5.TROUBLESHOOTING B-70315EN/02
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Alarm output condition
This alarm is issued when the power compensation coefficient exceeds
the power compensation limit during execution of power compensation.
Power compensation coefficient = (Pc/Pa) × 1024
Pc : Parameter No. 15200 or 15201
Pa : Actual laser output
Related parameters
PRM.15200 Power compensation command output for a half of the
discharge tubes
PRM.15201 Power compensation command output for all discharge
tubes
PRM.15203 Power compensation limit
PRM.15204 Power compensation coefficient
No. Cause of trouble Solution
1 An optical part in the
laser resonator is out of
position.
Align the laser resonator.
2 An optical part in the
laser resonator is dirty.
Clean or replace the optical part.
3 Other causes See the solution to the problem of laser
output decrease described in alarm No.
4076.
ALM No.4087
SHUTTER OH
This alarm is issued when the temperature of the shutter mirror
exceeds a preset maximum.
Alarm output condition
This alarm is issued if the shutter temperature signal becomes "0" after
LRDY is established in the sequence.
Related parameters
DGN.961#6 *SHT Shutter temperature
No. Cause of trouble Solution
1 Contamination of shutter
mirror
Clean the shutter mirror. If this alarm recurs
after the shutter mirror is cleaned, replace the
mirror.
2 Anomaly of temperature
sensor
Replace the temperature sensor.
3 Temperature sensor
cable broken
Replace the cable.
4 Intermediate PCB B
(A16B-1600-0363) or IF
PCB (A16B-2100-0142)
is faulty.
Replace the faulty PCB.
5 Anomaly of PCB
connection cables
Check the connection of each cable.
6 Anomaly of cooling fan When the cooling fan stops, replace it.