B-70315EN/02 7.UNITS
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7.11 EXHAUST CONTROL UNIT (C2000-E, C4000-E)
7.11.1 Configuration
(1) Exhaust flow rate adjustment valve
This valve adjusts the flow rate of laser gas released from the
oscillator during normal operation.
(2) Exhaust valve
When the oscillator starts, this valve opens to allow laser gas to
escape from the oscillator. During normal operation, this valve is
closed, and a constant amount of gas escapes through the exhaust
flow rate adjustment valve connected in parallel.
(3) Three way valve
This valve connects the exhaust pump to the oscillator to
discharge laser gas from the oscillator during exhaust pump
operation. When the exhaust pump is stopped, this valve
switches to the atmosphere to open the exhaust pump to
atmospheric pressure.
(4) Bypass valve
This valve connects the motor chamber of the turbo blower to the
exhaust pump. When the oscillator starts, this valve opens to
release laser gas from the motor section. During normal
operation, this valve is closed, and a constant amount of gas is
released through the orifice connected in parallel.
Fig.7.11 Installation of the exhaust control unit
djustment valve
(CV2)
Exhaust valve (V4) Exhaust distributor unit
Three way
Valve (V3)
Silencer (F3)
Bypass valve
(V5)