) Disconnect all
  • Page 1807.UNITS B-70265EN/02 7.9.3 Adjustment Method 7.9.3.1 Setting the gas supply pressure sensor The gas supply pressure sensor is a sensor labeled PSW1 in the gas controller. (1) Turn on the power to the CNC. Never turn on the oscillator start signal (RUN). (2) Adjust the secondary pressure of the regul
  • Page 181B-70265EN/02 7.UNITS 7.9.3.3 Operating the gas supply pressure sensor and atmospheric pressure sensor The sensors operate in one of four modes. In the measurement mode, a pressure value being measured is indicated. In the initial setting mode, basic operation is set. In the pressure setting mode, an
  • Page 1827.UNITS B-70265EN/02 (2) Setting procedure When setting in each mode, follow the procedure described below. • Setting in the initial setting mode Perform basic setting for the sensor. To enter the initial setting mode, hold down the SET key for 2 to 4 seconds in the measurement mode. This setting op
  • Page 183B-70265EN/02 7.UNITS • Setting in the pressure setting mode Perform operating pressure setting for the sensor. Note that different values are set for the gas supply pressure sensor and atmospheric pressure sensor. List of settings (Unit: MPa) Gas supply pressure Atmospheric pressure sensor sensor (P
  • Page 1847.UNITS B-70265EN/02 • Zero clear Clear the initial offset value of the sensor. This setting can be made in the measurement mode. Set the atmospheric pressure sensor only. Check that the measurement mode is set. Detach the tube. Press and simultaneously. Set the indication to 0. To the measurement m
  • Page 185B-70265EN/02 7.UNITS 7.9.3.4 Adjusting the exhaust unit (adjusting the laser gas consumption) (1) Detach the tube from the filter of the gas controller, and attach a gas flowmeter with laser gas specifications. (2) Set 30 in parameter No. 15260, and start the oscillator. Air entered when the oscilla
  • Page 1867.UNITS B-70265EN/02 7.10 PRESSURE CONTROL UNIT (C2000-E, C4000-E) 7.10.1 Configuration Fig. 7.10 shows an installation photo of the pressure control unit. The following outlines the functions of components shown in the figure: (1) Pressure sensor This sensor monitors the pressure in the pipe on the
  • Page 187B-70265EN/02 7.UNITS Pressure control valve Pressure sensor (PS) (CV1) Atmospheric pressure sensor (PSW2) Intermediate PCB A Filter 2 (F2) Gas distributor Gas supply valve (PSW1) Filter 1 (F1) External pipe exhaust Purge valve Gas supply valve valve (V6) (V2) (V1) Fig.7.10 Pressure control unit - 16
  • Page 1887.UNITS B-70265EN/02 7.10.2 Adjustment Method 7.10.2.1 Setting the gas supply pressure sensor (1) Turn the CNC on. Never turn on the oscillator start signal (RUN) at this stage. (2) Set the secondary pressure of the regulator of the external laser gas supply (gas cylinder, for example) to 0.05 MPa.
  • Page 189B-70265EN/02 7.UNITS 7.11 EXHAUST CONTROL UNIT (C2000-E, C4000-E) 7.11.1 Configuration (1) Exhaust flow rate adjustment valve This valve adjusts the flow rate of laser gas released from the oscillator during normal operation. (2) Exhaust valve When the oscillator starts, this valve opens to allow la
  • Page 1907.UNITS B-70265EN/02 7.11.2 Replacement Method (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Remove the connected tubes and cables. (3) Remove the screws fastening the unit, and remove the unit to replace it with a new one. (
  • Page 191B-70265EN/02 7.UNITS 7.12 REPLACING THE WATER DISTRIBUTION UNIT 7.12.1 Replacement Method Replace the water distributor unit as follows. The IN side and OUT side of the distribution unit of C1000-E, C5000-E, and C6000-E are separated from each other, and a different specification number is assigned
  • Page 1927.UNITS B-70265EN/02 Fig.7.12(a) Detail of water distributor unit (C1000-E) Fig.7.12(b) Detail of water distributor unit (C2000-E) - 172 -
  • Page 193B-70265EN/02 7.UNITS Fig.7.12(c) Detail of water distributor unit (C4000-E) Fig.7.12(d) Detail of water distributor unit (C5000-E) - 173 -
  • Page 1947.UNITS B-70265EN/02 Fig.7.12(e) Detail of water distributor unit (C6000-E) Fig.7.12(f) Detail of water distributor unit (C6000-E) - 174 -
  • Page 195B-70265EN/02 7.UNITS 7.12.2 Adjusting the Flow Sensor 7.12.2.1 For C1000-E The operation point of the water flow sensor for the C1000-E depends on the pressure at the cooling water inlet of the oscillator. So, note that the alarm operation point may slightly shift if the length of piping from the ch
  • Page 1967.UNITS B-70265EN/02 Adjustment screw - + Flow rate indicator (3) Remove the packing at the top of the water flow sensor, then adjust the flow rate setting screw to find the position where the flow rate sensor is placed in the conduction state (on). (4) From the found position, turn the flow rate se
  • Page 197B-70265EN/02 7.UNITS 7.12.2.2 For C2000-E, C4000-E, C5000-E, and C6000-E (1) Adjust the flow rate of cooling water flowing into the oscillator to an alarm setting flow rate. Use a flowmeter with a proper and accurate rated flow rate. Alarm setting flow Model Rated flow rate rate C2000-E 50 liters/mi
  • Page 1987.UNITS B-70265EN/02 7.13 SHUTTER UNIT 7.13.1 Replacement Method 7.13.1.1 Replacing the shutter unit (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Disconnect the cables from intermediate PCB B. (3) Remove the bolts which secu
  • Page 199B-70265EN/02 7.UNITS 7.13.1.3 Replacing the shutter switch (thermal and photoelectric switches) (1) Remove connector CN52B and CN54B from intermediate PCB B, then disconnect its cable. (2) The shutter thermal switch and photoelectric switch are integrated into a sensor unit. So, remove both switches
  • Page 2007.UNITS B-70265EN/02 7.14 BEAM ABSORBER 7.14.1 Replacement Method (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. Turn off the power to the chiller unit. (2) Drain the water from the oscillator, then disconnect the water pipes. (3)
  • Page 201B-70265EN/02 7.UNITS 7.15 GUIDE LASER (SEMICONDUCTOR LASER) 7.15.1 Replacement Method (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Remove connector CN59 from intermediate PCB B, then disconnect the cable. (3) Remove the thre
  • Page 2027.UNITS B-70265EN/02 7.16 FAN UNIT There are two major types of fan unit in the oscillator. (1) Fan unit Consists of several fans and a terminal block. (2) Fan-assisted radiator Consists of a water-cooled radiator, several fans, and a terminal block. 7.16.1 Replacing a Fan Unit (1) Turn off the powe
  • Page 203B-70265EN/02 7.UNITS (8) Operate the chiller unit manually to circulate the cooling water. Check that no water leaks from the fittings that were disconnected during the replacement. After checking, restore the original chiller setting. (9) Close the main circuit breaker, turn on the power to the osc
  • Page 2047.UNITS B-70265EN/02 7.17 POWER SENSOR UNIT Be careful not to touch or apply force to the black, light-sensitive surface. Also ensure that no dust enters the sensor. 7.17.1 Replacement Method (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser osc
  • Page 205B-70265EN/02 7.UNITS 7.18 REPLACING THE DEW SENSOR 7.18.1 Replacement Method (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Disconnect the dew sensor Faston terminal from the terminal block. (3) Remove the screws securing the
  • Page 2067.UNITS B-70265EN/02 7.19 PCB 7.19.1 Replacing the IF PCB (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Disconnect all cables from the IF PCB. (3) Remove the screws or edge supports, then remove the interface PCB. (4) Mount a
  • Page 207B-70265EN/02 7.UNITS 7.19.4 Replacing the Turbo PCB (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Disconnect all cables from the turbo PCB. (3) Remove the four edge supports, then remove the turbo PCB. (4) Mount a new PCB by
  • Page 2087.UNITS B-70265EN/02 7.20 OIL MIST DECOMPOSING ELEMENT 7.20.1 Replacement Method (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Remove the mounting screws, pull out the element while tilting it. (3) Insert a new element in the
  • Page 209B-70265EN/02 7.UNITS 7.21 GAS DUST COLLECTOR UNIT 7.21.1 Cleaning (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Remove the mounting screws, and remove the dust box. (3) Detach the dust box blades and wipe them with a clean cl
  • Page 2108.LASER OPTICAL SYSTEM B-70265EN/02 8 LASER OPTICAL SYSTEM - 190 -
  • Page 211B-70265EN/02 8.LASER OPTICAL SYSTEM 8.1 LASER OPTICAL PARTS Table 8.1 lists the optical parts and their features. Table 8.1 Optical parts and their features Substrate Color Name Specification Marking Application material (front/rear) 1 A98L-0003-0045 C1000-E 2 A98L-0001-0960 C2000-E 3 A98L-0003-0036
  • Page 2128.LASER OPTICAL SYSTEM B-70265EN/02 8.2 CLEANING AND REPLACING THE OPTICAL PARTS The output coupler, rear mirror, and folding mirrors of the laser oscillator must be cleaned or replaced periodically. Similarly, if the laser output or beam mode becomes abnormal, the optical parts must be cleaned or r
  • Page 213B-70265EN/02 8.LASER OPTICAL SYSTEM 8.2.1 Cleaning and Replacing the Output Coupler and Rear Mirror (1) For output coupler (a) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (b) Before starting cleaning, wipe away any foreign matter f
  • Page 2148.LASER OPTICAL SYSTEM B-70265EN/02 (j) Repeat Steps (g) through (i) until all dirt on the mirror surface is removed. Finally, clean the mirror surface with ethyl alcohol. (k) Clean the back surface of the mirror similarly. (l) Wipe the mirror holder and O-rings with ethyl alcohol. (m) An arrow mark
  • Page 215B-70265EN/02 8.LASER OPTICAL SYSTEM (c) When the pressure of the vacuum system of the oscillator is lower than the atmospheric pressure, the rear mirror may be sucked, making it difficult to remove the rear mirror. Check that the oscillator is in the purge state, and loosen the blind joint on the to
  • Page 2168.LASER OPTICAL SYSTEM B-70265EN/02 (m) An arrow mark is provided on the side of the rear mirror, and a line is drawn above the mark with a felt-tipped marker. If the line has disappeared, look for a mark-off line. Place the rear mirror on the holder. At this time, ensure that the reflecting plane (
  • Page 217B-70265EN/02 8.LASER OPTICAL SYSTEM 8.2.2 Cleaning and Replacing the Folding Mirrors (1) Turn off the power to the CNC, then turn off the main circuit breaker and power supply for the laser oscillator. (2) Before starting cleaning, wipe away any foreign matter from around the mirror holder. (3) Loos
  • Page 2188.LASER OPTICAL SYSTEM B-70265EN/02 Fig.8.2.2(b) Exploded view of the holding mirror (C2000-E,C4000- E,C5000-E,C6000-E) (4) Gently blow clean air by using a camera blower across the mirror surface to remove dust and dirt. (5) Drip ethyl alcohol or lens cleaner onto the mirror surface, and gently wip
  • Page 219B-70265EN/02 8.LASER OPTICAL SYSTEM (11) Place the mirror in its holder, and blow warm air onto the holder to warm it by using a drier. This will soften the vacuum grease and bond the mirror onto the holder. Check for excessive vacuum grease, if any, around the mirror. If the mirror is dirty, clean
  • Page 2208.LASER OPTICAL SYSTEM B-70265EN/02 (5) Drip ethyl alcohol or lens cleaner onto the mirror surface, and gently wipe dirty areas by using a cotton swab moistened with the fluid. (6) Place lens cleaning paper on the mirror, then spray ethyl alcohol or lens cleaner over the paper and mirror. Then, move
  • Page 221B-70265EN/02 8.LASER OPTICAL SYSTEM 8.3 ALIGNMENT OF THE RESONATOR The theory of alignment is such that while monitoring the laser output signal with a tester, you adjust the angle of each mirror to obtain a maximum output power. Once this adjustment is made, all mirrors are set for maximum output.
  • Page 2228.LASER OPTICAL SYSTEM B-70265EN/02 Fig.8.3(b) Position of adjustment micrometer for alignment (C2000-E) - 202 -
  • Page 223B-70265EN/02 8.LASER OPTICAL SYSTEM Fig.8.3(c) Position of adjustment micrometer for alignment (C4000-E) - 203 -
  • Page 2248.LASER OPTICAL SYSTEM B-70265EN/02 Fig.8.3(d) Position of adjustment micrometer for alignment (C5000-E) - 204 -
  • Page 225B-70265EN/02 8.LASER OPTICAL SYSTEM Fig.8.3(e) Position of adjustment micrometer for alignment (C6000-E) - 205 -
  • Page 2268.LASER OPTICAL SYSTEM B-70265EN/02 8.3.1 Alignment Procedure for Adjusting All Mirrors This subsection describes the procedure for readjusting a laser oscillator already installed and adjusted using an old method, to restore its maximum output state. Use this procedure in the following cases: • To
  • Page 227B-70265EN/02 8.LASER OPTICAL SYSTEM (c) Obtain a maximum power based on FM1 by using the R.M. as the reference. (d) Collect a burn pattern. If the mode is good, end this procedure. If not, start all over again from step (a). At this time, collect a burn pattern in each step. If the mode is finally g
  • Page 2288.LASER OPTICAL SYSTEM B-70265EN/02 (f) Collect a burn pattern. If the mode is good, end this procedure. If not, start all over again from step (a). At this time, collect a burn pattern in each step. If the mode is finally good, end this procedure. (5) For C6000-E (a) Obtain a maximum power based on
  • Page 229B-70265EN/02 8.LASER OPTICAL SYSTEM 8.3.2 Alignment Procedure during Installation after Transportation Misalignment can occur due to transportation or storage state (as in the case where a clamp is not removed). Be sure to make an alignment according to the procedure described in this subsection at
  • Page 2308.LASER OPTICAL SYSTEM B-70265EN/02 (3) For C4000-E (a) Obtain a maximum power based on FM4. (b) Obtain a maximum power based on FM4 by using R.M. as the reference. (c) Obtain a maximum power based on FM4 by using O.C. as the reference. (d) Obtain a maximum power based on FM2 by using O.C. as the re
  • Page 231B-70265EN/02 8.LASER OPTICAL SYSTEM (5) For C6000-E (a) Obtain a maximum power based on FM1. (b) Obtain a maximum power based on FM4. (c) Obtain a maximum power based on FM1 by using FM4 as the reference. (d) Obtain a maximum power based on FM1 by using O.C. as the reference. (e) Obtain a maximum po
  • Page 2328.LASER OPTICAL SYSTEM B-70265EN/02 8.3.3 Alignment Procedure at Mirror Cleaning Time When cleaning or replacing mirrors of a laser oscillator already adjusted using the maximum power method, use the alignment procedure described in this subsection. All folding mirrors need not be cleaned each time.
  • Page 233B-70265EN/02 8.LASER OPTICAL SYSTEM (3) For C4000-E (a) Clean the O.C. and R.M. mirrors. (b) Obtain a maximum power based on O.C. by using R.M. as the reference. (c) Clean the FM3 and FM4 mirrors. (d) Obtain a maximum power based on FM4. (e) Clean the FM1, FM2, FM5, and FM6 mirrors. (f) Obtain a max
  • Page 2348.LASER OPTICAL SYSTEM B-70265EN/02 8.4 OBTAINING A MAXIMUM POWER 8.4.1 Preparation (1) Using the conditions Pc = rated output, Duty cycle = 15%, and Frequency = 100 Hz, adjust the duty cycle to determine the actual conditions for internal discharge. If a large output is used, the mode present when
  • Page 235B-70265EN/02 8.LASER OPTICAL SYSTEM 5 15 Initial setting of A = 7.590 10 5 Power Clockwise B is adjusted to obtain a maximum power. (1) (4) (5) (2) Same state as (1) (3) In (3), the power is decreased, indicating that the direction is wrong. A maximum power is obtained based on B. So, in (5), the ad
  • Page 2368.LASER OPTICAL SYSTEM B-70265EN/02 8.5 POWER CALIBRATION METHOD 8.5.1 Setting a Power Input Compensation Coefficient After replacing the rear mirror of the laser oscillator or replacing the power sensor unit, check and set the power input compensation coefficient. A laser beam is directly measured.
  • Page 237B-70265EN/02 8.LASER OPTICAL SYSTEM 8.5.2 Using the Power Probe (1) Start up the oscillator after modifying the following parameters: PRM.15000.41 → 0 (to disable power compensation) PRM.15208 4096 (or 6144) → 0 (to disable power feedback) (2) Specify an irradiation output and start internal dischar
  • Page 2388.LASER OPTICAL SYSTEM B-70265EN/02 (9) Find the average of three probe measurement values. Let Pr be this average. Apply this value to the following expression to find an actual output: Actual output Pr' = Pr × (probe coefficient) (10) Upon completion of the work above, return the parameters to the
  • Page 239B-70265EN/02 8.LASER OPTICAL SYSTEM 8.6 ALIGNMENT OF THE BEAM FOLDING UNIT (C2000-E, C4000-E SHORT OPTICAL PATH LENGTH TYPE) The beam folding unit has two mirrors. One mirror is fixed, on which laser beams from the output coupler are reflected first. The other is movable. (1) Start the oscillator an
  • Page 2408.LASER OPTICAL SYSTEM B-70265EN/02 A slant movement can be made with the adjustment screws. Fig.8.6(b) Beam folding unit adjustment position (C4000-E) - 220 -
  • Page 241B-70265EN/02 8.LASER OPTICAL SYSTEM 8.7 ALIGNMENT OF THE GUIDE LASER Make an adjustment so that the center of the CO2 laser beam is aligned with the center of the guide laser beam. (1) Attach an acrylic plate at about 3 to 10 m away from the beam outlet of the laser oscillator, and collect the burn
  • Page 2429.LASER SOFTWARE FUNCTION B-70265EN/02 9 LASER SOFTWARE FUNCTION - 222 -
  • Page 243B-70265EN/02 9.LASER SOFTWARE FUNCTION 9.1 MAINTENANCE SCREEN 9.1.1 Overview The maintenance screen displays maintenance information for preventive maintenance and troubleshooting of the laser oscillator. (1) Compensation coefficient history display The compensation coefficient for power compensatio
  • Page 2449.LASER SOFTWARE FUNCTION B-70265EN/02 9.1.3 Display Information 9.1.3.1 Compensation coefficient history display When the power compensation coefficient setting function is operated, a power compensation coefficient and the current RFV1 value and date/time are preserved. Up to 30 items of data can
  • Page 245B-70265EN/02 9.LASER SOFTWARE FUNCTION • Methods of entering a set time and resetting an operation time In this normal state, this screen prohibits the entry of data so that data such as operation times is not deleted by mistake. To enter data, first set bit 1 of parameter No. 15610 (MDS) to 1. To e
  • Page 2469.LASER SOFTWARE FUNCTION B-70265EN/02 • Output conditions (output, frequency, duty cycle) • Actual output • Power compensation coefficient • Power supply data (RFV, RFI, DCV, DCI, DCW) (2) Data preserved when an alarm is issued • Alarm issue date • Alarm issue time • Issued alarm number • Sequence
  • Page 247B-70265EN/02 9.LASER SOFTWARE FUNCTION 9.2 AUTOMATIC AGING 9.2.1 Overview The automatic aging function automatically performs aging (warmed- up gas operation) according to the halt period of the laser oscillator. The date and time (year/month/day/time) when the oscillator was previously stopped is r
  • Page 2489.LASER SOFTWARE FUNCTION B-70265EN/02 (4) Aging operation is performed as many times as the number of aging operations set in parameter No. 15334. In aging, warmed-up gas operation (internal discharge) is performed at low gas pressure and low power. (5) The oscillator is started up at low pressure,
  • Page 249B-70265EN/02 9.LASER SOFTWARE FUNCTION 9.3 AUTOMATIC LEAKAGE CHECK 9.3.1 Overview In order to check the vacuum system for a leakage, all valves are closed automatically and the intra-tube pressure is measured at intervals of a certain time period. Measured data is preserved. From data recorded on th
  • Page 2509.LASER SOFTWARE FUNCTION B-70265EN/02 BPV : Bypass valve VEN : Exhaust valve TWV : Three-way valve PCV : Gas pressure control valve (3) When all valves are closed, the pressure in the discharge tube (DGN905) is sampled, and sampled data is preserved as diagnosis information in DGN954 through DGN957
  • Page 251B-70265EN/02 9.LASER SOFTWARE FUNCTION 9.4 POWER FEEDBACK FUNCTION BASED ON THE ACTUAL OUTPUT ESTIMATION METHOD 9.4.1 Overview Based on specified output conditions, this function estimates an actual output by using the data table in which the relationships between the specified output conditions and
  • Page 2529.LASER SOFTWARE FUNCTION B-70265EN/02 (2) Press the operation key "Setting" of the CNC. Then, press the soft keys displayed at the bottom of the CNC screen as shown below. POWER SET DATA STATUS MAINT. PW.OFS ACT.TM ALARM PWR FB PWS TC Data table for actual output estimation 9.4.2.2 Data table struc
  • Page 253B-70265EN/02 9.LASER SOFTWARE FUNCTION 9.4.3 Compensation for Power Sensor Response Speed To improve the response delay of the power sensor, the monitored value of the power sensor to be returned in response to an output command value is estimated, and feedback control is exercised according to the
  • Page 2549.LASER SOFTWARE FUNCTION B-70265EN/02 (2) Press the operation key "Setting" of the CNC. Then, press the soft keys displayed at the bottom of the CNC screen as shown below. POWER SET DATA STATUS MAINTE. PW.OFS ACT.TM ALARM PWR FB PWS TC Time constant measurement screen (3) Start a measurement by pre
  • Page 255B-70265EN/02 9.LASER SOFTWARE FUNCTION 9.4.4 Bell-shaped Filter for Power Feedback Gain To suppress output command value variation due to power feedback at the time of output command value switching, a bell-shaped filter can be applied to the power feedback gain. (1) Filter setting method Set PRM No
  • Page 2569.LASER SOFTWARE FUNCTION B-70265EN/02 9.5 TRIGGER PULSE COMMAND CONTROL FUNCTION 9.5.1 Overview To simultaneously turn on all discharge tubes when a beam output command is issued to the laser oscillator, this function increases the command value by a certain value for a certain time on the rising e
  • Page 257APPENDI
  • Page 258
  • Page 259B-70265EN/02 APPENDIX A.EXTERNAL VIEW OF LASER OSCILLATOR A EXTERNAL VIEW OF LASER OSCILLATOR Fig. A(a) External view of laser oscillator (C1000-E) - 239 -
  • Page 260A.EXTERNAL VIEW OF LASER OSCILLATOR APPENDIX B-70265EN/02 Fig.A(b) External view of laser oscillator (C2000-E : short optical path length type) Fig.A(c) External view of laser oscillator (C2000-E : long optical path length type) - 240 -
  • Page 261B-70265EN/02 APPENDIX A.EXTERNAL VIEW OF LASER OSCILLATOR Fig.A(d) External view of laser oscillator (C4000-E : short optical path length type) Fig.A(e) External view of laser oscillator (C4000-E : long optical path length type) - 241 -
  • Page 262A.EXTERNAL VIEW OF LASER OSCILLATOR APPENDIX B-70265EN/02 Fig. A(f) External view of laser oscillator (C5000-E) Fig. A(g) External view of laser oscillator (C6000-E) - 242 -
  • Page 263B-70265EN/02 APPENDIX B.SPECIFICATIONS B SPECIFICATIONS - 243 -
  • Page 264B.SPECIFICATIONS APPENDIX B-70265EN/02 C2000-E C2000-E C4000-E C4000-E Item C1000-E (short optical (long optical (short optical (long optical path length) path length) path length) path length) Type C1000-E C2000-E C4000-E Method High-speed axial CO2 laser by high-frequency discharge excitation Comb
  • Page 265B-70265EN/02 APPENDIX B.SPECIFICATIONS C2000-E C2000-E C4000-E C4000-E Item C1000-E (short optical (long optical (short optical (long optical path length) path length) path length) path length) Item C5000-E C6000-E Type C5000-E C6000-E Method High-speed axial CO2 laser by high-frequency discharge ex
  • Page 266C.ERROR CODE LIST APPENDIX B-70265EN/02 C Number ERROR CODE LIST Message Alarm handling level 4061 A/D CONVERTER–1 Up to a purge 4062 A/D CONVERTER–2 Up to a purge 4063 RF POWER SUPPLY / LASER GAS Up to LRDY 4065 SHUTTER ACTION Up to LRDY 4066 DISCHARGING Up to LRDY 4067 LASER CABINET OH Up to a pur
  • Page 267B-70265EN/02 APPENDIX C.ERROR CODE LIST PURGE : Completion state RESET ALARM? MONITOR RUN ON LRDY : Discharge ready state ALARM MONITOR RESET ALARM? 1 HV ON= ALARM MONITOR ON MONITOR 2 LSTR : Discharge ready /TREAT Alarm treatment of FANUC LASER C1000/C2000/C4000/C5000/C6000-MODEL E - 247 -
  • Page 268D.DIAGNOSIS SCREEN INFORMATION APPENDIX B-70265EN/02 D DIAGNOSIS SCREEN INFORMATION If a fault occurs, it is necessary to determine in which of the CNC, machine, and laser oscillator the fault occurred. In cases other than faults in which the machine seems to be faulty because it does not operate du
  • Page 269B-70265EN/02 APPENDIX D.DIAGNOSIS SCREEN INFORMATION D.1 INFORMATION DISPLAYED ON THE DIAGNOSIS SCREEN With the diagnosis function, the information below can be displayed. [CNC← ←PMC status display] #7 #6 #5 #4 #3 #2 #1 #0 G220 *DU16 *DU8 *DU4 *DU2 *DU1 *DU1 to *DU16 Duty override signals #7 #6 #5 #
  • Page 270D.DIAGNOSIS SCREEN INFORMATION APPENDIX B-70265EN/02 [CNC→→PMC status display] #7 #6 #5 #4 #3 #2 #1 #0 F220 MWRM SHTONL SHTOFL MWRM Output decrease alarm signal SHTONL Shutter on state signal SHTOFL Shutter off state signal #7 #6 #5 #4 #3 #2 #1 #0 F221 BEAM LSTR RFHV CLON WAIT PURGE LRDY LARM BEAM B
  • Page 271B-70265EN/02 APPENDIX D.DIAGNOSIS SCREEN INFORMATION D.2 LASER OSCILLATOR STATUS DISPLAY 900 LASER POWER COMMAND Displays a value specified in a laser output power command and sent to the D/A converter. 901 LASER BIAS COMMAND Displays a value specified in a base discharge command and sent to the D/A
  • Page 272D.DIAGNOSIS SCREEN INFORMATION APPENDIX B-70265EN/02 908 LASER SEQUENCE No. Contents No. Contents Wait for change to discharge 10 Purge completion state 23 start gas pressure 12 Purge being executed 26 Start of discharge in progress 14 75-s wait 27 Base discharge set waiting state Power compensation
  • Page 273B-70265EN/02 APPENDIX D.DIAGNOSIS SCREEN INFORMATION 925 DC VOLTAGE 1 926 DC CURRENT 1 927 DC VOLTAGE 2 928 DC CURRENT 2 929 DC VOLTAGE 3 930 DC CURRENT 3 931 DC VOLTAGE 4 932 DC CURRENT 4 933 DC VOLTAGE 5 934 DC CURRENT 5 935 DC VOLTAGE 6 936 DC CURRENT 6 937 DC VOLTAGE 7 938 DC CURRENT 7 939 DC VO
  • Page 274D.DIAGNOSIS SCREEN INFORMATION APPENDIX B-70265EN/02 955 LCKMD INT. PRES. 2 Pressure at the time 1/3 of the leakage judgment time has elapsed Display range: 0 to 900 956 LCKMD INT. PRES. 3 Pressure at the time 2/3 of the leakage judgment time has elapsed Display range: 0 to 900 957 LCKMD INT. PRES.
  • Page 275B-70265EN/02 APPENDIX D.DIAGNOSIS SCREEN INFORMATION #7 #6 #5 #4 #3 #2 #1 #0 961 *ABT *SHT SOF SON *RAL *WT1 *CAT *MVW *MVW Cooling water amount 0 : Abnormal 1 : Normal *CAT Chamber temperature 0 : Abnormal 1 : Normal *WT1 Condensation 0 : Abnormal 1 : Normal *RAL Exhaust pump alarm 0 : Abnormal 1 :
  • Page 276D.DIAGNOSIS SCREEN INFORMATION APPENDIX B-70265EN/02 GAS Laser gas type 0: CO2:He:N2=5:40:55 If the setting of the setting pin PRG of the IF PCB is "X1" 1: CO2:He:N2=5:60:35 or 5:70:25 If the setting of the setting pin PRG of the IF PCB is "X5" #7 #6 #5 #4 #3 #2 #1 #0 966 *PSA08 *PSA07 *PSA06 *PSA05
  • Page 277B-70265EN/02 APPENDIX D.DIAGNOSIS SCREEN INFORMATION VEN Air release valve 0 : Closed 1 : Open GRY Laser gas supply valve 0 : Closed 1 : Open PTL Flashing light 0 : Off 1 : On BPV Bypass valve 0 : Closed 1 : Open TWV Three-way valve 0 : Air release 1 : Open #7 #6 #5 #4 #3 #2 #1 #0 973 LSC OPV FW IB
  • Page 278D.DIAGNOSIS SCREEN INFORMATION APPENDIX B-70265EN/02 980 GAS PRES. SENSOR ALM 981 A/D CONV-1 ALM 982 A/D CONV-2 ALM 983 VOLTAGE DOWN 984 POWER DOWN 985 BEAM REFLECTION 986 LASER EFFICIENCY 987 GAS BOTTLE CHANGE 111 : Cylinder replacement request 0 : Cylinder replaced 988 MIXING ABNORMAL 111 : Abnorm
  • Page 279B-70265EN/02 APPENDIX E.PARAMTER LIST E PARAMTER LIST This appendix describes the parameters for the Series 16i-L. - 259 -
  • Page 280E.PARAMTER LIST APPENDIX B-70265EN/02 E.1 PARAMETERS FOR ENABLING/DISABLING VARIOUS FUNCTIONS #7 #6 #5 #4 #3 #2 #1 #0 15000 FLT CLB BMO AGA LGC LPC [Data type] Bit LPC Power control function 0: Invalid (standard) 1: Valid LGC Two stage gain selection of intra-tube pressure control 0: Invalid 1: Vali
  • Page 281B-70265EN/02 APPENDIX E.PARAMTER LIST LHC 0: Does not control the oscillator with external signals (standard). 1: Controls the oscillator with external signals. In the automatic operation mode, external signals are used to turn on and off the shutter and beam output. #7 #6 #5 #4 #3 #2 #1 #0 15002 PS
  • Page 282E.PARAMTER LIST APPENDIX B-70265EN/02 C60 The number of discharge tubes is: 0: Based on the ordinary specification. 1: 16. #7 #6 #5 #4 #3 #2 #1 #0 15004 CWY ECH EDG SPB STC AGC [Data type] Bit AGC 0: Uses the "G32 P_;" command (when Q, T, and R are not specified) as the flow pattern command. 1: Uses
  • Page 283B-70265EN/02 APPENDIX E.PARAMTER LIST ITR 0: Disables the tracing control interlock signal (G227#6 *TRIL). 1: Enables the tracing control interlock signal (G227#6 *TRIL). DLY 0: Disables the beam output condition delay function. 1: Enables the beam output condition delay function. #7 #6 #5 #4 #3 #2
  • Page 284E.PARAMTER LIST APPENDIX B-70265EN/02 STO 0: Does not execute the after-flow and pre-flow when the assist gas command is issued with the same type and same flow pattern. 1: Executes the after-flow and pre-flow when the assist gas command is issued with the same type and same flow pattern. #7 #6 #5 #
  • Page 285B-70265EN/02 APPENDIX E.PARAMTER LIST #7 #6 #5 #4 #3 #2 #1 #0 15009 TEM BCG BEM AFZ BS2 BS1 AS2 AS1 [Data type] Bit AS1, AS2, BS1, BS2 Parameters for the laser gas mixing function. This function stores and monitors the operating status of the mixer. These parameters need not be set manually because
  • Page 286E.PARAMTER LIST APPENDIX B-70265EN/02 #7 #6 #5 #4 #3 #2 #1 #0 15011 OPV ST2 CSC LVE EDS [Data type] Bit EDS 0: Uses the conventional conditions as the cutting conditions during execution of edge machining or start-up processing for a return. 1: Uses the piercing operating conditions in edge machinin
  • Page 287B-70265EN/02 APPENDIX E.PARAMTER LIST #7 #6 #5 #4 #3 #2 #1 #0 15013 ZCM IVA [Data type] Bit IVA Evacuation is performed: 0: Only when RUN is turned off after the LSTR state is set (conventional). 1: At all times when RUN is turned off. ZCM If a command is issued to a trace axis during automatic oper
  • Page 288E.PARAMTER LIST APPENDIX B-70265EN/02 E.2 DISCHARGE TUBE SELECTION #7 #6 #5 #4 #3 #2 #1 #0 15025 PS8 PS7 PS6 PS5 PS4 PS3 PS2 PS1 #7 #6 #5 #4 #3 #2 #1 #0 15026 PS16 PS15 PS14 PS13 PS12 PS11 PS10 PS9 [Data type] Bit PS1 to PS16 Power supply selection when half of the discharge tubes are used Set the b
  • Page 289B-70265EN/02 APPENDIX E.PARAMTER LIST E.3 PARAMETERS FOR CONTOURING CONDITIONS 15040 Power output setting [Data type] Word [Unit of data] W [Valid data range] 0 to 7000 15041 Pulse frequency setting [Data type] Word [Unit of data] Hz [Valid data range] 5 to 2000 15042 Pulse duty ratio setting [Data
  • Page 290E.PARAMTER LIST APPENDIX B-70265EN/02 E.4 PARAMETERS FOR EDGE MACHINING CONDITIONS 15050 Edge detection angle [Data type] Word [Unit of data] deg [Valid data range] 0 to 180 A corner is assumed to be present when the angle formed by two blocks is smaller than the specified angle. 15051 Peak piercing
  • Page 291B-70265EN/02 APPENDIX E.PARAMTER LIST 15056 Type of piercing assist gas [Data type] Word [Unit of data] [Valid data range] 0 to 7 Set a type of assist gas to be used for piercing. 15057 Return distance [Data type] 2-word [Unit of data] Increment system IS-A IS-B IS-C Unit Metric input 0.01 0.001 0.0
  • Page 292E.PARAMTER LIST APPENDIX B-70265EN/02 15062 Reference displacement during edge machining operation [Data type] Word [Unit of data] 0.001mm [Valid data range] Parameters No.15531 to No.15532 Set a return duty cycle to be applied when machining proceeds from a corner summit to the next block. - 272 -
  • Page 293B-70265EN/02 APPENDIX E.PARAMTER LIST E.5 PARAMETERS FOR PIERCING CONDITIONS 15070 Piercing power [Data type] Word [Unit of data] W [Valid data range] 0 to 7000 Set the piercing power. 15071 Piercing frequency [Data type] Word [Unit of data] Hz [Valid data range] 5 to 2000 Set the piercing frequency
  • Page 294E.PARAMTER LIST APPENDIX B-70265EN/02 E.6 PARAMETERS FOR HIGH-SPEED PIERCING CONDITIONS 15080 High-speed piercing power [Data type] Word [Unit of data] W [Valid data range] 0 to 7000 Set the high-speed piercing power. 15081 Initial high-speed piercing frequency [Data type] Word [Unit of data] Hz [Va
  • Page 295B-70265EN/02 APPENDIX E.PARAMTER LIST 15086 Number of high-speed piercing steps [Data type] Word [Unit of data] [Valid data range] 0 to 32767 Set the number of high-speed piercing steps 15087 High-speed piercing end time [Data type] 2-word [Unit of data] msec [Valid data range] 0 to 99999999 Set the
  • Page 296E.PARAMTER LIST APPENDIX B-70265EN/02 E.7 PARAMETERS FOR POWER CONTROL #7 #6 #5 #4 #3 #2 #1 #0 15088 IPC [Data type] Bit (Power-off) IPC The power control mode is: 0: Specified by using the format where S and F are specified in the same block. 1: Specified with G63 or by using the format where the e
  • Page 297B-70265EN/02 APPENDIX E.PARAMTER LIST 15093 Power control constant [Data type] Word [Unit of data] % [Valid data range] 0 to 100 Set the power control constant. 15094 Power control filter time constant [Data type] Word [Unit of data] msec [Valid data range] 0 to 32767 Set the power control filter ti
  • Page 298E.PARAMTER LIST APPENDIX B-70265EN/02 FOV If the feedrate override is changed in the power control mode: 0: The new override after the change is used as the reference feedrate for power control. 1: The reference feedrate for power control remains unchanged. SDB Specifies how to specify an allowable
  • Page 299B-70265EN/02 APPENDIX E.PARAMTER LIST E.8 PARAMETERS FOR ASSIST GAS PRESSURE AND TIME SETTING 15100 Selection of assist gas [Data type] Word [Unit of data] [Valid data range] 0 to 7 Select a type of assist gas. 15101 Selection of flow pattern [Data type] Word [Unit of data] [Valid data range] 1 to 3
  • Page 300E.PARAMTER LIST APPENDIX B-70265EN/02 15120 Processing flow pressure 1 15121 Processing flow pressure 2 15122 Processing flow pressure 3 [Data type] Word [Unit of data] 0.01MPa or 0.1 kg/cm2 [Valid data range] 0 to 255 Set the assist gas processing flow pressure. 15126 After flow pressure 1 15127 Af
  • Page 301B-70265EN/02 APPENDIX E.PARAMTER LIST 15138 Assist gas pressure for piercing [Data type] Word [Unit of data] 0.01MPa or 0.1 kg/cm2 [Valid data range] 0 to 255 Set a desired assist gas pressure for piercing. 15139 Assist gas stop time [Data type] Word [Unit of data] 10msec [Valid data range] 0 to 327
  • Page 302E.PARAMTER LIST APPENDIX B-70265EN/02 E.9 PARAMETERS FOR LASER MAINTENANCE TIMING INDICATION FUNCTIONS 15150 Laser RUN ON time [Data type] 2-word [Unit of data] 0.1 hour [Valid data range] 0 to 99999999 A cumulative RUN ON time is automatically set. 15151 Exhaust pump operation time [Data type] 2-wo
  • Page 303B-70265EN/02 APPENDIX E.PARAMTER LIST #7 #6 #5 #4 #3 #2 #1 #0 15160 MDS MNT [Data type] Bit MNT 0: Does not display the laser maintenance screen. 1: Displays the laser maintenance screen. When the value indicating that the laser maintenance screen is not displayed is specified, the compensation fact
  • Page 304E.PARAMTER LIST APPENDIX B-70265EN/02 E.10 PARAMETERS FOR THE OSCILLATOR Power used for power compensation factor determination when half of the 15200 discharge tubes are used [Data type] Word [Unit of data] W [Valid data range] 0 to 32767 Set a power to find the power compensation factor when half
  • Page 305B-70265EN/02 APPENDIX E.PARAMTER LIST 15206 Time constant for the power sensor input filter [Data type] Word [Unit of data] msec [Valid data range] 8 to 32767 This time constant is used when the laser power monitor value input from the power sensor is multiplied by the primary delay filter. 15207 Ma
  • Page 306E.PARAMTER LIST APPENDIX B-70265EN/02 15212 Maximum specifiable power when the duty ratio is not clamped [Data type] Word [Unit of data] W [Valid data range] 0 to 32767 If PRM No. 15213 does not clamp the duty ratio to 50%, and a specified power after power compensation and power feedback processing
  • Page 307B-70265EN/02 APPENDIX E.PARAMTER LIST 15217 Beam stop delay time [Data type] Word [Unit of data] msec [Valid data range] 0 to 32767 Set the time between the in-position check and stop of the beam. 15219 Beam output condition delay time [Data type] Byte [Unit of data] 8msec [Valid data range] 0 to 8
  • Page 308E.PARAMTER LIST APPENDIX B-70265EN/02 E.11 PARAMETERS FOR DISCHARGE 15220 Discharge start command value [Data type] Word [Unit of data] mV [Valid data range] 0 to 32767 Set a command value to start discharge. 15221 Discharge start decision voltage [Data type] Word [Unit of data] V [Valid data range]
  • Page 309B-70265EN/02 APPENDIX E.PARAMTER LIST 15231 Power feedback mask time in the case of power command variation [Data type] Word [Unit of data] msec [Valid data range] 0 to 65535 If a power command value variation is detected, power feedback control is stopped for the time set in this parameter. 15232 M
  • Page 310E.PARAMTER LIST APPENDIX B-70265EN/02 E.12 PARAMETERS FOR GAS CONTROL (1) 15240 Negative pressure in exhaust completion [Data type] Word [Unit of data] (1=13Pa) [Valid data range] 0 to 32767 This pressure is used for evacuating the discharge tubes in laser start- up sequence. 15241 Intra-tube pressu
  • Page 311B-70265EN/02 APPENDIX E.PARAMTER LIST 15246 Pressure control integration gain [Data type] Word [Unit of data] [Valid data range] 0 to 32767 This is feedback integration gain for gas pressure control. 15247 Pressure control integral element preset value [Data type] Word [Unit of data] [Valid data ran
  • Page 312E.PARAMTER LIST APPENDIX B-70265EN/02 15256 RUN OFF evacuation time [Data type] Word [Unit of data] sec [Valid data range] 600 to 32767 When bit 2 of parameter No. 15003 (GVW) is set 1 and the oscillator start signal (G222#6 RUN) is set to "0," evacuation is performed according to this time setting.
  • Page 313B-70265EN/02 APPENDIX E.PARAMTER LIST E.13 PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL ALARMS 15265 Maximum allowable power increase [Data type] Word [Unit of data] W [Valid data range] 0 to 32767 If the difference between the specified power and actual output power is greater than this value, beam re
  • Page 314E.PARAMTER LIST APPENDIX B-70265EN/02 E.14 PARAMETERS FOR LASER POWER / VOLTAGE DROP 15270 Discharge tube voltage in normal operation [Data type] Word [Unit of data] V [Valid data range] 0 to 32767 Set the discharge tube voltage during normal base discharge. This parameter is automatically rewritten
  • Page 315B-70265EN/02 APPENDIX E.PARAMTER LIST E.15 PARAMETERS FOR POWER TABLE SETTING 15280 Table interval when half of the discharge tubes are used 15281 Table interval when all discharge tubes are used [Data type] Word [Unit of data] [Valid data range] 0 to 32767 [Standard setting value] Refer to the para
  • Page 316E.PARAMTER LIST APPENDIX B-70265EN/02 15300 Power command 0 when all discharge tubes are used 15301 Power command 1 when all discharge tubes are used 15302 Power command 2 when all discharge tubes are used 15303 Power command 3 when all discharge tubes are used 15304 Power command 4 when all dischar
  • Page 317B-70265EN/02 APPENDIX E.PARAMTER LIST E.16 AUTOMATIC AGING FUNCTION 15320 Command power for power compensation coefficient calculation [Data type] Word [Unit of data] W [Valid data range] 0 to 7000 15321 Oscillation frequency command for power compensation coefficient [Data type] Word [Unit of data]
  • Page 318E.PARAMTER LIST APPENDIX B-70265EN/02 15328 Pulse duty cycle command for aging [Data type] Word [Unit of data] % [Valid data range] 0 to 100 15329 Power command time for aging [Data type] Word [Unit of data] sec [Valid data range] 0 to 32767 15330 Gas pressure setting (50 Hz) for aging [Data type] W
  • Page 319B-70265EN/02 APPENDIX E.PARAMTER LIST 15336 Time data 2 when the HV is turned off after LSTR [Data type] 2-word [Unit of data] Month [Valid data range] 1 to 12 (0 to 99999999) (Automatically set by the CNC) 15337 Time data 3 when the HV is turned off after LSTR [Data type] 2-word [Unit of data] Day
  • Page 320E.PARAMTER LIST APPENDIX B-70265EN/02 E.17 POWER CONTROL (2) 15450 Allowable variation in power control speed [Data type] Word [Unit of data] mm/min [Valid data range] 0 to 32767 [Standard setting value] 4 Set the amount by which the power control speed is allowed to vary. When this parameter is set
  • Page 321B-70265EN/02 APPENDIX E.PARAMTER LIST E.18 LASER GAS MIXER FUNCTION 15710 Wait time for checking the remaining amount in the gas cylinder [Data type] Word [Unit of data] sec [Valid data range] 0 to 32767 [Standard setting value] Wait time when the remaining amount in the gas cylinder is checked 1571
  • Page 322E.PARAMTER LIST APPENDIX B-70265EN/02 15715 Vacuum criteria gas pressure [Data type] Word [Unit of data] (1=13Pa) [Valid data range] 0 to 32767 [Standard setting value] This value is used for determining the degree of vacuum of the laser gas pressure in the gas mixer. If the laser gas pressure does
  • Page 323B-70265EN/02 APPENDIX E.PARAMTER LIST E.19 PARAMETERS FOR GAS PRESSURE CONTROL (2) #7 #6 #5 #4 #3 #2 #1 #0 15800 TPC [Data type] Bit TPC The control function of driving the turbo blower with a constant power 0: Invalid 1: Valid Maximum internal pressure when the control function of driving the turbo
  • Page 324E.PARAMTER LIST APPENDIX B-70265EN/02 E.20 POWER FEEDBACK BASED ON THE ACTUAL OUTPUT ESTIMATION METHOD #7 #6 #5 #4 #3 #2 #1 #0 29000 PTC PTB PFB [Data type] Bit PFB Power feedback control based on the actual output estimation method is: 0: Disabled. 1: Enabled. PTB On the data table screen for actua
  • Page 325B-70265EN/02 APPENDIX E.PARAMTER LIST 29003 Peak power in power sensor time constant measurement [Data type] Word [Unit of data] W [Valid data range] 0 to 32767 [Standard setting value] Set a peak power in measurement of the time constant of the power sensor. Usually, set the rated output of the osc
  • Page 326F.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70265EN/02 F CONTROL SEQUENCES IN LASER OSCILLATOR - 306 -
  • Page 327B-70265EN/02 APPENDIX F.CONTROL SEQUENCES IN LASER OSCILLATOR F.1 OUTLINE OF LASER OSCILLATION SEQUENCES SEQ 0 PURGE = 0 POWER OFF state LRDY = 0 PTLP = 0 LSTR = 0 CNC POWER = ON CNC POWER = OFF SEQ 10 PURGE = 1 LRDY = 0 INITIAL PTLP = 0 LSTR = 0 (WAIT=1) (START KEY) (START KEY) RUN = ON RUN = OFF S
  • Page 328F.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70265EN/02 [SQ20] READY OF DISCHARGING state When oscillator start switch is turned on, evacuation is carried on and then gas pressure control begins. When the gas pressure reaches the set pressure, the discharge preparation completion state (LRDY)
  • Page 329B-70265EN/02 APPENDIX F.CONTROL SEQUENCES IN LASER OSCILLATOR F.2 INTRA-TUBE GAS PRESSURE CONTROL SEQUENCES Gas pressure control is exercised as shown below. GAS PRESSURE : COMMAND : REAL PRM15249 PRM15242 15243 ±2torr PRM15241 PRM15240 PRM15250 PRM15205 PRM15256 70sec SQ16 SQ26 SQ17 SQ18 SQ20 SQ27
  • Page 330F.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70265EN/02 [SQ16, 17, 18] Setting the laser start switch to ON starts evacuation, which continues until the pressure designated by PRM No. 15240 is reached. After evacuation up to the value set in PRM No. 15240, gas pressure control starts. Then, th
  • Page 331B-70265EN/02 APPENDIX F.CONTROL SEQUENCES IN LASER OSCILLATOR F.3 TUBE VOLTAGE CONTROL SEQUENCES The control of tube voltage is done simultaneously with that of gas pressure as shown in Fig. E.3 in the following sequences. GAS PRESSURE PRM15242, 15243 PRM15241 SQ20 SQ26 SQ27 SQ28 SQ30 H.V.ON LSTR LS
  • Page 332F.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70265EN/02 [SQ291] When the discharge start switch (HVON) is turned on, a high voltage is applied to the discharge tube, and voltage control is started. The command induces discharge by changing the command value in a ramp manner to the value set in
  • Page 333B-70265EN/02 APPENDIXG.INSTALLING GAS FITTINGS AND WATER FITTINGS G INSTALLING GAS FITTINGS AND WATER FITTINGS - 313 -
  • Page 334G.INSTALLING GAS FITTINGS AND WATER FITTINGSAPPENDIX B-70265EN/02 G.1 GAS FITTINGS G.1.1 Tightening a Fittings (1) Cut the end face of the tube at right angles, then install a box nut, back ferrule, and front ferrule on the tube as shown below. At this time, pay attention to their directions. (2) In
  • Page 335B-70265EN/02 APPENDIXG.INSTALLING GAS FITTINGS AND WATER FITTINGS G.2 WATER FITTINGS G.2.1 Tightening a Fittings (1) Cut the end face of the tube at right angles, then install a box nut and sleeve on the tube as shown below. At this time, pay attention to their directions. (2) Insert the tube throug
  • Page 336G.INSTALLING GAS FITTINGS AND WATER FITTINGSAPPENDIX B-70265EN/02 G.3 FITTINGS AND TUBE ORDERING INFORMATION The ordering information of the fittings, ferrules, sleeve, and box nut is provided below. (A sleeve and box nut are delivered together with a fittings.) Gas fittings Tube Screw Ordering info
  • Page 337B-70265EN/02 APPENDIXG.INSTALLING GAS FITTINGS AND WATER FITTINGS Water fittings (Material: Brass) Tube Screw Ordering information diameter section Nipple 6mm 1/8” A97L-0200-0651#N-06A-B 1/4” A97L-0200-0651#N-06B-B 8mm 1/4” A97L-0200-0651#N-08B-B 3/8” A97L-0200-0651#N-08C-B 10mm 1/4” A97L-0200-0651#
  • Page 338H.EXTERNAL GAS LEAKAGE RECORDING TABLE APPENDIX B-70265EN/02 H EXTERNAL GAS LEAKAGE RECORDING TABLE - 318 -
  • Page 339B-70265EN/02 APPENDIX H.EXTERNAL GAS LEAKAGE RECORDING TABLE External Gas Leakage Recording Table Date: / / Customer Name Customer Staff in Charge Record necessary data according to the procedure below. Secondary Primary pressure gage pressure gage (D) (C) Main cylinder valve (B) To laser oscillator
  • Page 340H.EXTERNAL GAS LEAKAGE RECORDING TABLE APPENDIX B-70265EN/02 Decision Whether there is a leakage can be determined from the results of measurement as described below. If you send your recording table via FAX to the FANUC service center, the service center will check if there is a leakage. (1) Leakag
  • Page 341B-70265EN/02 APPENDIX I.GLOSSARY I Name GLOSSARY Meaning Part of the protective housing or enclosure that, when removed or moved, will permit Access panel exposure to laser radiation or collateral radiation beyond an allowable value. AEL : Accessible Maximum accessible emission level set up for each
  • Page 342I.GLOSSARY APPENDIX B-70265EN/02 Name Meaning Maximum radiation power or maximum radiation energy per pulse that a laser product Maximum output outputs in all directions where there is a hazard of exposure in view of operational capacity in every area at any point of time after the production of the
  • Page 343B-70265EN/02 INDEX INDEX Checking the jumper pins................................................44 Checking the Parameters ...............................................144 Adjusting the exhaust unit Checking the power supply .............................................42 (adjusting the laser
  • Page 344INDEX B-70265EN/02 Excessive Laser Gas Consumption..................................98 Laser gas specification ....................................................33 EXHAUST CONTROL UNIT (C2000-E, C4000-E)....169 LASER OPTICAL PARTS ...........................................191 EXHAUST PUMP .......
  • Page 345B-70265EN/02 INDEX PARAMETERS FOR EDGE MACHINING CONDITIONS ..............................................................270 Reinstalling a Fittings............................................314, 315 PARAMETERS FOR ENABLING/DISABLING Removing Cooling Water......................................
  • Page 346INDEX B-70265EN/02 TROUBLESHOOTING PROCEDURE..........................71 TUBE VOLTAGE CONTROL SEQUENCES .............311 TURBO BLOWER........................................................141 Turbo Blower Oil ............................................................60 UNIT CONFIGURATION.....
  • Page 347Revision Record FANUC LASER C1000/C2000/C4000/C5000/C6000-MODEL E MAINTENANCE MANUAL (B-70265EN) 02 Mar., 2004 - Addition of LASER C5000-E and C6000-E 01 Feb., 2001 Edition Date Contents Edition Date Contents
  • Page 348
  • Page 349Revision of the Maintenance Manual Type of applied technical documents FANUC LASER C1000/C2000/C4000/C5000/C6000-MODEL E Name MAINTENANCE MANUAL Spec.No./Ed. B-70265EN/02 Summary of Change New, Add, Applicable Group Name/Outline Correct, Date Delete Basic Function Optional Function Unit Maintenance
  • Page 3503.Outline We changed the specification of following parts for the reliability improving. We report the new specification of this parts described in the maintenance part list (from Page 62 in section 4.4) of maintenance manual (B-70265JA/02). A new specification is compatible for an old specification
  • Page 351TECHNICAL REPORT ＮＯ．ＴＭL06／001 Date. Jan. 16, 2006 General Manager of Laser Laboratory Correction of the maintenace manual of FANUC LASER C series-MODEL E 1. Communicate this report to: ○ Your information only ○ GE Fanuc-A, GE Fanuc-E FANUC Robotics MILACRON ○ Machine tool builder Sales agency End us
  • Page 352Revision of the Maintenance Manual 1.Type of applied technical documents FANUC LASER C1000/C2000/C4000/C5000/C6000-MODEL E Name MAINTENANCE MANUAL Spec.No./Ed. B-70265EN/02 2.Summary of Change New, Add Applicable Group Name/Outline Correct, Del Date Basic Function Optional Function Unit Maintenance
  • Page 353In FANUC LASER C Series maintenance manual B-70265EN/02, C5000-E's maximum power supply output of Table 7.2.2(settings for power supply adjustments) is corrected on page 136. Table 7.2.2 Settings for power supply adjustments C5000-E Maximum power supply output True :8500±50Ｗ DCI×DCV＝ False:8700±50Ｗ