8.LASER OPTICAL SYSTEM B-70265EN/02
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8.2 CLEANING AND REPLACING THE OPTICAL PARTS
The output coupler, rear mirror, and folding mirrors of the laser
oscillator must be cleaned or replaced periodically. Similarly, if the
laser output or beam mode becomes abnormal, the optical parts must
be cleaned or replaced. When the optical parts are cleaned or replaced,
the vacuum system is open to the atmosphere. So, ensure that dust
does not enter the vacuum system.
Clean the mirrors according to the following procedure:
Clean the output coupler
(See Subsection 8.2.1.)
Clean the rear mirror
(See Subsection 8.2.1.)
Clean two or three folding mirrors
(See Subsection 8.2.2.)
Clean two folding mirrors
(See Subsection 8.2.2.)
C1000-E, C2000-E
C6000-E
C4000-E, C5000-E
Leakage check (See Subsection 3.3.5.),
discharge aging (See Subsection 3.3.6.),
alignment (See Subsection 8.3.3.)
Leakage check (See Subsection 3.3.5.),
discharge aging (See Subsection 3.3.6.),
alignment (See Subsection 8.3.3.)
Leakage check (See Subsection 3.3.5.),
discharge aging (See Subsection 3.3.6.),
alignment (See Subsection 8.3.3.)
Clean two folding mirrors
(See Subsection 8.2.2.)
Leakage check (See Subsection 3.3.5.),
discharge aging (See Subsection 3.3.6.),
alignment (See Subsection 8.3.3.)
NOTE
All folding mirrors need not be cleaned each time.
Clean two or three folding mirrors at a time.