
B-63874EN-1/02 TABLE OF CONTENTS
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TABLE OF CONTENTS
PREFACE.................................................................................................. p-1
1 MANUAL MEASUREMENT FUNCTIONS..............................................1
1.1 SELECTING THE MEASURE SCREEN........................................................2
1.1.1 Selecting CALIBRATE ........................................................................................... 2
1.1.2 Selecting TOOL MESUR........................................................................................ 3
1.1.3 Selecting WORK SET............................................................................................. 4
1.1.4 Selecting MEASURE .............................................................................................. 5
1.2 CALIBRATION...............................................................................................6
1.2.1 TOUCH SENSOR POSITION MEASUREMENT................................................. 6
1.2.2 PROBE LENGTH CALIBRATION........................................................................ 9
1.2.3 STYLUS BALL DIAMETER CALIBRATION ................................................... 13
1.2.4 STYLUS OFFSETS CALIBRATION-A .............................................................. 17
1.2.5 STYLUS OFFSETS CALIBRATION-B............................................................... 20
1.3 TOOL MEASUREMENT ..............................................................................23
1.4 WORK SET..................................................................................................31
1.4.1 SINGLE SURFACE MEASUREMENT PROBE Z-AXIS ................................... 31
1.4.2 SINGLE SURFACE MEASUREMENT PROBE ................................................. 38
1.4.3 OUTSIDE DIAMETER MEASUREMENT ......................................................... 40
1.4.4 INSIDE DIAMETER MEASUREMENT ............................................................. 47
1.4.5 OUTSIDE WIDTH MEASUREMENT................................................................. 48
1.4.6 INSIDE WIDTH MEASUREMENT..................................................................... 54
1.4.7 C AXIS PHASE MEASUREMENT OF OUTSIDE GROOVE............................ 55
1.4.8 C AXIS PHASE MEASUREMENT OF INSIDE CAVE ..................................... 59
1.5 MEASURE ...................................................................................................60
1.5.1 SINGLE SURFACE MEASUREMENT PROBE Z-AXIS ................................... 60
1.5.2 SINGLE SURFACE MEASUREMENT PROBE X-AXIS................................... 65
1.5.3 OUTSIDE DIAMETER MEASUREMENT ......................................................... 66
1.5.4 INSIDE DIAMETER MEASUREMENT ............................................................. 69
1.5.5 OUTSIDE WIDTH MEASUREMENT................................................................. 70
1.5.6 INSIDE WIDTH MEASUREMENT..................................................................... 73
2 MEASUREMENT CYCLE.....................................................................74
2.1 MEASUREMENT SCREEN SELECTION....................................................75
2.2 CALIBRATION (PROBE Z-AXIS DIRECTION)............................................80
2.2.1 Touch Sensor Position Measurement .................................................................... 80