B-70315EN/02 TABLE OF CONTENTS
c-1
TABLE OF CONTENTS
SAFETY PRECAUTIONS............................................................................s-1
PREFACE....................................................................................................p-1
1 SAFETY FOR LASER HANDLING ......................................................... 1
1.1 LASER BEAM................................................................................................ 2
1.2 HIGH VOLTAGE............................................................................................ 8
1.3 SAFETY ENCLOSURE (AT YOUR WORK STATION)................................ 14
1.4 FIRE ............................................................................................................ 14
1.5 TOXIC FUME............................................................................................... 14
1.6 HIGH TEMPERATURE................................................................................ 15
1.7 WARNING LABELS..................................................................................... 21
1.8 HIGH-PRESSURE GAS .............................................................................. 34
1.9 KEY CONTROL ........................................................................................... 34
1.10 SHUTTER LOCK ......................................................................................... 35
1.11 EMERGENCY STOP BUTTON ................................................................... 35
1.12 WARNING LIGHT (OPTIONAL) .................................................................. 35
2 INTERNAL STRUCTURE......................................................................36
2.1 OUTLINE ..................................................................................................... 37
2.2 INTERNAL STRUCTURE ............................................................................ 39
3 INSTALLATION ....................................................................................48
3.1 INSTALLATION PROCEDURE ................................................................... 49
3.2 OSCILLATOR CONNECTIONS................................................................... 56
3.2.1 Laser Gas................................................................................................................56
3.2.1.1 Laser gas specification....................................................................................... 56
3.2.1.2 Gas pipe ............................................................................................................. 56
3.2.1.3 Leakage in external piping................................................................................. 57
3.2.1.4 Replacing the laser gas cylinder ........................................................................ 57
3.2.2 Cooling Water ........................................................................................................58
3.2.2.1 Specification of the cooling water ..................................................................... 58
3.2.2.2 Pure Water Supply Unit..................................................................................... 58
3.2.2.3 Cooling water piping ......................................................................................... 58
3.2.2.4 Anticorrosive ..................................................................................................... 59
3.2.2.5 Cleaning agent ................................................................................................... 59
3.2.2.6 Antifreezing solution ......................................................................................... 60
3.2.3 Electrical Connections............................................................................................61
3.2.3.1 NC-to-oscillator connection and power supply cable connection ..................... 61