
B-64663EN/01 LASER FUNCTION 8.CONTROL FUNCTION
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15716 Evacuation wait time
[Data type] Word
[Unit of data] min
[Valid data range] 0 to 32767
Alarm and message
No. Message Contents
4136 High internal pressure The internal pressure of the mixer is too
high.
4137 Abnormal mixer power The power to the relay PCB in the mixer
is abnormal.
4138 Insufficient degree of vacuum The mixer does not reach a
predetermined degree of vacuum within
a predetermined evacuation time.
4139 Abnormal mixer pressure
switch
The supply pressure of the laser gas is
low, but the supply pressure of the tank
is not low.
CAUTION
For details of how to operate the laser gas mixer,
read the operator's manual provided with the laser
gas mixer.