7.UNITS B-70315EN/02
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(g) Turn off the discharge start signal (HV ON), then reset the
bias command value in PRM 15223 to the original value.
(h) When the base discharge state is entered, record the RFI
value. -------------------------------------------------------------(A)
7.2.2.3 Maximum output adjustment
(1) Specify the output of a half of the rated output value, and turn on
the beam. While checking that the power supply output does not
exceed the maximum power supply output (see Table 7.2.2) and
that the value of DCV does not exceed 230 V, increase the output
command value gradually to the maximum command value
indicated in Table 7.2.2. If the maximum value is about to be
exceeded, turn VR13 counterclockwise to prevent the maximum
value from being exceeded.
(2) After output of the maximum command value, wait 3 minutes.
Then, adjust VR13 to set the power supply output to the
maximum power supply output.
(3) Record the value of RFI.---------------------------------------------(B)
7.2.2.4 Check
(1) Fine adjustment
(a) In the base discharge state, adjust the RFI value to the value
of (A) with VR11.
(b) Output the maximum command value, and adjust the RFI
value to the value of (B) with VR13.
(c) Repeat (a) and (b) until the values almost match.
(d) Turn off the beam, and wait 3 minutes. Record the DCV,
DCI, RFV, and RFI values of each power supply. Check
that the actual laser output Pa is 0 W. If Pa is not 0 W, make
a power adjustment again.
(e) After output of the maximum command value, wait 3
minutes. Record the DCV, DCI, RFV, and RFI values of
each power supply. Then, check that the value of RFV does
not exceed the maximum RFV (Table 7.2.2).
(2) Pulse output test
(a) For the C2000-E, set the pulse test command value
specified in Table 7.2.2 (the value in parameter No. 15307)
in parameter No. 15207 and 15210.
(b) Perform internal discharge by outputting the pulse test
command specified in Table 7.2.2 with a frequency of 5 Hz
and a duty cycle of 5% for the pulse test time specified in
Table 7.2.2, and check that no alarm is issued. If an alarm is
issued, make a power supply adjustment again.
(3) Return the modified parameter values to the original values.