
8.CONTROL FUNCTION LASER FUNCTION B-64663EN/01
- 218 -
Parameter
#7 #6 #5 #4 #3 #2 #1 #0
15009 TME BCG BEM BS2 BS1 AS2 AS1
[Data type] Bit
AS2, AS 00: Tank A is being supplied with gases.
01: Tank A is mixing the gases.
10: Tank A is supplying the mixed gas.
11: Tank A is preparing for gas supply.
BS2, BS1 00: Tank B is being supplied with gases.
01: Tank B is mixing the gases.
10: Tank B is supplying the mixed gas.
11: Tank B is preparing for gas supply.
BEM 0: The supply pressure of the gas cylinder has fallen.
1: The supply pressure of the gas cylinder is normal.
BCG 0: The gas cylinder has been replaced.
1: The gas cylinder has not been replaced.
TEM 0: The supply pressure of the tank has fallen.
1: The supply pressure of the tank is normal.
15710 External piping (between cylinder and mixer) discharge time
[Data type] Word
[Unit of data] sec
[Valid data range] 0 to 32767
15711 Gas mixture wait time
[Data type] Word
[Unit of data] min
[Valid data range] 0 to 32767
15712 Mixer evacuation time
[Data type] Word
[Unit of data] min
[Valid data range] 0 to 32767
15713 Helium discharge time
[Data type] Word
[Unit of data] msec
[Valid data range] 0 to 32767
15714 Nitrogen/CO
2
gas discharge time
[Data type] Word
[Unit of data] msec
[Valid data range] 0 to 32767
15715 Degree of vacuum of gas pressure
[Data type] Word
[Unit of data] ( 1 = 13Pa )
[Valid data range] 0 to 32767