B-70315EN/02 5.TROUBLESHOOTING
- 123 -
No. Cause of trouble Solution
3 Anomaly of supply laser
gas pressure
Adjust the secondary pressure at the
regulator on the gas cylinder so that the
pressure of laser gas supplied to the laser
oscillator is 0.175MPa±0.025MPa (rating) as
measured at the entry of the oscillator.
4 Anomaly of IF PCB
(A16B-2100-0142)
Measure the pressure monitor voltage (about
0 V to 9 V at the LTP test terminal) and
command voltage (about 5 V to 10 V at the
GPC test terminal) being output by the IF
PCB. If a measured voltage is abnormal,
replace the IF PCB.
5 Anomaly of pressure
control valve
Check the command voltage from the IF
PCB, pressure monitor voltage, and the
operation of the exhaust pump. If no problem
is found, replace the pressure control valve.
6 Anomaly of connection
cable
Check the cable connections.
7 Anomaly of pressure
sensor
If the above checks do not reveal any
abnormality, replace the pressure sensor.
ALM No.4082
TUBE PRES. SENSOR
This alarm appears when the signal of the pressure sensor used
for pressure control detector vanishes.
Alarm output condition
This alarm is issued if the actual gas pressure is detected to be zero or
less twice in a row at 16-msec intervals from the time the oscillator start
switch is turned on until it is turned off.
Related data
DGN.905 Actual gas pressure
No. Cause of trouble Solution
1 Open or poor contact in
connection cable
between pressure sensor
and IF PCB
Check the cable connection. If the connection
is abnormal, replace the cable.
2 Anomaly of IF PCB
(A16B-2100-0142)
If the signal from the pressure sensor is
normal, but the output from the IF PCB is
zero or less, the IF PCB is faulty. Replace the
IF PCB.
3 Anomaly of pressure
sensor
If the supply voltage (±15 V) to the pressure
sensor is normal, but the output from the
sensor is zero or less, the pressure sensor is
faulty. Replace the pressure sensor.
ALM No.4085
MIRROR CLEANING
This alarm appears when the laser output power decreases and
takes an abnormally higher calibration coefficient.
This monitoring is executed at the start of the oscillator for the
purpose of checking for decreases in output due to contamination
and degradation of optical components.