B-70315EN/02 9.LASER SOFTWARE FUNCTION
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(4) Aging operation is performed as many times as the number of
aging operations set in parameter No. 15334.
In aging, warmed-up gas operation (internal discharge) is
performed at low gas pressure and low power.
(5) The oscillator is started up at low pressure, and internal discharge
is performed at low power for a one-aging time. The discharge
then stops, and the oscillator returns to the LRDY state.
(6) The cycle from steps (4) to (5) above is automatically repeated as
many times as the set number.
(7) After the aging cycle is performed as many times as the set
number, power compensation operates, and the oscillator is
started up.
(8) Upon completion of automatic aging, the oscillator is placed in
the oscillation preparation completion state (LSTR).
9.2.3 Manual Operation
By using the automatic aging function, discharge aging with the laser
gas circulating system opened to the atmosphere can be performed.
(1) When the discharge preparation completion state (LRDY) is set
by turning on the oscillator start switch (RUN), set the number of
aging operations in parameter No. 15334.
(2) When the discharge start switch (HVON) is turned on after the
parameter is set, aging operation is performed as many times as
the set number. Upon completion of aging, the oscillation
preparation completion state (LSTR) is set.