B-70315EN/02 2.INTERNAL STRUCTURE
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(9) Matching box
The matching box contains a matching circuit, which ensures that
power is effectively input to the discharge tubes.
(10) Turbo blower
This fan circulates the laser gas in the gas circulating system at
high speed. It rotates at a high speed of 60,000 revolutions per
minute (min
-1
).
(11) Inverter
This inverter drives the turbo blower. It is responsible for
acceleration/deceleration control and issuing alarms during start
and stop of the blower.
(12) Turbo PCB
This PCB relays overheating and frequency reached signals of
the turbo blower. In addition, it monitors the oil level of the turbo
blower.
(13) Gas dust collection unit
This unit is a cyclone dust collector that removes dust that gets in
the gas circulating system.
(14) Heat exchanger (inlet)
Water-cooled heat exchanger used to cool the laser gas that has
been heated by discharge, before it is drawn into the turbo
blower.
(15) Heat exchanger (outlet)
Water-cooled heat exchanger used to cool the laser gas that has
been heated by compression in the turbo blower, before being
forced into the discharge tubes.
(16) Gas control unit (C1000-E, C5000-E, C6000-E)
This gas control unit constantly monitors the gas pressure in each
discharge tube and supplies fresh laser gas to the circulating
system to keep the pressure constant while exhausting degraded
laser gas. It also monitors the supply status of the laser gas, purge
check for the circulating system and other items and has a
function of adjusting the amount of flow of the gas to be
exhausted. It provides the functions of both the C2000-E and
C4000-E pressure control unit and the exhaust control unit.
(17) Pressure control unit (C2000-E, C4000-E)
This gas control unit constantly monitors the gas pressure in each
discharge tube and supplies fresh laser gas to the circulating
system to keep the pressure constant while exhausting degraded
laser gas. It also monitors the supply status of the laser gas, purge
check for the circulating system, and other items.