B-70315EN/02 INDEX
i-1
INDEX
<A>
Adjusting the exhaust unit (adjusting the laser gas
consumption)................................................................. 201
Adjusting the Flow Sensor ............................................211
Adjusting the Oil Level Detection Signal .....................180
Adjusting the Position ................................................... 216
Adjustment Method....... 169, 196, 204, 219, 241, 244, 247
Adjustment Method (Adjusting the Laser Gas
Consumption)................................................................206
ALIGNMENT OF THE BEAM FOLDING UNIT
(C2000-E, C4000-E SHORT OPTICAL PATH
LENGTH TYPE) ..........................................................254
ALIGNMENT OF THE GUIDE LASER .....................256
ALIGNMENT OF THE RESONATOR........................ 236
Alignment Procedure at Mirror Cleaning Time ............ 247
Alignment Procedure during Installation after
Transportation ...............................................................244
Alignment Procedure for Adjusting All Mirrors ...........241
Anticorrosive................................................................... 59
Antifreezing solution.......................................................60
Attaching and Detaching a Cable to and from
the Terminal Block........................................................ 218
AUTOMATIC AGING .................................................262
AUTOMATIC AGING FUNCTION ............................332
AUTOMATIC LEAKAGE CHECK............................. 264
<B>
Base discharge adjustment ............................................ 169
BEAM ABSORBER ..................................................... 216
Beam Mode Check..........................................................85
Bell-shaped Filter for Power Feedback Gain ................ 270
<C>
Check ............................................................................172
Check for Leakage within the Oscillator.........................80
Checking Cooling Water.................................................79
Checking the IF PCB signals ..........................................77
Checking the jumper pins................................................ 77
Checking the Parameters...............................................181
Checking the power supply .............................................75
Circuit Breaker for Cooling Fan, Solenoid Valve, and
Stabilized Power Supply Trips......................................134
Cleaning ........................................................................223
Cleaning agent.................................................................59
Cleaning and Replacing the Beam Folding Unit ...........234
Cleaning and Replacing the Folding Mirrors ................232
CLEANING AND REPLACING THE OPTICAL
PARTS ..........................................................................227
Cleaning and Replacing the Output Coupler and Rear
Mirror............................................................................228
Compensation coefficient history display .....................259
Compensation for Power Sensor Response Speed ........268
Configuration ................................................ 193, 202, 205
CONTROL SEQUENCES IN LASER OSCILLATOR 341
Cooling Water .................................................................58
Cooling water piping.......................................................58
COOLING WATER PIPING ........................................145
<D>
DAILY INSPECTION ....................................................91
Data Table .....................................................................266
Data table structure .......................................................267
DETAILS OF CHECKING.............................................75
DETAILS OF MAINTENANCE ....................................93
Details of safety circuit ...................................................68
DIAGNOSIS SCREEN INFORMATION.....................282
Discharge Aging..............................................................82
Discharge Margin Check.................................................83
DISCHARGE TUBE.....................................................175
DISCHARGE TUBE SELECTION ..............................303
Discharge-related alarm history display........................260
Display Information ......................................................259
Display of Fluctuating Laser Output on CRT ...............134
<E>
Electrical Connections.....................................................61
ELECTRICAL CONNECTIONS..................................140
Electromagnetic Contactor of Exhaust Pump Trips
Thermally ......................................................................134
EMERGENCY STOP BUTTON ....................................35
ERROR CODE LIST ....................................................280
Excessive Laser Gas Consumption ...............................135
EXHAUST CONTROL UNIT (C2000-E, C4000-E)....205
EXHAUST PUMP ........................................................192
Exhaust Pump Filter........................................................99
Exhaust Pump Oil............................................................98