
4.ASSIST GAS LASER FUNCTION B-64663EN/01
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LHC Oscillator control (shutter open/close, beam on/off, assist gas control)
is:
0: Not performed by external signals. Assist gas control is specified
by G32. (standard setting)
1: Performed by external signals. The PMC performs assist gas
control.
#7 #6 #5 #4 #3 #2 #1 #0
15004 AGC
[Data type] Bit
AGC G32 P_; specifies:
0: A flow pattern.
1: Direct Gas pressure control.
Alarm and message
No. Message Contents
4051 DATA ERROR An illegal value is specified with G32.
4071 ASSIST GAS NOT READY
The assist gas supply unit does not set
the assist gas ready signal (G221#7) to
1.
4089 ASSIST GAS NO SELECT
The laser output command is executed
while assist gas control is not
performed.