F.CONTROL SEQUENCES IN LASER OSCILLATOR APPENDIX B-70315EN/02
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F.1 OUTLINE OF LASER OSCILLATION SEQUENCES
SEQ 0
SEQ 10
SEQ 20
SEQ 30
CNC POWER = ON
CNC POWER = OFF
(START KEY)
RUN = ON
(START KEY)
RUN = OFF
HVON = OFF
HVON = ON
(WAIT=1)
SEQ29(RFHV=1)
(WAIT=1)
(RFHV=0)
INITIAL
READY OF
DISCHARGING
READY OF
OSCILLATION
PURGE = 0
LRDY = 0
PTLP = 0
LSTR = 0
PURGE = 1
LRDY = 0
PTLP = 0
LSTR = 0
PURGE = 0
LRDY = 1
PTLP = 0
LSTR = 0
PURGE = 0
LRDY = 0
PTLP = 1
LSTR = 1
POWER OFF state
Descriptions of the signals used in the figure
RUN : Oscillator start switch
HVON : Discharge start switch
PURGE : Purge in tube completion signal
LRDY : Discharge preparation completion signal
PTLP : Warning light signal
LSTR : Oscillation preparation completion signal
As is shown in the flow chart, the laser oscillation sequences can be
divided into four steps.
[SQ0] POWER OFF state
This is the state prior to power on where all the signals are in off state.
[SQ10] INITIAL state (purge completion state)
After power is turned on, laser comes into PURGE=1 state. This
signal is on when atmospheric pressure sensor monitors that the
intra-tube pressure equals atmospheric pressure.
Usually when this signal is on, purge completion lamp on operational
board is lit.