B-70315EN/02 APPENDIX D.DIAGNOSIS SCREEN INFORMATION
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D.1 INFORMATION DISPLAYED ON THE DIAGNOSIS
SCREEN
With the diagnosis function, the information below can be displayed.
[CNC←PMC status display]
#7 #6 #5 #4 #3 #2 #1 #0
G220 *DU16 *DU8 *DU4 *DU2 *DU1
*DU1 to *DU16 Duty override signals
#7 #6 #5 #4 #3 #2 #1 #0
G221 AGRDY CLRDY
AGRDY Assist gas prepared signal
CLRDY Chiller prepared signal
#7 #6 #5 #4 #3 #2 #1 #0
G222 HVON RUN AGST BEMON SHTON SCLON *BEMLC *SHTLC
HVON Discharge start signal
RUN Oscillator start signal
AGST Assist gas start signal
BEMON Beam on signal
SHTON Shutter open signal
SCLON Guide light on signal
*BEMLC Beam lock signal
*SHTLC Shutter lock signal
#7 #6 #5 #4 #3 #2 #1 #0
G223 POV7 POV6 POV5 POV4 POV3 POV2 POV1 POV0
POV7 to POV0 Power override signals
#7 #6 #5 #4 #3 #2 #1 #0
G224 LCKON
LCKON Leakage check signal
#7 #6 #5 #4 #3 #2 #1 #0
G228 *FOV7 *FOV6 *FOV5 *FOV4 *FOV3 *FOV2 *FOV1 *FOV0
*FOV7 to *FOV0 Frequency override signal