B-70315EN/02 3.INSTALLATION
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3.3.7 Oscillation Characteristics
(1) Modify the parameters listed below.
PRM No.15000.4bit 1 (enables power correction)
(2) Turn on the oscillator start switch to place the oscillator in the
discharge state.
(3) When the oscillator starts discharge, power correction is
performed, and the rated output is specified automatically.
(4) After power correction ends, record the compensation coefficient
(parameter No. 15204).
(5) Three minutes after power correction ends, record the base
discharge output, discharge voltage (RFV), and current (RFI).
(6) Specify the rated output, and record the discharge voltage (RFV)
and current (RFI).
Compare the values measured in (4), (5), and (6) above with the
values on the data sheets. If the discharge voltage (RFV) is high,
check the external laser gas piping and laser gas composition, or
perform discharge aging.
3.3.8 Discharge Margin Check
(1) Modify the parameters listed below.
PRM No.15000.4bit 0 (disable power correction)
PRM No.15223 Setting value -60 (bias command value)
(2) After the setting of parameter No. 15223 is changed, warning
message "Parameter was changed" is displayed when the LRDY
state is entered. Release the message by a reset operation.
(3) Remove the top panel of the oscillator so that the discharge tube
and trigger electrode can be checked.
(4) Turn on the oscillator start switch to place the oscillator in the
discharge state.
(5) Check that discharge of the trigger electrode does not disappear
in 30 minutes after start of discharge.
(6) After checking ends, reset the parameters set in (1) to their
original settings.
If discharge disappears in (5), check the external laser gas piping and
laser gas composition, or perform discharge aging.