B-70315EN/02 3.INSTALLATION
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3.3.5 Locating Internal Leakage
When gas leakage is present inside the oscillator, use a helium leakage
detector or liquid leakage checker to locate the leakage.
CAUTION
Because the turbo blower is not designed to
withstand pressure increase, do not increase
pressure beyond 0.08 MPa. Applying a high
pressure may damage the connector, oil gage, and
so on. To prevent the connector from being
damaged, apply pressure with the cable left
attached to the turbo blower.
(1) Turn on the power to the oscillator, then open the valve of the
gas cylinder.
(2) Set the secondary pressure of the regulator of the laser gas
cylinder to 0.05 MPa.
(3) To make the pressure in the oscillator higher than the
atmospheric pressure, set the atmospheric pressure sensor
(PWS2) to 0.02MPa. (See Section 7.10.)
(4) Turn on the oscillator start switch, wait for 2 to 3 seconds, then
turn off the switch, and wait till purging.
(5) Apply the helium leakage detector to a possibly faulty position.
If there is a leakage, the checker indicates it by display or sound.
When using the liquid leakage checker, drip the liquid on a
possibly faulty position. If gas leaks, bubbles appear, so you can
determine the location of a leakage. After using the liquid
leakage checker, wipe off the checker, and clean the position
with alcohol.
NOTE
The helium leakage detector detects helium in the
laser gas. If ambient air flows, detection becomes
difficult. So, checking should be made in a nearly
no-wind condition.
(6) After completing the check, reset the value set in (3) above to the
original setting.