B-70315EN/02 APPENDIX D.DIAGNOSIS SCREEN INFORMATION
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#7 #6 #5 #4 #3 #2 #1 #0
966 *PSA08 *PSA07 *PSA06 *PSA05 *PSA04 *PSA03 *PSA02 *PSA01
*PSA01 to *PSA08 Displays the operating states of power supply units No. 1 to 8.
#7 #6 #5 #4 #3 #2 #1 #0
968 ACS PLS SL4 SL3 SL2 SL1 SL0
SL0 to SL4 Select signals for discharge tube monitor data
PLS Pulse command signal
0 : Filter provided
1 : No filter provided
ACS Access notice signal
0 : OFF
1 : ON
#7 #6 #5 #4 #3 #2 #1 #0
969 HSC SP2 SP1
SP1 Pressure/power select signal
SP2 Pressure/power select signal
HSC High-speed A/D conversion start
#7 #6 #5 #4 #3 #2 #1 #0
970 PS08 PS07 PS06 PS05 PS04 PS03 PS02 PS01
PS01 to PS08 Power select signals 1 to 8
0 : Not selected
1 : Selected
#7 #6 #5 #4 #3 #2 #1 #0
972 TWV BPV PTL GRY VEN RPA RBA PUG
PUG Purge valve
0 : Closed
1 : Open
RBA Blower activation
0 : Stopped
1 : Activated
RPA Exhaust pump activation
0 : Stopped
1 : Started
VEN Air release valve
0 : Closed
1 : Open
GRY Laser gas supply valve
0 : Closed
1 : Open