9.LASER SOFTWARE FUNCTION B-70315EN/02
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9.3 AUTOMATIC LEAKAGE CHECK
9.3.1 Overview
In order to check the vacuum system for a leakage, all valves are
closed automatically and the intra-tube pressure is measured at
intervals of a certain time period. Measured data is preserved. From
data recorded on the diagnosis screen, whether a leakage is found can
be checked.
9.3.2 Method of Operation
(1) Set bit 0 (LCK) of parameter No. 15153 to 1 to enable the
leakage check function.
#7 #6 #5 #4 #3 #2 #1 #0
15153 LCK
LCK
0: Disables the automatic leakage check function.
1: Enables the automatic leakage check function.
Set also a leakage check determination time.
15154 Leakage judgment time
[Unit of data] Second
[Valid data range] 3 to 65535
[Standard setting value] 900 (15 minutes)
Set a period of time for which the valves are closed to maintain the
pressure for a leakage check. Within a set period of time, the internal
pressure of the discharge tube is measured four times in total.
9.3.3 Operation of the Leakage Check Function
(1) When the oscillator start switch (RUN) is turned off in the
oscillation preparation completion state (LSTR), gas pressure
control is terminated. After waiting for a turbo blower stop time
of about 75 seconds (waiting is performed even if the turbo
blower is stopped), evacuation is started.
(2) When evacuation has been performed for the time (10 minutes,
usually) set in PRM No. 15256 or the pressure (DGN905) inside
the discharge tube becomes zero, all valves are closed. Then, the
oscillator sequence state number (DGN908) becomes 51 (in the
leakage check mode), and the all-valve-closed signal (F224#3:
AVCL) is output. "All valves" mean the following:
GRDY : Laser gas supply valve
PUG : Purge valve
OPV : External piping exhaust valve
BPV : Bypass valve