5.TROUBLESHOOTING B-70315EN/02
- 120 -
No. Cause of trouble Solution
1 Anomaly of parameter
setting of gas pressure
control
Check whether the values of PRM NO.
15000/bit1,15244,15245,15246 are set as
indicated in the attached parameter table. If a
different value is set, set the value specified in
the data sheets.
2 Leakage in circulating
system
1) Check whether any joints in the gas
circulating system are loose. If a loose joint
is found, tighten the joint firmly.
2) Check whether any components of the gas
circulating system are cracked. If a cracked
component is found, replace that
component.
3) Check that the discharge tubes are free
from any hole or crack and that the O-rings
are not degraded. If a cracked or damaged
component is found, replace it.
3 Stopped turbo blower Check the turbo blower and inverter.
4 Abnormal supply laser
gas pressure setting
Adjust the secondary pressure at the regulator
on the gas cylinder so that the pressure of
laser gas supplied to the laser oscillator is
0.175MPa±0.025MPa (rating) as measured at
the entry of the oscillator.
5 Anomaly of pressure
sensor
Replace the pressure sensor.
6 The gas flow control
valve is closed.
Adjust the gas flow control valve to supply gas
at the specified flow rate.
7 Anomaly of gas control
unit
If the above checks do not reveal any
abnormality, replace the gas control unit.
ALM No.4079
PUSH RESET KEY
If the emergency stop button is pressed after the discharge start
ready condition (LRDY) is set up, the shutter is closed, discharge
stops, and the LRDY condition is resumed, then this alarm is
issued. To reset the alarm, remove the cause of trouble, release
the emergency stop button, and press the reset key on the
operator's panel.
Alarm output condition
This alarm is issued if an emergency stop occurs after LRDY is
established in the sequence.
Related data
DGN.960#1 *ESAL Emergency stop processing signal
ALM No.4080
LASER TUBE EXHAUST
When the oscillator start switch is turned on, the exhaust pump
starts evacuating the gas in the circulating system to place the
oscillator in the low-pressure state. At this time, this alarm is
issued if the pressure does not reach the prescribed vacuum
pressure when the specified time (default: 10 minutes) has
elapsed after the start of exhaust.